Optimization of Process Planning for Focused Ion Beam Machine in Nano-manufacturing

Optimization of Process Planning for Focused Ion Beam Machine in Nano-manufacturing PDF Author: Sushrut Shekhar Naik
Publisher:
ISBN:
Category : Focused ion beams
Languages : en
Pages : 172

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Book Description
"The current revolution witnessed by nanotechnology is facing several challenges such as manufacturing of nano sized devices economically on a large scale. Focused ion beam (FIB) technology is one of the widely used approaches for nano-manufacturing due to its versatile nature. It provides accurate machining and process repeatability and has a range of applications. Major challenges for the current FIB process are the tradeoffs between quality, the processing time, and the long planning time. This research provides a pathway to eliminate the current problems facing nanotechnology. Using MATLAB and the Helios 600 FIB/SEM instrument available, modeling and analyses are carried out to find the optimized process planning for arbitrary 3D nanofeatures. This research provides information on the current status of the FIB machining process, while at the same time discusses the challenges in FIB manufacturing. It provides a methodology that can be used to achieve an increase in planning and processing efficiency without sacrificing fabrication quality. This is done with the help of an iterative algorithm developed to achieve the optimized solution to a quadratic programming problem. Furthermore, the analyses carried out provides with more information on the choice of the scanning spacing, its corresponding effects on the quality of the product and computational efficiency. This is illustrated with the threshold step size selection and the beam overlap phenomenon. The thesis concludes with the set goal of achieving an increase in the planning and processing efficiency while maintaining the quality. It provides possible future course of actions in the same field, such as the beam flexibility criteria, using the additive process and the serpentine scan for manufacturing"--Abstract, leaf iii.

Optimization of Process Planning for Focused Ion Beam Machine in Nano-manufacturing

Optimization of Process Planning for Focused Ion Beam Machine in Nano-manufacturing PDF Author: Sushrut Shekhar Naik
Publisher:
ISBN:
Category : Focused ion beams
Languages : en
Pages : 172

Get Book Here

Book Description
"The current revolution witnessed by nanotechnology is facing several challenges such as manufacturing of nano sized devices economically on a large scale. Focused ion beam (FIB) technology is one of the widely used approaches for nano-manufacturing due to its versatile nature. It provides accurate machining and process repeatability and has a range of applications. Major challenges for the current FIB process are the tradeoffs between quality, the processing time, and the long planning time. This research provides a pathway to eliminate the current problems facing nanotechnology. Using MATLAB and the Helios 600 FIB/SEM instrument available, modeling and analyses are carried out to find the optimized process planning for arbitrary 3D nanofeatures. This research provides information on the current status of the FIB machining process, while at the same time discusses the challenges in FIB manufacturing. It provides a methodology that can be used to achieve an increase in planning and processing efficiency without sacrificing fabrication quality. This is done with the help of an iterative algorithm developed to achieve the optimized solution to a quadratic programming problem. Furthermore, the analyses carried out provides with more information on the choice of the scanning spacing, its corresponding effects on the quality of the product and computational efficiency. This is illustrated with the threshold step size selection and the beam overlap phenomenon. The thesis concludes with the set goal of achieving an increase in the planning and processing efficiency while maintaining the quality. It provides possible future course of actions in the same field, such as the beam flexibility criteria, using the additive process and the serpentine scan for manufacturing"--Abstract, leaf iii.

Focused Ion Beam Technology

Focused Ion Beam Technology PDF Author: Valentina Velkova
Publisher:
ISBN:
Category :
Languages : en
Pages :

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Book Description
Process chains are regarded as viable manufacturing platforms for the production of Microand Nano Technology (MNT) enabled products. In particular, by combining several manufacturing technologies, each utilised in its optimal process window, they could benefit from the unique advantages of high-profile research technologies such as the focused ion beam (FIB) machining. The present work concerns the development of process chains and the investigation of pilot cost-effective implementations of the FIB technology in manufacturing platforms forfabrication of serial replication masters.

Ion Beams in Nanoscience and Technology

Ion Beams in Nanoscience and Technology PDF Author: Ragnar Hellborg
Publisher: Springer Science & Business Media
ISBN: 364200623X
Category : Technology & Engineering
Languages : en
Pages : 450

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Book Description
Energetic ion beam irradiation is the basis of a wide plethora of powerful research- and fabrication-techniques for materials characterisation and processing on a nanometre scale. Materials with tailored optical, magnetic and electrical properties can be fabricated by synthesis of nanocrystals by ion implantation, focused ion beams can be used to machine away and deposit material on a scale of nanometres and the scattering of energetic ions is a unique and quantitative tool for process development in high speed electronics and 3-D nanostructures with extreme aspect radios for tissue engineering and nano-fluidics lab-on-a-chip may be machined using proton beams. This book will benefit practitioners, researchers and graduate students working in the field of ion beams and application and more generally everyone concerned with the broad field of nanoscience and technology.

