Selected Papers on Optical Microlithography PDF Download
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Author: Harry L. Stover
Publisher:
ISBN:
Category : Masks (Electronics).
Languages : en
Pages : 708
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Book Description
SPIE Milestones are collections of seminal papers from the world literature covering important discoveries and developments in optics and photonics.
Author: Harry L. Stover
Publisher:
ISBN:
Category : Masks (Electronics).
Languages : en
Pages : 708
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Book Description
SPIE Milestones are collections of seminal papers from the world literature covering important discoveries and developments in optics and photonics.
Author: F. M. Schellenberg
Publisher: SPIE-International Society for Optical Engineering
ISBN:
Category : Integrated circuits
Languages : en
Pages : 910
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Book Description
Optical lithography for integrated circuits is undergoing a renaissance with the adoption of Resolution Enhancement Technology (RET). Some RET concepts have become routine in manufacturing. This volume gathers together seminal RET papers.
Author: Olaf Minet
Publisher: SPIE-International Society for Optical Engineering
ISBN:
Category : Medical
Languages : en
Pages : 746
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Book Description
SPIE Milestones are collections of seminal papers from the world literature covering important discoveries and developments in optics and photonics.
Author: Victor M. Bright
Publisher: SPIE-International Society for Optical Engineering
ISBN:
Category : Microelectromechanical systems
Languages : en
Pages : 654
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Book Description
A selection of 81 papers on six major topics within the field of optical microelectromechanical systems (MEMS).
Author: F. T. Arecchi
Publisher:
ISBN:
Category : Science
Languages : en
Pages : 746
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Book Description
Author: Francis T. S. Yu
Publisher: SPIE-International Society for Optical Engineering
ISBN:
Category : Computers
Languages : en
Pages : 668
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Book Description
SPIE Milestones are collections of seminal papers from the world literature covering important discoveries and developments in optics and photonics.
Author: David J. Whitehouse
Publisher: SPIE-International Society for Optical Engineering
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 672
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Book Description
Topics in this volume include: comparison of interferometric contouring techniques; comparison of visibility of standard scratches; and near-grazing illumination and shadowing of rough surfaces.
Author: Donald B. Keck
Publisher:
ISBN:
Category : Fiber optics
Languages : en
Pages : 600
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Book Description
Author: Suganda Jutamulia
Publisher: SPIE-International Society for Optical Engineering
ISBN:
Category : Computers
Languages : en
Pages : 732
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Book Description
Author: Suganda Jutamulia
Publisher: SPIE-International Society for Optical Engineering
ISBN:
Category : Computers
Languages : en
Pages : 720
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Book Description
