MEMS Reliability

MEMS Reliability PDF Author: Allyson L. Hartzell
Publisher: Springer Science & Business Media
ISBN: 144196018X
Category : Technology & Engineering
Languages : en
Pages : 300

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Book Description
The successful launch of viable MEMs product hinges on MEMS reliability, the reliability and qualification for MEMs based products is not widely understood. Companies that have a deep understanding of MEMs reliability view the information as a competitive advantage and are reluctant to share it. MEMs Reliability, focuses on the reliability and manufacturability of MEMS at a fundamental level by addressing process development and characterization, material property characterization, failure mechanisms and physics of failure (POF), design strategies for improving yield, design for reliability (DFR), packaging and testing.

MEMS Reliability

MEMS Reliability PDF Author: Allyson L. Hartzell
Publisher: Springer Science & Business Media
ISBN: 144196018X
Category : Technology & Engineering
Languages : en
Pages : 300

Get Book Here

Book Description
The successful launch of viable MEMs product hinges on MEMS reliability, the reliability and qualification for MEMs based products is not widely understood. Companies that have a deep understanding of MEMs reliability view the information as a competitive advantage and are reluctant to share it. MEMs Reliability, focuses on the reliability and manufacturability of MEMS at a fundamental level by addressing process development and characterization, material property characterization, failure mechanisms and physics of failure (POF), design strategies for improving yield, design for reliability (DFR), packaging and testing.

Reliability, Testing, and Characterization of MEMS/MOEMS.

Reliability, Testing, and Characterization of MEMS/MOEMS. PDF Author:
Publisher:
ISBN:
Category : Microelectromechanical systems
Languages : en
Pages : 332

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Book Description


Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV PDF Author: Danelle Mary Tanner
Publisher: SPIE-International Society for Optical Engineering
ISBN: 9780819456908
Category : Technology & Engineering
Languages : en
Pages : 272

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Book Description
Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

Component Reliability for Electronic Systems

Component Reliability for Electronic Systems PDF Author: Titu I. Băjenescu
Publisher: Artech House
ISBN: 1596934360
Category : Technology & Engineering
Languages : en
Pages : 706

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Book Description
The main reason for the premature breakdown of today's electronic products (computers, cars, tools, appliances, etc.) is the failure of the components used to build these products. Today professionals are looking for effective ways to minimize the degradation of electronic components to help ensure longer-lasting, more technically sound products and systems. This practical book offers engineers specific guidance on how to design more reliable components and build more reliable electronic systems. Professionals learn how to optimize a virtual component prototype, accurately monitor product reliability during the entire production process, and add the burn-in and selection procedures that are the most appropriate for the intended applications. Moreover, the book helps system designers ensure that all components are correctly applied, margins are adequate, wear-out failure modes are prevented during the expected duration of life, and system interfaces cannot lead to failure.

Fundamentals of BioMEMS and Medical Microdevices

Fundamentals of BioMEMS and Medical Microdevices PDF Author: Steven Saliterman
Publisher: SPIE Press
ISBN: 9780819459770
Category : Medical
Languages : en
Pages : 644

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Book Description
The world is on the threshold of a revolution that will change medicine and how patients are treated forever. Bringing together the creative talents of electrical, mechanical, optical and chemical engineers, materials specialists, clinical-laboratory scientists, and physicians, the science of biomedical microelectromechanical systems (bioMEMS) promises to deliver sensitive, selective, fast, low cost, less invasive, and more robust methods for diagnostics, individualized treatment, and novel drug delivery. This book is an introduction to this multidisciplinary technology and the current state of micromedical devices in use today. The first text of its kind dedicated to bioMEMS training. Fundamentals of BioMEMS and Medical Microdevices is Suitable for a single semester course for senior and graduate-level students, or as an introduction to others interested or already working in the field.

