Silicon Sensors on Membranes PDF Download
Are you looking for read ebook online? Search for your book and save it on your Kindle device, PC, phones or tablets. Download Silicon Sensors on Membranes PDF full book. Access full book title Silicon Sensors on Membranes by Mark Andrzej Gajda. Download full books in PDF and EPUB format.
Author: Mark Andrzej Gajda
Publisher:
ISBN:
Category :
Languages : en
Pages :
Get Book Here
Book Description
Author: Mark Andrzej Gajda
Publisher:
ISBN:
Category :
Languages : en
Pages :
Get Book Here
Book Description
Author: Sebastian Böhm
Publisher:
ISBN: 9789036514620
Category :
Languages : en
Pages : 176
Get Book Here
Book Description
Author: Benedetto Vigna
Publisher: Springer Nature
ISBN: 3030801357
Category : Technology & Engineering
Languages : en
Pages : 988
Get Book Here
Book Description
This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Readers will acquire a solid theoretical and practical background that will allow them to analyze the key performance aspects of devices, critically judge a fabrication process, and then conceive and design new ones for future applications. Envisioning a future complex versatile microsystem, the authors take inspiration from Richard Feynman’s visionary talk “There is Plenty of Room at the Bottom” to propose that the time has come to see silicon sensors as part of a “Feynman Roadmap” instead of the “More-than-Moore” technology roadmap. The sharing of the author’s industrially proven track record of development, design, and manufacturing, along with their visionary approach to the technology, will allow readers to jump ahead in their understanding of the core of the topic in a very effective way. Students, researchers, engineers, and technologists involved in silicon-based sensor and actuator research and development will find a wealth of useful and groundbreaking information in this book.
Author: Philipp Trocha
Publisher:
ISBN:
Category :
Languages : en
Pages : 55
Get Book Here
Book Description
Author: John A. Rogers
Publisher: John Wiley & Sons
ISBN: 3527690999
Category : Technology & Engineering
Languages : en
Pages : 365
Get Book Here
Book Description
Edited by the leaders in the fi eld, with chapters from highly renowned international researchers, this is the fi rst coherent overview of the latest in silicon nanomembrane research. As such, it focuses on the fundamental and applied aspects of silicon nanomembranes, ranging from synthesis and manipulation to manufacturing, device integration and system level applications, including uses in bio-integrated electronics, three-dimensional integrated photonics, solar cells, and transient electronics. The first part describes in detail the fundamental physics and materials science involved, as well as synthetic approaches and assembly and manufacturing strategies, while the second covers the wide range of device applications and system level demonstrators already achieved, with examples taken from electronics and photonics and from biomedicine and energy.
Author: Simon Armbruster
Publisher:
ISBN: 9783899594072
Category :
Languages : de
Pages : 150
Get Book Here
Book Description
Author: Jean Laconte
Publisher: Springer Science & Business Media
ISBN: 0387288430
Category : Technology & Engineering
Languages : en
Pages : 293
Get Book Here
Book Description
Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost. Micromachined Thin-Film Sensors for SOI-CMOS Co-integration covers the challenges and interests and demonstrates the successful co-integration of gas-flow sensors on dielectric membrane, with their associated electronics, in CMOS-SOI technology. We firstly investigate the extraction of residual stress in thin layers and in their stacking and the release, in post-processing, of a 1 μm-thick robust and flat dielectric multilayered membrane using Tetramethyl Ammonium Hydroxide (TMAH) silicon micromachining solution. The optimization of its selectivity towards aluminum is largely demonstrated. The second part focuses on sensors design and characteristics. A novel loop-shape polysilicon microheater is designed and built in a CMOS-SOI standard process. High thermal uniformity, low power consumption and high working temperature are confirmed by extensive measurements. The additional gas flow sensing layers are judiciously chosen and implemented. Measurements in the presence of a nitrogen flow and gas reveal fair sensitivity on a large flow velocity range as well as good response to many gases. Finally, MOS transistors suspended on released dielectric membranes are presented and fully characterized as a concluding demonstrator of the co-integration in SOI technology.
Author: Iris S. N. Takamatsu
Publisher:
ISBN:
Category :
Languages : en
Pages : 356
Get Book Here
Book Description
Author: John A. Rogers
Publisher: John Wiley & Sons
ISBN: 3527691014
Category : Technology & Engineering
Languages : en
Pages : 365
Get Book Here
Book Description
Edited by the leaders in the fi eld, with chapters from highly renowned international researchers, this is the fi rst coherent overview of the latest in silicon nanomembrane research. As such, it focuses on the fundamental and applied aspects of silicon nanomembranes, ranging from synthesis and manipulation to manufacturing, device integration and system level applications, including uses in bio-integrated electronics, three-dimensional integrated photonics, solar cells, and transient electronics. The first part describes in detail the fundamental physics and materials science involved, as well as synthetic approaches and assembly and manufacturing strategies, while the second covers the wide range of device applications and system level demonstrators already achieved, with examples taken from electronics and photonics and from biomedicine and energy.
Author: Maryna N. Kavalenka
Publisher:
ISBN:
Category :
Languages : en
Pages : 254
Get Book Here
Book Description
"Membranes made of an ultrathin porous nanocrystalline silicon (pnc-Si) film are well suited for many applications due to their key attributes, including thinness (15-30 nm), pore diameters (5-80 nm) and porosity (0.5-15 %). This thesis in an investigation into the unique properties of pnc-Si material in the context of gas transport, sensing and nanofluidics. The first part of the thesis investigates the flow properties of the material, and shows that membranes based on pnc-Si exhibit gas permeances that are several orders of magnitude higher than in other similar membranes. The components of the flow due to ballistic transport and transport after collision with the pore walls are quantified as a function of pore diameter. In addition, we demonstrate that changing the pore interior from silicon to carbon leads to flow enhancement resulting from a change in the nature of the molecule-pore wall interactions. Integrating the pnc-Si material into nanoscale devices is considered next. A novel approach to the fabrication of a capacitive sensor for organic vapor detection using a pnc-Si membrane metallized with gold as a porous electrode is presented. We show that the ultrathin nature of the pnc-Si allows for fast analyte vapor permeation to the receptor material. Finally, we describe a technique for effectively depositing gold electrodes on different sides of the membrane that is used to fabricate an ultrathin electroosmotic pump. These metallized pumps are shown to achieve significantly higher flow rates compared to bare pnc-Si membranes when low voltages are applied directly across the membrane"--Leaves viii-ix.
