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Optical Physics for Nanolithography

Optical Physics for Nanolithography PDF Author: Anthony Yen
Publisher:
ISBN: 9781510617377
Category : Imaging systems
Languages : en
Pages : 352

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Book Description
This book provides an in-depth, self-contained introduction of partially coherent imaging theory for researchers and engineers working on optical lithography for semiconductor manufacturing, including those in the EDA industry. It is mathematically complete: the opening chapters discuss the essential principles, and all derivations are presented with their intermediate steps. For increased accessibility, simplified and consistent notations are used throughout the text. Full-color pages illustrate the connections between figures and equations.