Rapid Thermal and Integrated Processing VII: PDF Download

Are you looking for read ebook online? Search for your book and save it on your Kindle device, PC, phones or tablets. Download Rapid Thermal and Integrated Processing VII: PDF full book. Access full book title Rapid Thermal and Integrated Processing VII: by Mehmet C. Öztürk. Download full books in PDF and EPUB format.

Rapid Thermal and Integrated Processing VII:

Rapid Thermal and Integrated Processing VII: PDF Author: Mehmet C. Öztürk
Publisher: Cambridge University Press
ISBN: 9781107413672
Category : Technology & Engineering
Languages : en
Pages : 422

Get Book

Book Description
The MRS proceedings series on rapid thermal processing (RTP) has become the predominant international forum for research in this exciting and fast-growing field. In particular, thisvolume in the series presents work in traditional RTP processes such as dielectric growth, annealing and silicides, as well as developments in novel modelling and integrated processes. Papers on equipment issues illustrate that problems such as temperature uniformity and measurement, traditionally viewed as limitations for RTP technology, are well on the way to being resolved. Manufacturing aspects of RTP and the successful integration of RTP into production semiconductor fabs are also addressed. Topics include: RTP equipment - modelling and new concepts; temperature measurement and control in RTP equipment; MOSFET gate stack engineering; MOSFET channel and source/drain engineering; silicides; and new applications of rapid thermal processing.