Sensors for Automotive Applications

Sensors for Automotive Applications PDF Author: Jiri Marek
Publisher: John Wiley & Sons
ISBN: 352760507X
Category : Technology & Engineering
Languages : en
Pages : 584

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Book Description
Taken as a whole, this series covers all major fields of application for commercial sensors, as well as their manufacturing techniques and major types. As such the series does not treat bulk sensors, but rather places strong emphasis on microsensors, microsystems and integrated electronic sensor packages. Each of the individual volumes is tailored to the needs and queries of readers from the relevant branch of industry. An international team of experts from the leading companies in this field gives a detailed picture of existing as well as future applications. They discuss in detail current technologies, design and construction concepts, market considerations and commercial developments. Topics covered include vehicle safety, fuel consumption, air conditioning, emergency control, traffic control systems, and electronic guidance using radar and video.

Handbook of Silicon Based MEMS Materials and Technologies

Handbook of Silicon Based MEMS Materials and Technologies PDF Author: Markku Tilli
Publisher: Elsevier
ISBN: 0815519885
Category : Technology & Engineering
Languages : en
Pages : 670

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Book Description
A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: - Silicon as MEMS material - Material properties and measurement techniques - Analytical methods used in materials characterization - Modeling in MEMS - Measuring MEMS - Micromachining technologies in MEMS - Encapsulation of MEMS components - Emerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R&D and academic communities. - Veikko Lindroos is Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland. - Markku Tilli is Senior Vice President of Research at Okmetic, Vantaa, Finland. - Ari Lehto is Professor of Silicon Technology at Helsinki University of Technology, Finland. - Teruaki Motooka is Professor at the Department of Materials Science and Engineering, Kyushu University, Japan. - Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques - Shows how to protect devices from the environment and decrease package size for dramatic reduction of packaging costs - Discusses properties, preparation, and growth of silicon crystals and wafers - Explains the many properties (mechanical, electrostatic, optical, etc), manufacturing, processing, measuring (incl. focused beam techniques), and multiscale modeling methods of MEMS structures

Optical Inspection of Microsystems

Optical Inspection of Microsystems PDF Author: Wolfgang Osten
Publisher: CRC Press
ISBN: 1420019163
Category : Science
Languages : en
Pages : 524

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Book Description
Where conventional testing and inspection techniques fail at the micro-scale, optical techniques provide a fast, robust, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems is the first comprehensive, up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moiré techniques, interference microscopy, laser Doppler vibrometry, holography, speckle metrology, and spectroscopy. They also examine modern approaches to data acquisition and processing. The book emphasizes the evaluation of various properties to increase reliability and promote a consistent approach to optical testing. Numerous practical examples and illustrations reinforce the concepts. Supplying advanced tools for microsystem manufacturing and characterization, Optical Inspection of Microsystems enables you to reach toward a higher level of quality and reliability in modern micro-scale applications.

An Introduction to Microelectromechanical Systems Engineering

An Introduction to Microelectromechanical Systems Engineering PDF Author: Nadim Maluf
Publisher: Artech House
ISBN: 9781580535915
Category : Technology & Engineering
Languages : en
Pages : 312

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Book Description
Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of MEMS materials, design, and manufacturing, and learn how it is being applied in industrial, optical, medical and electronic markets. The second edition features brand new sections on RF MEMS, photo MEMS, micromachining on materials other than silicon, reliability analysis, plus an expanded reference list. With an emphasis on commercialized products, this unique resource helps you determine whether your application can benefit from a MEMS solution, understand how other applications and companies have benefited from MEMS, and select and define a manufacturable MEMS process for your application. You discover how to use MEMS technology to enable new functionality, improve performance, and reduce size and cost. The book teaches you the capabilities and limitations of MEMS devices and processes, and helps you communicate the relative merits of MEMS to your company's management. From critical discussions on design operation and process fabrication of devices and systems, to a thorough explanation of MEMS packaging, this easy-to-understand book clearly explains the basics of MEMS engineering, making it an invaluable reference for your work in the field.

MEMS Materials and Processes Handbook

MEMS Materials and Processes Handbook PDF Author: Reza Ghodssi
Publisher: Springer Science & Business Media
ISBN: 0387473181
Category : Technology & Engineering
Languages : en
Pages : 1211

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Book Description
MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.