Author: Charlotte Emma Moore
Publisher:
ISBN:
Category : Nuclear energy
Languages : en
Pages : 300

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Author: Joan C. Sauerwein
Publisher:
ISBN:
Category : Chemistry, Physical and theoretical
Languages : en
Pages : 148

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Author: Gertrude B. Sherwood
Publisher:
ISBN:
Category : Chemistry
Languages : en
Pages : 132

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Author: A.J. van Roosmalen
Publisher: Springer Science & Business Media
ISBN: 148992566X
Category : Science
Languages : en
Pages : 247

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Book Description
This book has been written as part of a series of scientific books being published by Plenum Press. The scope of the series is to review a chosen topic in each volume. To supplement this information, the abstracts to the most important references cited in the text are reprinted, thus allowing the reader to find in-depth material without having to refer to many additional publications. This volume is dedicated to the field of dry (plasma) etching, as applied in silicon semiconductor processing. Although a number of books have appeared dealing with this area of physics and chemistry, these all deal with parts of the field. This book is unique in that it gives a compact, yet complete, in-depth overview of fundamentals, systems, processes, tools, and applications of etching with gas plasmas for VLSI. Examples are given throughout the fundamental sections, in order to give the reader a better insight in the meaning and magnitude of the many parameters relevant to dry etching. Electrical engineering concepts are emphasized to explain the pros and cons of reactor concepts and excitation frequency ranges. In the description of practical applications, extensive use is made of cross-referencing between processes and materials, as well as theory and practice. It is thus intended to provide a total model for understanding dry etching. The book has been written such that no previous knowledge of the subject is required. It is intended as a review of all aspects of dry etching for silicon semiconductor processing.

Author: Philippe Hunenberger
Publisher: Royal Society of Chemistry
ISBN: 1782624961
Category : Science
Languages : en
Pages : 614

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Book Description
Ions are ubiquitous in chemical, technological, ecological and biological processes. Characterizing their role in these processes in the first place requires the evaluation of the thermodynamic parameters associated with the solvation of a given ion. However, due to the constraint of electroneutrality, the involvement of surface effects and the ambiguous connection between microscopic and macroscopic descriptions, the determination of single-ion solvation properties via both experimental and theoretical approaches has turned out to be a very difficult and highly controversial problem. This unique book provides an up-to-date, compact and consistent account of the research field of single-ion solvation thermodynamics that has over one hundred years of history and still remains largely unsolved. By reviewing the various approaches employed to date, establishing the relevant connections between single-ion thermodynamics and electrochemistry, resolving conceptual ambiguities, and giving an exhaustive data compilation (in the context of alkali and halide hydration), this book provides a consistent synthesis, in depth understanding and clarification of a large and sometimes very confusing research field. The book is primarily aimed at researchers (professors, postgraduates, graduates, and industrial researchers) concerned with processes involving ionic solvation properties (these are ubiquitous, eg. in physical/organic/analytical chemistry, electrochemistry, biochemistry, pharmacology, geology, and ecology). Because of the concept definitions and data compilations it contains, it is also a useful reference book to have in a university library. Finally, it may be of general interest to anyone wanting to learn more about ions and solvation. Key features: - discusses both experimental and theoretical approaches, and establishes the connection between them - provides both an account of the past research (covering over one hundred years) and a discussion of current directions (in particular on the theoretical side) - involves a comprehensive reference list of over 2000 citations - employs a very consistent notation (including table of symbols and unambiguous definitions of all introduced quantities) - provides a discussion and clarification of ambiguous concepts (ie. concepts that have not been defined clearly, or have been defined differently by different authors, leading to confusion in past literature) - encompasses an exhaustive data compilation (in the restricted context of alkali and halide hydration), along with recommended values (after critical analysis of this literature data) - is illustrated by a number of synoptic colour figures, that will help the reader to grasp the connections between different concepts in one single picture

Author:
Publisher:
ISBN:
Category : Physical instruments
Languages : en
Pages : 204

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Author: National Measurement Laboratory (U.S.). Office of Standard Reference Data
Publisher:
ISBN:
Category : Chemistry, Physical and theoretical
Languages : en
Pages : 204

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Author: United States. National Bureau of Standards
Publisher:
ISBN:
Category : Chemistry
Languages : en
Pages : 712

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Author: W. Hanle
Publisher: Springer Science & Business Media
ISBN: 1461576881
Category : Science
Languages : en
Pages : 743

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W. HANLE and H. KLEINPOPPEN In 1919, in the first edition of Atombau and Spektrallinien, Sommerfeld referred to the immense amount of information which had been accumu lated during the first period of 60 years of spectroscopic practice. Sommer feld emphasized that the names of Planck and Bohr would be connected forever with the efforts that had been made to understand the physics and the theory of spectral lines. Another period of almost 60 years has elapsed since the first edition of Sommerfeld's famous monograph. As the editors of this monograph, Progress in Atomic Spectroscopy, we feel that the present period is best characterized by the large variety of new spec troscopic methods that have been invented in the last decades. Spectroscopy has always been involved in the field of research on atomic structure and the interaction of light and atoms. The development of new spectroscopic methods (i.e., new as compared to the traditional optical methods) has led to many outstanding achievements, which, together with the increase of activity over the last decades, appear as a kind of renaissance of atomic spectroscopy.

Author: National Institute of Standards and Technology (U.S.)
Publisher:
ISBN:
Category :
Languages : en
Pages : 554

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Book Description