Handbook of Advanced Plasma Processing Techniques PDF Download
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Author: R.J. Shul
Publisher: Springer Science & Business Media
ISBN: 3642569897
Category : Technology & Engineering
Languages : en
Pages : 664
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Book Description
Pattern transfer by dry etching and plasma-enhanced chemical vapor de position are two of the cornerstone techniques for modern integrated cir cuit fabrication. The success of these methods has also sparked interest in their application to other techniques, such as surface-micromachined sen sors, read/write heads for data storage and magnetic random access memory (MRAM). The extremely complex chemistry and physics of plasmas and their interactions with the exposed surfaces of semiconductors and other materi als is often overlooked at the manufacturing stage. In this case, the process is optimized by an informed "trial-and-error" approach which relies heavily on design-of-experiment techniques and the intuition of the process engineer. The need for regular cleaning of plasma reactors to remove built-up reaction or precursor gas products adds an extra degree of complexity because the interaction of the reactive species in the plasma with the reactor walls can also have a strong effect on the number of these species available for etching or deposition. Since the microelectronics industry depends on having high process yields at each step of the fabrication process, it is imperative that a full understanding of plasma etching and deposition techniques be achieved.
Author: R.J. Shul
Publisher: Springer Science & Business Media
ISBN: 3642569897
Category : Technology & Engineering
Languages : en
Pages : 664
Get Book Here
Book Description
Pattern transfer by dry etching and plasma-enhanced chemical vapor de position are two of the cornerstone techniques for modern integrated cir cuit fabrication. The success of these methods has also sparked interest in their application to other techniques, such as surface-micromachined sen sors, read/write heads for data storage and magnetic random access memory (MRAM). The extremely complex chemistry and physics of plasmas and their interactions with the exposed surfaces of semiconductors and other materi als is often overlooked at the manufacturing stage. In this case, the process is optimized by an informed "trial-and-error" approach which relies heavily on design-of-experiment techniques and the intuition of the process engineer. The need for regular cleaning of plasma reactors to remove built-up reaction or precursor gas products adds an extra degree of complexity because the interaction of the reactive species in the plasma with the reactor walls can also have a strong effect on the number of these species available for etching or deposition. Since the microelectronics industry depends on having high process yields at each step of the fabrication process, it is imperative that a full understanding of plasma etching and deposition techniques be achieved.
Author: Yoshinobu Kawai
Publisher: John Wiley & Sons
ISBN: 3527325441
Category : Technology & Engineering
Languages : en
Pages : 467
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Book Description
Clearly structured in five major sections on applications, this monograph covers such hot technologies as nanotechnology, solar cell technology, biomedical and clinical applications, and sustainability. Since the topic, applications and readers are highly interdisciplinary, the book bridges materials science, industrial chemistry, physics, and engineering -- making it a must-have for researchers in industry and academia, as well as those working in application-oriented plasma technology.
Author: John Ernest Harry
Publisher: John Wiley & Sons
ISBN: 3527643702
Category : Science
Languages : en
Pages : 235
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Book Description
Written by a university lecturer with more than forty years experience in plasma technology, this book adopts a didactic approach in its coverage of the theory, engineering and applications of technological plasmas. The theory is developed in a unified way to enable brevity and clarity, providing readers with the necessary background to assess the factors that affect the behavior of plasmas under different operating conditions. The major part of the book is devoted to the applications of plasma technology and their accompanying engineering aspects, classified by the various pressure and density regimes at which plasmas can be produced. Two chapters on plasma power supplies round off the book. With its broad range of topics, from low to high pressure plasmas, from characterization to modeling, and from materials to components, this is suitable for advanced undergraduates, postgraduates and professionals in the field.
Author: Sabu Thomas
Publisher: Elsevier
ISBN: 0128131535
Category : Technology & Engineering
Languages : en
Pages : 496
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Book Description
Non-Thermal Plasma Technology for Polymeric Materials: Applications in Composites, Nanostructured Materials and Biomedical Fields provides both an introduction and practical guide to plasma synthesis, modification and processing of polymers, their composites, nancomposites, blends, IPNs and gels. It examines the current state-of-the-art and new challenges in the field, including the use of plasma treatment to enhance adhesion, characterization techniques, and the environmental aspects of the process. Particular attention is paid to the effects on the final properties of composites and the characterization of fiber/polymer surface interactions. This book helps demystify the process of plasma polymerization, providing a thorough grounding in the fundamentals of plasma technology as they relate to polymers. It is ideal for materials scientists, polymer chemists, and engineers, acting as a guide to further research into new applications of this technology in the real world. - Enables materials scientists and engineers to deploy plasma technology for surface treatment, characterization and analysis of polymeric materials - Reviews the state-of-the-art in plasma technology for polymer synthesis and processing - Presents detailed coverage of the most advanced applications for plasma polymerization, particularly in medicine and biomedical engineering, areas such as implants, biosensors and tissue engineering
Author: Paul K. Chu
Publisher: CRC Press
ISBN: 1466509902
Category : Science
Languages : en
Pages : 497
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Book Description
Written by a team of pioneering scientists from around the world, Low Temperature Plasma Technology: Methods and Applications brings together recent technological advances and research in the rapidly growing field of low temperature plasmas. The book provides a comprehensive overview of related phenomena such as plasma bullets, plasma penetration into biofilms, discharge-mode transition of atmospheric pressure plasmas, and self-organization of microdischarges. It describes relevant technology and diagnostics, including nanosecond pulsed discharge, cavity ringdown spectroscopy, and laser-induced fluorescence measurement, and explores the increasing research on atmospheric pressure nonequilibrium plasma jets. The authors also discuss how low temperature plasmas are used in the synthesis of nanomaterials, environmental applications, the treatment of biomaterials, and plasma medicine. This book provides a balanced and thorough treatment of the core principles, novel technology and diagnostics, and state-of-the-art applications of low temperature plasmas. It is accessible to scientists and graduate students in low-pressure plasma physics, nanotechnology, plasma medicine, and materials science. The book is also suitable as an advanced reference for senior undergraduate students.
Author: Riccardo d'Agostino
Publisher: John Wiley & Sons
ISBN: 3527622195
Category : Science
Languages : en
Pages : 479
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Book Description
A panel of internationally renowned scientists discuss the latest results in plasma technology. This volume has been compiled with both a didactic approach and an overview of the newest achievements for industrial applications. It is divided into two main sections. One is focused on fundamental technology, including plasma production and control, high-pressure discharges, modeling and simulation, diagnostics, dust control, and etching. The section on application technology covers polymer treatments, silicon solar cell, coating and spray, biomaterials, sterilization and waste treatment, plasma propulsion, plasma display panels, and anti-corrosion coatings. The result is an indispensable work for physicists, chemists and engineers involved in the field of plasma technology.
Author:
Publisher:
ISBN:
Category : Technology
Languages : en
Pages : 140
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Book Description
Author: A. I. Morozov
Publisher: CRC Press
ISBN: 1439881332
Category : Science
Languages : en
Pages : 828
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Book Description
As the twenty-first century progresses, plasma technology will play an increasing role in our lives, providing new sources of energy, ion-plasma processing of materials, wave electromagnetic radiation sources, space plasma thrusters, and more. Studies of the plasma state of matter not only accelerate technological developments but also improve the
Author:
Publisher:
ISBN:
Category : Naval research
Languages : en
Pages : 88
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Book Description
Author: Setsuo Ichimaru
Publisher: CRC Press
ISBN: 0429970668
Category : Science
Languages : en
Pages : 352
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Book Description
The book describes a statistical approach to the basics of plasma physics.
