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Author: R MUNNING SCHMIDT
Publisher:
ISBN: 9781643680507
Category :
Languages : en
Pages : 948
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Book Description
Since they entered our world around the middle of the 20th century, the application of mechatronics has enhanced our lives with functionality based on the integration of electronics, control systems and electric drives.This book deals with the special class of mechatronics that has enabled the exceptional levels of accuracy and speed of high-tech equipment applied in the semiconductor industry, realising the continuous shrink in detailing of micro-electronics and MEMS.As well as the more frequently presented standard subjects of dynamics, motion control, electronics and electromechanics, this book includes an overview of systems engineering, optics and precision measurement systems, in an attempt to establish a connection between these fields under one umbrella.Robert Munnig Schmidt is emeritus professor in Mechatronic System Design at Delft University of Technology with industrial experience at Philips and ASML in research and development of consumer and high-tech systems. He is also director of RMS Acoustics & Mechatronics, doing research and development on active controlled low frequency sound systems.Georg Schitter is professor at the Automation and Control Institute (ACIN) at Vienna University of Technology with a standing track record in research on the control and mechatronic design of extremely fast precision motion systems such as video rate AFM systems.Adrian Rankers is managing partner of Mechatronics Academy, developing and delivering high level courses to the industrial community, based on industrial experience at Philips in the research and development of consumer and high-tech systems. He also teaches Mechatronics at the Eindhoven University of Technology.Jan van Eijk is emeritus professor in Advanced Mechatronics at Delft University of Technology. He is also director of MICE BV and partner at Mechatronics Academy, acting as industrial R&D advisor and teacher with experience at Philips in the research and development of consumer and high-tech systems.
Author: R MUNNING SCHMIDT
Publisher:
ISBN: 9781643680507
Category :
Languages : en
Pages : 948
Get Book Here
Book Description
Since they entered our world around the middle of the 20th century, the application of mechatronics has enhanced our lives with functionality based on the integration of electronics, control systems and electric drives.This book deals with the special class of mechatronics that has enabled the exceptional levels of accuracy and speed of high-tech equipment applied in the semiconductor industry, realising the continuous shrink in detailing of micro-electronics and MEMS.As well as the more frequently presented standard subjects of dynamics, motion control, electronics and electromechanics, this book includes an overview of systems engineering, optics and precision measurement systems, in an attempt to establish a connection between these fields under one umbrella.Robert Munnig Schmidt is emeritus professor in Mechatronic System Design at Delft University of Technology with industrial experience at Philips and ASML in research and development of consumer and high-tech systems. He is also director of RMS Acoustics & Mechatronics, doing research and development on active controlled low frequency sound systems.Georg Schitter is professor at the Automation and Control Institute (ACIN) at Vienna University of Technology with a standing track record in research on the control and mechatronic design of extremely fast precision motion systems such as video rate AFM systems.Adrian Rankers is managing partner of Mechatronics Academy, developing and delivering high level courses to the industrial community, based on industrial experience at Philips in the research and development of consumer and high-tech systems. He also teaches Mechatronics at the Eindhoven University of Technology.Jan van Eijk is emeritus professor in Advanced Mechatronics at Delft University of Technology. He is also director of MICE BV and partner at Mechatronics Academy, acting as industrial R&D advisor and teacher with experience at Philips in the research and development of consumer and high-tech systems.
Author: R. Munnig Schmidt
Publisher: IOS Press
ISBN: 164368051X
Category : Technology & Engineering
Languages : en
Pages : 949
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Book Description
Since they entered our world around the middle of the 20th century, the application of mechatronics has enhanced our lives with functionality based on the integration of electronics, control systems and electric drives. This book deals with the special class of mechatronics that has enabled the exceptional levels of accuracy and speed of high-tech equipment applied in the semiconductor industry, realising the continuous shrink in detailing of micro-electronics and MEMS. As well as the more frequently presented standard subjects of dynamics, motion control, electronics and electromechanics, this book includes an overview of systems engineering, optics and precision measurement systems, in an attempt to establish a connection between these fields under one umbrella. Robert Munnig Schmidt is emeritus professor in Mechatronic System Design at Delft University of Technology with industrial experience at Philips and ASML in research and development of consumer and high-tech systems. He is also director of RMS Acoustics & Mechatronics, doing research and development on active controlled low frequency sound systems. Georg Schitter is professor at the Automation and Control Institute (ACIN) at Vienna University of Technology with a standing track record in research on the control and mechatronic design of extremely fast precision motion systems such as video rate AFM systems. Adrian Rankers is managing partner of Mechatronics Academy, developing and delivering high level courses to the industrial community, based on industrial experience at Philips in the research and development of consumer and high-tech systems. He also teaches Mechatronics at the Eindhoven University of Technology. Jan van Eijk is emeritus professor in Advanced Mechatronics at Delft University of Technology. He is also director of MICE BV and partner at Mechatronics Academy, acting as industrial R&D advisor and teacher with experience at Philips in the research and development of consumer and high-tech systems.
