Process, Equipment, and Materials Control in Integrated Circuit Manufacturing V PDF Download
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Author: Anthony John Toprac
Publisher: Society of Photo Optical
ISBN: 9780819434791
Category : Technology & Engineering
Languages : en
Pages : 310
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Book Description
These papers on the manufacture of integrated circuitry focus on the areas of process, equipment and materials control.
Author: Anthony John Toprac
Publisher: Society of Photo Optical
ISBN: 9780819434791
Category : Technology & Engineering
Languages : en
Pages : 310
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Book Description
These papers on the manufacture of integrated circuitry focus on the areas of process, equipment and materials control.
Author: Anthony J. Toprac
Publisher: Society of Photo Optical
ISBN: 9780819429667
Category : Technology & Engineering
Languages : en
Pages : 322
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Book Description
A discussion of process, equipment, and materials control in integrated circuit manufacturing. It examines real-time and run-to-run modelling and control in integrated circuit manufacturing, the process of optimization in integrated circuit manufacturing, and more.
Author:
Publisher:
ISBN:
Category : Dielectric films
Languages : en
Pages : 332
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Book Description
Author: Anthony J. Toprac
Publisher:
ISBN:
Category : Dielectric films
Languages : en
Pages : 322
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Book Description
Author: Anant G. Sabnis
Publisher: Society of Photo Optical
ISBN: 9780819420039
Category : Technology & Engineering
Languages : en
Pages : 238
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Book Description
Author: Gary S. May
Publisher: John Wiley & Sons
ISBN: 0471790273
Category : Technology & Engineering
Languages : en
Pages : 428
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Book Description
A practical guide to semiconductor manufacturing from processcontrol to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Controlcovers all issues involved in manufacturing microelectronic devicesand circuits, including fabrication sequences, process control,experimental design, process modeling, yield modeling, and CIM/CAMsystems. Readers are introduced to both the theory and practice ofall basic manufacturing concepts. Following an overview of manufacturing and technology, the textexplores process monitoring methods, including those that focus onproduct wafers and those that focus on the equipment used toproduce wafers. Next, the text sets forth some fundamentals ofstatistics and yield modeling, which set the foundation for adetailed discussion of how statistical process control is used toanalyze quality and improve yields. The discussion of statistical experimental design offers readers apowerful approach for systematically varying controllable processconditions and determining their impact on output parameters thatmeasure quality. The authors introduce process modeling concepts,including several advanced process control topics such asrun-by-run, supervisory control, and process and equipmentdiagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and managementof overall manufacturing systems * Chapters include case studies, sample problems, and suggestedexercises * Instructor support includes electronic copies of the figures andan instructor's manual Graduate-level students and industrial practitioners will benefitfrom the detailed exami?nation of how electronic materials andsupplies are converted into finished integrated circuits andelectronic products in a high-volume manufacturingenvironment. An Instructor's Manual presenting detailed solutions to all theproblems in the book is available from the Wiley editorialdepartment. An Instructor Support FTP site is also available.
Author: Robert Zorich
Publisher: Academic Press
ISBN: 0323140556
Category : Technology & Engineering
Languages : en
Pages : 604
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Book Description
Here is a comprehensive practical guide to entire wafer fabrication process from A to Z. Written by a practicing process engineer with years of experience, this book provides a thorough introduction to the complex field of IC manufacturing, including wafer area layout and design, yield optimization, just-in-time management systems, statistical quality control, fabrication equipment and its setup, and cleanroom techniques. In addition, it contains a wealth of information on common process problems: How to detect them, how to confirm them, and how to solve them. Whether you are a new enginner or technician just entering the field, a fabrication manager looking for ways to improve quality and production, or someone who would just like to know more about IC manufacturing, this is the book you're looking for. - Provides a readable, practical overview of the entire wafer fabrication process for new engineers and those just entering this complex field - Enables engineers and managers to improve production, raise quality levels, and solve problems that commonly occur in the fabrication process - Presents the latest techniques and gives special attention to Japanese IC manufacturing techniques, showing how they obtain outstanding quality
Author:
Publisher:
ISBN:
Category : Integrated circuits
Languages : en
Pages : 176
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Book Description
Author: M. Meyyappan
Publisher: The Electrochemical Society
ISBN: 9781566771368
Category : Technology & Engineering
Languages : en
Pages : 366
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Book Description
Author: J. Leon Shohet
Publisher: CRC Press
ISBN: 1351204939
Category : Technology & Engineering
Languages : en
Pages : 3082
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Book Description
Technical plasmas have a wide range of industrial applications. The Encyclopedia of Plasma Technology covers all aspects of plasma technology from the fundamentals to a range of applications across a large number of industries and disciplines. Topics covered include nanotechnology, solar cell technology, biomedical and clinical applications, electronic materials, sustainability, and clean technologies. The book bridges materials science, industrial chemistry, physics, and engineering, making it a must have for researchers in industry and academia, as well as those working on application-oriented plasma technologies. Also Available Online This Taylor & Francis encyclopedia is also available through online subscription, offering a variety of extra benefits for researchers, students, and librarians, including: Citation tracking and alerts Active reference linking Saved searches and marked lists HTML and PDF format options Contact Taylor and Francis for more information or to inquire about subscription options and print/online combination packages. US: (Tel) 1.888.318.2367; (E-mail)
[email protected] International: (Tel) +44 (0) 20 7017 6062; (E-mail)
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