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Author:
Publisher:
ISBN:
Category : Electronics
Languages : en
Pages : 802
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Author:
Publisher:
ISBN:
Category : Electronics
Languages : en
Pages : 802
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Author: George Brewer
Publisher: Elsevier
ISBN: 0323153410
Category : Technology & Engineering
Languages : en
Pages : 377
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Book Description
Electron-Beam Technology in Microelectronic Fabrication presents a unified description of the technology of high resolution lithography. This book is organized into six chapters, each treating a major segment of the technology of high resolution lithography. The book examines topics such as the physics of interaction of the electrons with the polymer resist in which the patterns are drawn, the machines that generate and control the beam, and ways of applying electron-beam lithography in device fabrication and in the making of masks for photolithographic replication. Chapter 2 discusses fundamental processes by which patterns are created in resist masks. Chapter 3 describes electron-beam lithography machines, including some details of each of the major elements in the electron-optical column and their effect on the focused electron beam. Chapter 4 presents the use of electron-beam lithography to make discrete devices and integrated circuits. Chapter 5 looks at the techniques and economics of mask fabrication by the use of electron beams. Finally, Chapter 6 presents a comprehensive description and evaluation of the several high resolution replication processes currently under development. This book will be of great value to students and to engineers who want to learn the unique features of high resolution lithography so that they can apply it in research, development, or production of the next generation of microelectronic devices and circuits.
Author: Jed Z. Buchwald
Publisher: MIT Press
ISBN: 9780262524247
Category : History
Languages : en
Pages : 536
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Book Description
A biography of the electron and a history of the microphysical world that it opened up.
Author: Ken Dickson-Self
Publisher:
ISBN:
Category : Electric circuits
Languages : en
Pages :
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Author:
Publisher: DIANE Publishing
ISBN: 1428902074
Category : Chemical agents (Munitions)
Languages : en
Pages : 88
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Book Description
Author: Kurt F. J. Heinrich
Publisher:
ISBN:
Category : Electron probe microanalysis
Languages : en
Pages : 180
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Book Description
Author: A. Christou
Publisher:
ISBN:
Category : Probes (Electronic instruments).
Languages : en
Pages : 44
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Book Description
Author: Suresh Pillai
Publisher: Elsevier
ISBN: 1782421084
Category : Technology & Engineering
Languages : en
Pages : 355
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Book Description
Food safety is a constant challenge for the food industry, and food irradiation technology has developed significantly since its introduction, moving from isotope irradiation to the use of electron beam technology. Electron Beam Pasteurization and Complementary Food Processing Technologies explores the application of electron beam pasteurization in conjunction with other food processing technologies to improve the safety and quality of food. Part one provides an overview of the issues surrounding electron beam pasteurization in food processing. Part two looks at different thermal and non-thermal food processing technologies that complement irradiation. Finally, a case study section on the commercial applications of e-beam processing provides examples from industry.
Author:
Publisher:
ISBN:
Category :
Languages : en
Pages :
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Author: Lawrence Herman Bennett
Publisher:
ISBN:
Category : Catalysis
Languages : en
Pages : 228
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Book Description