Author: R. Munnig Schmidt
Publisher: IOS Press
ISBN: 1614993688
Category : Technology & Engineering
Languages : en
Pages : 928
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Book Description
Since they entered our world around the middle of the 20th century, the application of mechatronics has enhanced our lives with functionality based on the integration of electronics, control systems and electric drives. This book deals with the special class of mechatronics that has enabled the exceptional levels of accuracy and speed of high-tech equipment applied in the semiconductor industry, realising the continuous shrink in detailing of micro-electronics and MEMS. As well as the more frequently presented standard subjects of dynamics, motion control, electronics and electromechanics, this book includes an overview of systems engineering, optics and precision measurement systems, in an attempt to establish a connection between these fields under one umbrella. Robert Munnig Schmidt is professor in Mechatronic System Design at Delft University of Technology with industrial experience at Philips and ASML in research and development of consumer and high-tech systems. He is also director of RMS Acoustics & Mechatronics, doing research and development on active controlled low frequency sound systems. Georg Schitter is professor at the Automation and Control Institute (ACIN) at Vienna University of Technology with a standing track record in research on the control and mechatronic design of extremely fast precision motion systems such as video rate AFM systems. Adrian Rankers is managing partner of Mechatronics Academy, developing and delivering high level courses to the industrial community, based on industrial experience at Philips in the research and development of consumer and high-tech systems. Jan van Eijk is emeritus professor in Advanced Mechatronics at Delft University of Technology. He is also director of MICE BV and partner at Mechatronics Academy, acting as industrial R&D advisor and teacher with experience at Philips in the research and development of consumer and high-tech systems.
Author: Baoyan Duan
Publisher: John Wiley & Sons
ISBN: 1119904390
Category : Technology & Engineering
Languages : en
Pages : 340
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Book Description
The first book of its kind to focus on the coupling theory, methodology and applications of microwave equipment Electromechanical Coupling Theory, Methodology and Applications for High-Performance Microwave Equipment is an authoritative and up-to-date guide to the structural, mechanical, and electrical aspects of electromechanical coupling. Addressing control, electromagnetism, and structural engineering, this comprehensive reference addresses the electromechanical coupling of high-performance microwave electronic equipment (MEE), such as antennas, radar, large radio telescopes, and telecommunication and navigation equipment. The book is divided into four main sections, beginning with an introduction to electromechanical coupling (EMC) theory and a detailed description of the multi-field coupling model (MFCM) and the influence mechanism (IM) of nonlinear factors of antenna-servo-feeder systems on performance. Subsequent sections discuss MFCM- and IM-based design methodology, EMC-based measurement and testing, computer software for coupling analysis and design of electronic equipment, and various engineering applications of EMC theory and the IM of typical electronic equipment. In addition, the book: Discusses information and data transfer in electromagnetic fields, mechanical and structural deformation fields, and temperature fields Explains how high-performance microwave electronic equipment differs from traditional mechanical equipment Addresses EMC-based and general design-vector based optimization of electronic equipment design Describes applications such as a gun-guided radar system for warships and a large-diameter antenna for moon exploration Includes evaluation criteria to validate MFCM/IM design theory and methodology Electromechanical Coupling Theory, Methodology and Applications for High-Performance Microwave Equipment is essential reading for circuit designers, microwave engineers, researchers working with high-frequency microwave engineering, and engineers working with integrated circuits in radar, communications, IoT, antenna engineering, and remote sensing.
Author: Takashi Yamaguchi
Publisher: CRC Press
ISBN: 1466555718
Category : Science
Languages : en
Pages : 318
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Book Description
Mechatronic systems are used in a range of consumer products from large-scale braking systems in vehicular agents to small-scale integrated sensors in mobile phones. To keep pace in the competitive consumer electronics industry, companies need to continuously improve servo evaluation and position control of these mechatronic systems. Advances in High-Performance Motion Control of Mechatronic Systems covers advanced control topics for mechatronic applications. In particular, the book examines control systems design for ultra-fast and ultra-precise positioning of mechanical actuators in mechatronic systems. The book systematically describes motion control design methods for trajectory design, sampled-data precise positioning, transient control using switching control, and dual-stage actuator control. Each method is described in detail, from theoretical aspects to examples of actual industry applications including hard disk drives, optical disk drives, galvano scanners, personal mobility robots, and more. This helps readers better understand how to translate control theories and algorithms from theory to design and implementation in realistic engineering systems. The book also identifies important research directions and advanced control techniques that may provide solutions for the next generation of high-performance mechatronics. Bridging research and industry, this book presents state-of-the-art control design methodologies that are widely applicable to industries such as manufacturing, robotics, home appliances, automobiles, printers, and optical drives. It guides readers toward more effective solutions for high-performance mechatronic systems in their own products.
