Semiconductor Exhaust Ventilation Guidebook PDF Download
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Author: D. J. Burton
Publisher:
ISBN: 9781883992088
Category : Exhaust systems
Languages : en
Pages : 200
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Book Description
Author: D. J. Burton
Publisher:
ISBN: 9781883992088
Category : Exhaust systems
Languages : en
Pages : 200
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Book Description
Author: Charles Nehme
Publisher: Charles Nehme
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 30
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Book Description
HVAC stands for (Heating, Ventilation & Air Conditioning) This book is about HVAC applications of Semiconductor Plants & How they require large amounts of exhaust due to all the chemicals used in manufacturing silicon wafers. I will simplify this book as much as possible to be understood by non HVAC literate professionals or beginners in the HVAC industry. Charles Nehme is an HVAC Consultant with 30 years of international expertise and has accomplished and implemented many projects on different applications. keywords: hvac semiconductor hvac systems for semiconductor clean rooms Cleanroom semiconductor manufacturing semiconductor clean room standards semiconductor fabrication facility
Author: William R. Acorn
Publisher: William Andrew
ISBN: 0815516487
Category : Technology & Engineering
Languages : en
Pages : 374
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Book Description
Facilities which utilize hazardous liquids and gases represent a significant potential liability to the owner, operator, and general public in terms of personnel safety and preservation of assets. It is obvious that a catastrophic incident or loss of property or personnel is to be avoided at all costs. This book was conceived to give the reader a guide to understanding the requirements of the various codes and regulations that apply to the design, construction, and operation of facilities utilizing hazardous materials in their processes.
Author: J. Michael Sherer
Publisher: CRC Press
ISBN: 1351836943
Category : Technology & Engineering
Languages : en
Pages : 228
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Book Description
Given the myriad exhaust compounds and the corresponding problems that they can pose in an exhaust management system, the proper choice of such systems is a complex task. Presenting the fundamentals, technical details, and general solutions to real-world problems, Semiconductor Industry: Wafer Fab Exhaust Management offers practical guidance on selecting an appropriate system for a given application. Using examples that provide a clear understanding of the concepts discussed, Sherer covers facility layout, support facilities operations, and semiconductor process equipment, followed by exhaust types and challenges. He reviews exhaust point-of-use devices and exhaust line requirements needed between process equipment and the centralized exhaust system. The book includes information on wet scrubbers for a centralized acid exhaust system and a centralized ammonia exhaust system and on centralized equipment to control volatile organic compounds. It concludes with a chapter devoted to emergency releases and a separate chapter of examples illustrating these systems in use. Drawing on the author's 20 years of industry experience, the book shows you how to customize strategies specific to your needs, solve current problems, and prevent future issues in your exhaust management systems.
Author: Michael K. Harris
Publisher: AIHA
ISBN: 0932627986
Category : Industrial hygiene
Languages : en
Pages : 360
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Book Description
Author: Howard D. Goodfellow
Publisher: Academic Press
ISBN: 0128167793
Category : Technology & Engineering
Languages : en
Pages : 745
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Book Description
Industrial Ventilation Design Guidebook, Volume 2: Engineering Design and Applications brings together researchers, engineers (both design and plants), and scientists to develop a fundamental scientific understanding of ventilation to help engineers implement state-of-the-art ventilation and contaminant control technology. Now in two volumes, this reference contains extensive revisions and updates as well as a unique section on best practices for the following industrial sectors: Automotive; Cement; Biomass Gasifiers; Advanced Manufacturing; Industrial 4.0); Non-ferrous Smelters; Lime Kilns; Pulp and Paper; Semiconductor Industry; Steelmaking; Mining. - Brings together global researchers and engineers to solve complex ventilation and contaminant control problems using state-of-the-art design equations - Includes an expanded section on modeling and its practical applications based on recent advances in research - Features a new chapter on best practices for specific industrial sectors
Author: Richard A. Bolmen
Publisher: William Andrew
ISBN: 0815518994
Category : Technology & Engineering
Languages : en
Pages : 635
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Book Description
Interwoven within our semiconductor technology development had been the development of technologies aimed at identifying, evaluating and mitigating the environmental, health and safety (EH&S) risks and exposures associated with the manufacturing and packaging of integrated circuits. Driving and advancing these technologies have been international efforts by SEMI's Safety Division, the Semiconductor Safety Association (SSA), and the Semiconductor Industry Association (SIA). The purpose of the Semiconductor Safety Handbook is to provide a current, single source reference for many of the primary semiconductor EH&S technologies and disciplines. To this end, the contributors have assembled a comprehensive text written by some of the leading experts in EH&S in the semiconductor industry. This text had taken three years to complete and has involved tremendous effort and commitment by the authors.They have attempted to construct a reference manual that is comprehensive in its coverage of the technical aspects of each individual subject, while at the same time addressing practical applications of each topic. The scope of this text, from its inception, was intended to address significantly more than what would typically be classified under the definition of ""safety."" However, all of the chapters have a direct application to the protection and preservation of semiconductor employees, the surrounding communities and the environment.This book is a hands-on reference to environmental, health and safety issues critical to the semiconductor industry. It was also the author's intent to produce a text that provides a practical user's guide for semiconductor environmental, health and safety practitioners as well as those individuals responsible for operation, maintenance and production in wafer fabrication facilities.
