Scan Performance of Nanopositioning Systems with Large Travel Range

Scan Performance of Nanopositioning Systems with Large Travel Range PDF Author:
Publisher:
ISBN:
Category :
Languages : en
Pages :

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Scan Performance of Nanopositioning Systems with Large Travel Range

Scan Performance of Nanopositioning Systems with Large Travel Range PDF Author:
Publisher:
ISBN:
Category :
Languages : en
Pages :

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Book Description


Design, Modeling and Control of Nanopositioning Systems

Design, Modeling and Control of Nanopositioning Systems PDF Author: Andrew J. Fleming
Publisher: Springer
ISBN: 331906617X
Category : Technology & Engineering
Languages : en
Pages : 418

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Book Description
Covering the complete design cycle of nanopositioning systems, this is the first comprehensive text on the topic. The book first introduces concepts associated with nanopositioning stages and outlines their application in such tasks as scanning probe microscopy, nanofabrication, data storage, cell surgery and precision optics. Piezoelectric transducers, employed ubiquitously in nanopositioning applications are then discussed in detail including practical considerations and constraints on transducer response. The reader is then given an overview of the types of nanopositioner before the text turns to the in-depth coverage of mechanical design including flexures, materials, manufacturing techniques, and electronics. This process is illustrated by the example of a high-speed serial-kinematic nanopositioner. Position sensors are then catalogued and described and the text then focuses on control. Several forms of control are treated: shunt control, feedback control, force feedback control and feedforward control (including an appreciation of iterative learning control). Performance issues are given importance as are problems limiting that performance such as hysteresis and noise which arise in the treatment of control and are then given chapter-length attention in their own right. The reader also learns about cost functions and other issues involved in command shaping, charge drives and electrical considerations. All concepts are demonstrated experimentally including by direct application to atomic force microscope imaging. Design, Modeling and Control of Nanopositioning Systems will be of interest to researchers in mechatronics generally and in control applied to atomic force microscopy and other nanopositioning applications. Microscope developers and mechanical designers of nanopositioning devices will find the text essential reading.

Nanopositioning Technologies

Nanopositioning Technologies PDF Author: Changhai Ru
Publisher: Springer
ISBN: 3319238531
Category : Technology & Engineering
Languages : en
Pages : 412

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Book Description
This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

Control Strategies and Motion Planning for Nanopositioning Applications with Multi-axis Magnetic-levitation Instruments

Control Strategies and Motion Planning for Nanopositioning Applications with Multi-axis Magnetic-levitation Instruments PDF Author: Huzefa Shakir
Publisher:
ISBN:
Category :
Languages : en
Pages :

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Book Description
This dissertation is the first attempt to demonstrate the use of magnetic-levitation (maglev) positioners for commercial applications requiring nanopositioning. The key objectives of this research were to devise the control strategies and motion planning to overcome the inherent technical challenges of the maglev systems, and test them on the developed maglev systems to demonstrate their capabilities as the next-generation nanopositioners. Two maglev positioners based on novel actuation schemes and capable of generating all the six-axis motions with a single levitated platen were used in this research. These light-weight single-moving platens have very simple and compact structures, which give them an edge over most of the prevailing nanopositioning technologies and allow them to be used as a cluster tool for a variety of applications. The six-axis motion is generated using minimum number of actuators and sensors. The two positioners operate with a repeatable position resolution of better than 3 nm at the control bandwidth of 110 Hz. In particular, the Y-stage has extended travel range of 5 mm x 5 mm. They can carry a payload of as much as 0.3 kg and retain the regulated position under abruptly and continuously varying load conditions. This research comprised analytical design and development, followed by experimental verification and validation. Preliminary analysis and testing included open-loop stabilization and rigorous set-point change and load-change testing to demonstrate the precision-positioning and load-carrying capabilities of the maglev positioners. Decentralized single-input-single-output (SISO) proportional-integral-derivative (PID) control was designed for this analysis. The effect of actuator nonlinearities were reduced through actuator characterization and nonlinear feedback linearization to allow consistent performance over the large travel range. Closed-loop system identification and order-reduction algorithm were developed in order to analyze and model the plant behavior accurately, and to reduce the effect of unmodeled plant dynamics and inaccuracies in the assembly. Coupling among the axes and subsequent undesired motions and crosstalk of disturbances was reduced by employing multivariable optimal linear-quadratic regulator (LQR). Finally, application-specific nanoscale path planning strategies and multiscale control were devised to meet the specified conflicting time-domain performance specifications. All the developed methodologies and algorithms were implemented, individually as well as collectively, for experimental verification. Some of these applications included nanoscale lithography, patterning, fabrication, manipulation, and scanning. With the developed control strategies and motion planning techniques, the two maglev positioners are ready to be used for the targeted applications.