Strategies for Application of Focused Ion Beams in Micro and Nano Manufacturing

Strategies for Application of Focused Ion Beams in Micro and Nano Manufacturing PDF Author: Nikola Vladov
Publisher:
ISBN:
Category : Focused ion beams
Languages : en
Pages : 0

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Book Description


Nanofabrication Using Focused Ion and Electron Beams

Nanofabrication Using Focused Ion and Electron Beams PDF Author: Ivo Utke
Publisher: OUP USA
ISBN: 0199734216
Category : Science
Languages : en
Pages : 831

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Book Description
This book comprehensively reviews the achievements and potentials of a minimally invasive, three-dimensional, and maskless surface structuring technique operating at nanometer scale by using the interaction of focused ion and electron beams (FIB/FEB) with surfaces and injected molecules.

FIB Nanostructures

FIB Nanostructures PDF Author: Zhiming M. Wang
Publisher: Springer Science & Business Media
ISBN: 331902874X
Category : Technology & Engineering
Languages : en
Pages : 536

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Book Description
FIB Nanostructures reviews a range of methods, including milling, etching, deposition, and implantation, applied to manipulate structures at the nanoscale. Focused Ion Beam (FIB) is an important tool for manipulating the structure of materials at the nanoscale, and substantially extends the range of possible applications of nanofabrication. FIB techniques are widely used in the semiconductor industry and in materials research for deposition and ablation, including the fabrication of nanostructures such as nanowires, nanotubes, nanoneedles, graphene sheets, quantum dots, etc. The main objective of this book is to create a platform for knowledge sharing and dissemination of the latest advances in novel areas of FIB for nanostructures and related materials and devices, and to provide a comprehensive introduction to the field and directions for further research. Chapters written by leading scientists throughout the world create a fundamental bridge between focused ion beam and nanotechnology that is intended to stimulate readers' interest in developing new types of nanostructures for application to semiconductor technology. These applications are increasingly important for the future development of materials science, energy technology, and electronic devices. The book can be recommended for physics, electrical engineering, and materials science departments as a reference on materials science and device design.

Focused Ion Beam Systems

Focused Ion Beam Systems PDF Author: Nan Yao
Publisher: Cambridge University Press
ISBN: 9780521158596
Category : Technology & Engineering
Languages : en
Pages : 0

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Book Description
The focused ion beam (FIB) system is an important tool for understanding and manipulating the structure of materials at the nanoscale. Combining this system with an electron beam creates a DualBeam - a single system that can function as an imaging, analytical and sample modification tool. Presenting the principles, capabilities, challenges and applications of the FIB technique, this edited volume, first published in 2007, comprehensively covers the ion beam technology including the DualBeam. The basic principles of ion beam and two-beam systems, their interaction with materials, etching and deposition are all covered, as well as in situ materials characterization, sample preparation, three-dimensional reconstruction and applications in biomaterials and nanotechnology. With nanostructured materials becoming increasingly important in micromechanical, electronic and magnetic devices, this self-contained review of the range of ion beam methods, their advantages, and when best to implement them is a valuable resource for researchers in materials science, electrical engineering and nanotechnology.

Scanning Microscopy for Nanotechnology

Scanning Microscopy for Nanotechnology PDF Author: Weilie Zhou
Publisher: Springer Science & Business Media
ISBN: 0387396209
Category : Technology & Engineering
Languages : en
Pages : 533

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Book Description
This book presents scanning electron microscopy (SEM) fundamentals and applications for nanotechnology. It includes integrated fabrication techniques using the SEM, such as e-beam and FIB, and it covers in-situ nanomanipulation of materials. The book is written by international experts from the top nano-research groups that specialize in nanomaterials characterization. The book will appeal to nanomaterials researchers, and to SEM development specialists.

Government Research Directory

Government Research Directory PDF Author: Grant Eldridge
Publisher: Gale Cengage
ISBN: 9780787632830
Category : Political Science
Languages : en
Pages : 920

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Book Description
Provides more than 6,800 research facilities and programs of the U.S. and Canadian federal governments. Listings include e-mail and Web site addresses, and a wealth of descriptive information.

Polymer Microscopy

Polymer Microscopy PDF Author: Linda Sawyer
Publisher: Springer Science & Business Media
ISBN: 0387726284
Category : Science
Languages : en
Pages : 568

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Book Description
This extensively updated and revised Third Edition is a comprehensive and practical guide to the study of the microstructure of polymers. It is the result of the authors' many years of academic and industrial experience. Introductory chapters deal with the basic concepts of both polymer morphology and processing and microscopy and imaging theory. The core of the book is more applied, with many examples of specimen preparation and image interpretation leading to materials characterization. Emerging techniques such as compositional mapping in which microscopy is combined with spectroscopy are considered. The book closes with a problem solving guide.