Author: Louis J. DiBerardinis
Publisher: John Wiley & Sons
ISBN: 0470505524
Category : Science
Languages : en
Pages : 566
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Book Description
Proven and tested guidelines for designing ideal labs for scientific investigations Now in its Fourth Edition, Guidelines for Laboratory Design continues to enable readers to design labs that make it possible to conduct scientific investigations in a safe and healthy environment. The book brings together all the professionals who are critical to a successful lab design, discussing the roles of architects, engineers, health and safety professionals, and laboratory researchers. It provides the design team with the information needed to ask the right questions and then determine the best design, while complying with current regulations and best practices. Guidelines for Laboratory Design features concise, straightforward advice organized in an easy-to-use format that facilitates the design of safe, efficient laboratories. Divided into five sections, the book records some of the most important discoveries and achievements in: Part IA, Common Elements of Laboratory Design, sets forth technical specifications that apply to most laboratory buildings and modules Part IB, Common Elements of Renovations, offers general design principles for the renovation and modernization of existing labs Part II, Design Guidelines for a Number of Commonly Used Laboratories, explains specifications, best practices, and guidelines for nineteen types of laboratories, with three new chapters covering nanotechnology, engineering, and autopsy labs Part III, Laboratory Support Services, addresses design issues for imaging facilities, support shops, hazardous waste facilities, and laboratory storerooms Part IV, HVAC Systems, explains how to heat, cool, and ventilate labs with an eye towards energy conservation Part V, Administrative Procedures, deals with bidding procedures, final acceptance inspections, and sustainability The final part of the book features five appendices filled with commonly needed data and reference materials. This Fourth Edition is indispensable for all laboratory design teams, whether constructing a new laboratory or renovating an old facility to meet new objectives.
Author: Charles Nehme
Publisher: Independently Published
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 0
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Book Description
In the dynamic world of semiconductor manufacturing, where precision meets innovation, the role of exhaust systems is often overlooked but crucial. These systems play a vital role in ensuring the safety of workers, protecting the environment, and maintaining the integrity of semiconductor production processes. From managing toxic gases in reactive ion etching to controlling fumes in general ventilation, each type of exhaust system is tailored to mitigate specific risks and optimize operational efficiency. This preface sets the stage for exploring the intricate network of exhaust systems within semiconductor plants. It delves into their functions, components, and significance, highlighting how these systems uphold stringent standards of safety, environmental stewardship, and operational excellence. By understanding their pivotal role, semiconductor professionals can appreciate the meticulous planning and engineering that underpin these critical infrastructure components.
Author: S. Z. Mansdorf
Publisher: John Wiley & Sons
ISBN: 111958146X
Category : Technology & Engineering
Languages : en
Pages : 1333
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Book Description
A quick, easy-to-consult source of practical overviews on wide-ranging issues of concern for those responsible for the health and safety of workers This new and completely revised edition of the popular Handbook is an ideal, go-to resource for those who need to anticipate, recognize, evaluate, and control conditions that can cause injury or illness to employees in the workplace. Devised as a “how-to” guide, it offers a mix of theory and practice while adding new and timely topics to its core chapters, including prevention by design, product stewardship, statistics for safety and health, safety and health management systems, safety and health management of international operations, and EHS auditing. The new edition of Handbook of Occupational Safety and Health has been rearranged into topic sections to better categorize the flow of the chapters. Starting with a general introduction on management, it works its way up from recognition of hazards to safety evaluations and risk assessment. It continues on the health side beginning with chemical agents and ending with medical surveillance. The book also offers sections covering normal control practices, physical hazards, and management approaches (which focuses on legal issues and workers compensation). Features new chapters on current developments like management systems, prevention by design, and statistics for safety and health Written by a number of pioneers in the safety and health field Offers fast overviews that enable individuals not formally trained in occupational safety to quickly get up to speed Presents many chapters in a "how-to" format Featuring contributions from numerous experts in the field, Handbook of Occupational Safety and Health, 3rd Edition is an excellent tool for promoting and maintaining the physical, mental, and social well-being of workers in all occupations and is important to a company’s financial, moral, and legal welfare.