Author:
Publisher: Academic Press
ISBN: 0124077285
Category : Technology & Engineering
Languages : en
Pages : 411
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Book Description
Advances in Imaging and Electron Physics features cutting-edge articles on the physics of electron devices (especially semiconductor devices), particle optics at high and low energies, microlithography, image science and digital image processing, electromagnetic wave propagation, electron microscopy, and the computing methods used in all these domains. - Contributions from leading authorities - Informs and updates on all the latest developments in the field
Author: Kazuyuki Murase
Publisher: Springer Science & Business Media
ISBN: 3540293442
Category : Technology & Engineering
Languages : en
Pages : 402
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Book Description
This volume contains a collection of papers presented at the 3rd Interna tional Symposium on Autonomous Minirobots for Research and Edutainment (AMiRE 2005) that is held at Awara-Spa, Fukui, Japan, September 20-22, 2005. This is a biennial symposium, which started as AMiRE 2001 at the Heinz Nixdorf Institute of the University of Paderborn, Germany, in 2001, and was followed by AMiRE 2003 at Queensland University of Technology, Brisbane, Australia, in 2003. After these successful symposia, AMiRE 2005 is held under the sponsorship of the Faculty of Engineering, University of Fukui and under the co-sponsorship of the IEEE Robotics and Automation Society. It is funded by the Fukui Convention Bureau and the University of Fukui. Each full-length paper submitted to the symposium was independently reviewed by 3 referees from the world's front-line researchers, and 55 papers were accepted for oral presentation. We acknowledge generous support for those who gave excellent reviews in order to maintain the high standards of the symposium despite a very tight schedule.
Author: Mahmoud Rasras
Publisher: MDPI
ISBN: 3038974145
Category : Technology & Engineering
Languages : en
Pages : 252
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Book Description
Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Accelerometers are among the most widely used sensors implemented in MEMS technology. MEMS accelerometers are showing a growing presence in almost all industries ranging from automotive to medical. A traditional MEMS accelerometer employs a proof mass suspended to springs, which displaces in response to an external acceleration. A single proof mass can be used for one- or multi-axis sensing. A variety of transduction mechanisms have been used to detect the displacement. They include capacitive, piezoelectric, thermal, tunneling, and optical mechanisms. Capacitive accelerometers are widely used due to their DC measurement interface, thermal stability, reliability, and low cost. However, they are sensitive to electromagnetic field interferences and have poor performance for high-end applications (e.g., precise attitude control for the satellite). Over the past three decades, steady progress has been made in the area of optical accelerometers for high-performance and high-sensitivity applications but several challenges are still to be tackled by researchers and engineers to fully realize opto-mechanical accelerometers, such as chip-scale integration, scaling, low bandwidth, etc. This Special Issue on "MEMS Accelerometers" seeks to highlight research papers, short communications, and review articles that focus on: Novel designs, fabrication platforms, characterization, optimization, and modeling of MEMS accelerometers. Alternative transduction techniques with special emphasis on opto-mechanical sensing. Novel applications employing MEMS accelerometers for consumer electronics, industries, medicine, entertainment, navigation, etc. Multi-physics design tools and methodologies, including MEMS-electronics co-design. Novel accelerometer technologies and 9DoF IMU integration. Multi-accelerometer platforms and their data fusion.
Author: Victor Giurgiutiu
Publisher: CRC Press
ISBN: 1439883106
Category : Technology & Engineering
Languages : en
Pages : 936
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Book Description
Focusing on recent developments in engineering science, enabling hardware, advanced technologies, and software, Micromechatronics: Modeling, Analysis, and Design with MATLAB, Second Edition provides clear, comprehensive coverage of mechatronic and electromechanical systems. It applies cornerstone fundamentals to the design of electromechanical syst
Author: Pilar Gonzalez Ruiz
Publisher: Springer Science & Business Media
ISBN: 9400767994
Category : Technology & Engineering
Languages : en
Pages : 210
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Book Description
Polycrystalline SiGe has emerged as a promising MEMS (Microelectromechanical Systems) structural material since it provides the desired mechanical properties at lower temperatures compared to poly-Si, allowing the direct post-processing on top of CMOS. This CMOS-MEMS monolithic integration can lead to more compact MEMS with improved performance. The potential of poly-SiGe for MEMS above-aluminum-backend CMOS integration has already been demonstrated. However, aggressive interconnect scaling has led to the replacement of the traditional aluminum metallization by copper (Cu) metallization, due to its lower resistivity and improved reliability. Poly-SiGe for MEMS-above-CMOS sensors demonstrates the compatibility of poly-SiGe with post-processing above the advanced CMOS technology nodes through the successful fabrication of an integrated poly-SiGe piezoresistive pressure sensor, directly fabricated above 0.13 m Cu-backend CMOS. Furthermore, this book presents the first detailed investigation on the influence of deposition conditions, germanium content and doping concentration on the electrical and piezoresistive properties of boron-doped poly-SiGe. The development of a CMOS-compatible process flow, with special attention to the sealing method, is also described. Piezoresistive pressure sensors with different areas and piezoresistor designs were fabricated and tested. Together with the piezoresistive pressure sensors, also functional capacitive pressure sensors were successfully fabricated on the same wafer, proving the versatility of poly-SiGe for MEMS sensor applications. Finally, a detailed analysis of the MEMS processing impact on the underlying CMOS circuit is also presented.
