Author: Ludwig Reimer
Publisher: Springer
ISBN: 3540389679
Category : Science
Languages : en
Pages : 538
Book Description
Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.