High Resolution Manufacturing from 2D to 3D/4D Printing

High Resolution Manufacturing from 2D to 3D/4D Printing PDF Author: Simone Luigi Marasso
Publisher: Springer Nature
ISBN: 3031137795
Category : Technology & Engineering
Languages : en
Pages : 297

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Book Description
This book provides a comprehensive presentation of the most frequently used high resolution manufacturing techniques available, as well as the polymeric materials used for each of the techniques. Divided into two parts covering the technologies and materials used and the impact on different research fields and case studies, High Resolution Manufacturing from 2D to 3D/4D Printing: Applications in Engineering and Medicine addresses issues like throughput improvement by volumetric 3D printing and presenting novel applications and case studies. In addition, this book also covers the latest breakthrough developments and innovations to help readers understand the future applications of this technology across various disciplines, including biomedicine, electronics, energy, and photonics.

Feedback Systems

Feedback Systems PDF Author: Karl Johan Åström
Publisher: Princeton University Press
ISBN: 069121347X
Category : Technology & Engineering
Languages : en
Pages :

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Book Description
The essential introduction to the principles and applications of feedback systems—now fully revised and expanded This textbook covers the mathematics needed to model, analyze, and design feedback systems. Now more user-friendly than ever, this revised and expanded edition of Feedback Systems is a one-volume resource for students and researchers in mathematics and engineering. It has applications across a range of disciplines that utilize feedback in physical, biological, information, and economic systems. Karl Åström and Richard Murray use techniques from physics, computer science, and operations research to introduce control-oriented modeling. They begin with state space tools for analysis and design, including stability of solutions, Lyapunov functions, reachability, state feedback observability, and estimators. The matrix exponential plays a central role in the analysis of linear control systems, allowing a concise development of many of the key concepts for this class of models. Åström and Murray then develop and explain tools in the frequency domain, including transfer functions, Nyquist analysis, PID control, frequency domain design, and robustness. Features a new chapter on design principles and tools, illustrating the types of problems that can be solved using feedback Includes a new chapter on fundamental limits and new material on the Routh-Hurwitz criterion and root locus plots Provides exercises at the end of every chapter Comes with an electronic solutions manual An ideal textbook for undergraduate and graduate students Indispensable for researchers seeking a self-contained resource on control theory

The Nanopositioning Book

The Nanopositioning Book PDF Author: Thomas R. Hicks
Publisher: Iste Publishing Company
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 136

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Book Description
This text sets out to: define and clarify terms used in specifying nanoprecision mechanisms (accuracy, precision, linearity); provide a guide to the servocontrol systems used in the authors' products; and give a general description of technologies involved in measuring and moving small distances.

Advanced Mechatronics and MEMS Devices II

Advanced Mechatronics and MEMS Devices II PDF Author: Dan Zhang
Publisher: Springer
ISBN: 3319321803
Category : Technology & Engineering
Languages : en
Pages : 719

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Book Description
This book introduces the state-of-the-art technologies in mechatronics, robotics, and MEMS devices in order to improve their methodologies. It provides a follow-up to "Advanced Mechatronics and MEMS Devices" (2013) with an exploration of the most up-to-date technologies and their applications, shown through examples that give readers insights and lessons learned from actual projects. Researchers on mechatronics, robotics, and MEMS as well as graduate students in mechanical engineering will find chapters on: Fundamental design and working principles on MEMS accelerometers Innovative mobile technologies Force/tactile sensors development Control schemes for reconfigurable robotic systems Inertial microfluidics Piezoelectric force sensors and dynamic calibration techniques ...And more. Authors explore applications in the areas of agriculture, biomedicine, advanced manufacturing, and space. Micro-assembly for current and future industries is also considered, as well as the design and development of micro and intelligent manufacturing.

A Treatise on Instrumentation Engineering

A Treatise on Instrumentation Engineering PDF Author: K. Padmanabhan
Publisher: Techsar Pvt. Ltd.
ISBN: 9381141037
Category : Technology & Engineering
Languages : en
Pages : 773

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Book Description
This book covers the whole groundwork for a consummate course on Instrumentation Engineering. Dealing with all types of instruments, methods of instrumentation, signal processing as well as sensors of every kind ─ electrical, electronic, photonic and also mechanical. The book is provided with lucid explanations of the topics with a large number of illustrations. There are worked examples embedded in the chapters and there are meaningful exercises for testing one’s study. The several chapters cover the subject and that includes the computer based instrumentation interfaces also. As such, having all these together in one volume will go a long way to meet the requirements of the candidates learning this subject nowadays.

Compliant Mechanisms

Compliant Mechanisms PDF Author: Nicolae Lobontiu
Publisher: CRC Press
ISBN: 1420040278
Category : Technology & Engineering
Languages : en
Pages : 469

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Book Description
Flexure hinges hold several advantages over classical rotation joints, including no friction losses, no need for lubrication, no hysteresis, compactness, capacity to be utilized in small-scale applications, ease of fabrication, virtually no assembly, and no required maintenance. Compliant Mechanisms: Design of Flexure Hinges provides practical answ