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Special Issue of the Micromechanics Section of Sensors and Actuators (SAMM)

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Special Issue of the Micromechanics Section of Sensors and Actuators (SAMM), Based on Contributions Revised from the Technical Digest of the IEEE 18th International Conference on Micro Electro Mechanical Systems (MEMS-2005)

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Special Issue of the Section of the Micromechanics Section of Sensors and Actuators (SAMM) Based on Contributions Revised from the Technical Digest of the IEEE 18th International Conference on Micro Electro Mechanical Systems (MEMS-2005), Miami, FL, USA, 30 January - 3 February 2005

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Special issue of the Micromechanics Section of Sensors and Actuators (SAMM) based on contributions revised from the Technical Digest of the IEEE international conference on micro electro mechanical systems (MEMS-2005), Miami, FL, USA, 30 January-3 February 2005

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Special Issue of the Micromechnaics Section of Sensors and Actuators (SAMM), Based on Contributions Revised from the Technical Digest of the IEEE 18th International Conference on Micro Electro Mechanical Systems (MEMS-2005) Miami, FL, USA, 30 January - 3 February 2005

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Special Issue of the Micromechanics Section of Sensors and Actuators (SAMM)

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Special Issue of the Micromechanics Section of Sensors and Actuators (SAMM, Based on Contributions Revised from the Technical Digest of the IEEE 19th International Conference on Micro Electro Mechanical Systems (MEMS 2006), Istanbul, Turkey, 22 - 26 January 2006

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Micromechanics

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Special Issue of the Micromechanics Section of Sensors and Actuators Based Upon Contributions Revised from the Technical Digest of the 27th IEEE International Conference on MICRO ELECTRO MECHANICAL SYSTEMS (MEMS-14; 26 - 30 January 2014, San Francisco, CA, USA)

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