Aluminum Nitride Thin Films on Titanium PDF Download

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Aluminum Nitride Thin Films on Titanium

Aluminum Nitride Thin Films on Titanium PDF Author: Seth E. Boeshore
Publisher: ProQuest
ISBN: 9780542856082
Category :
Languages : en
Pages : 332

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Book Description
Piezoelectric unimorph cantilever beams have been fabricated from the deposited films and used for the first demonstration of piezoelectric transduction on titanium. At large displacements, these beams exhibit nonlinear spring softening. An analytical model has been developed to accurately describe the frequency response of these beams and to calculate the material properties of the film. Test results from these beams show that d 31 and k231 for the films are within 10% of the reported values.