Diagnostic Techniques for Semiconductor Materials Processing: Volume 406 PDF Download
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Author: Stella W. Pang
Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 616
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Book Description
The fabrication of Si- and compound semiconductor-based devices involves a number of steps ranging from material growth to pattern definition by lithography, and ultimately, pattern transfer by etching/deposition. The key to device manufacturing, however, is reproducibility, low cost and high yield. Diagnostic techniques allow correlation between processing and actual device performance to be established. Researchers from universities, industry and government come together in this book to examine the advances in diagnostic techniques that provide critical information on structural, optical and electrical properties of semiconductor devices, as well as monitoring techniques for equipment/processes for control and feedback. The overriding goal is for rapid, accurate materials characterization, both in situ and ex situ. Topics include: in situ diagnostics; proximal probe microscopies; optical probes of devices and device properties; spectroscopic ellipsometry/structural diagnostics; and material analysis - X-ray techniques, strain measurements and passivation.
Author: Stella W. Pang
Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 616
Get Book Here
Book Description
The fabrication of Si- and compound semiconductor-based devices involves a number of steps ranging from material growth to pattern definition by lithography, and ultimately, pattern transfer by etching/deposition. The key to device manufacturing, however, is reproducibility, low cost and high yield. Diagnostic techniques allow correlation between processing and actual device performance to be established. Researchers from universities, industry and government come together in this book to examine the advances in diagnostic techniques that provide critical information on structural, optical and electrical properties of semiconductor devices, as well as monitoring techniques for equipment/processes for control and feedback. The overriding goal is for rapid, accurate materials characterization, both in situ and ex situ. Topics include: in situ diagnostics; proximal probe microscopies; optical probes of devices and device properties; spectroscopic ellipsometry/structural diagnostics; and material analysis - X-ray techniques, strain measurements and passivation.
Author: O. J. Glembocki
Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 536
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Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author: Bernd O. Kolbesen
Publisher: The Electrochemical Society
ISBN: 9781566773485
Category : Technology & Engineering
Languages : en
Pages : 572
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Book Description
.".. ALTECH 2003 was Symposium J1 held at the 203rd Meeting of the Electrochemical Society in Paris, France from April 27 to May 2, 2003 ... Symposium M1, Diagnostic Techniques for Semiconductor Materials and Devices, was part of the 202nd Meeting of the Electrochemical Society held in Salt Lake City, Utah, from October 21 to 25, 2002 ..."--p. iii.
Author:
Publisher:
ISBN:
Category : Semiconductors
Languages : en
Pages : 618
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Book Description
Author: Bernd O. Kolbesen (Chemiker.)
Publisher: The Electrochemical Society
ISBN: 9781566772396
Category : Technology & Engineering
Languages : en
Pages : 568
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Book Description
Author: G.M. Crean
Publisher: Elsevier
ISBN: 0444596917
Category : Science
Languages : en
Pages : 352
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Book Description
There is a growing awareness that the successful implementation of novel material systems and technology steps in the fabrication of microelectronic and optoelectronic devices, is critically dependent on the understanding and control of the materials, the process steps and their interactions. The contributions in this volume demonstrate that characterisation and analysis techniques are an essential support mechanism for research in these fields. Current major research themes are reviewed both in the development and application of diagnostic techniques for advanced materials analysis and fabrication process control. Two distinct trends are elucidated: the emergence and evaluation of sophisticated in situ optical diagnostic techniques such as photoreflectance and spectroellipsometry and the industrial application of ultra-high sensitivity chemical analysis techniques for contamination monitoring. The volume will serve as a useful and timely overview of this increasingly important field.
Author: David Louis Harame
Publisher: The Electrochemical Society
ISBN: 9781566774208
Category : Science
Languages : en
Pages : 1242
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Book Description
Author:
Publisher:
ISBN:
Category : Aeronautics
Languages : en
Pages : 548
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Book Description
Author:
Publisher:
ISBN:
Category : Aeronautics
Languages : en
Pages : 994
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Book Description
Author: Janos H. Fendler
Publisher: John Wiley & Sons
ISBN: 3527612068
Category : Science
Languages : en
Pages : 488
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Book Description
In this concise handbook leading experts give a broad overview of the latest developments in this emerging and fascinating field of nano-sized materials. Coverage includes new techniques for the synthesis of nanoparticles as well as an in-depth treatment of their characterization and chemical and physical properties. The future applications of these advanced materials are also discussed. The wealth of information included makes this an invaluable guide for graduate students as well as scientists in materials science, chemistry or physics - looking for a comprehensive treatment of the topic.
