X-Ray Metrology in Semiconductor Manufacturing PDF Download
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Author: D. Keith Bowen
Publisher: CRC Press
ISBN: 1420005650
Category : Technology & Engineering
Languages : en
Pages : 296
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Book Description
The scales involved in modern semiconductor manufacturing and microelectronics continue to plunge downward. Effective and accurate characterization of materials with thicknesses below a few nanometers can be achieved using x-rays. While many books are available on the theory behind x-ray metrology (XRM), X-Ray Metrology in Semiconductor Manufacturing is the first book to focus on the practical aspects of the technology and its application in device fabrication and solving new materials problems. Following a general overview of the field, the first section of the book is organized by application and outlines the techniques that are best suited to each. The next section delves into the techniques and theory behind the applications, such as specular x-ray reflectivity, diffraction imaging, and defect mapping. Finally, the third section provides technological details of each technique, answering questions commonly encountered in practice. The authors supply real examples from the semiconductor and magnetic recording industries as well as more than 150 clearly drawn figures to illustrate the discussion. They also summarize the principles and key information about each method with inset boxes found throughout the text. Written by world leaders in the field, X-Ray Metrology in Semiconductor Manufacturing provides real solutions with a focus on accuracy, repeatability, and throughput.
Author: D. Keith Bowen
Publisher: CRC Press
ISBN: 1420005650
Category : Technology & Engineering
Languages : en
Pages : 296
Get Book Here
Book Description
The scales involved in modern semiconductor manufacturing and microelectronics continue to plunge downward. Effective and accurate characterization of materials with thicknesses below a few nanometers can be achieved using x-rays. While many books are available on the theory behind x-ray metrology (XRM), X-Ray Metrology in Semiconductor Manufacturing is the first book to focus on the practical aspects of the technology and its application in device fabrication and solving new materials problems. Following a general overview of the field, the first section of the book is organized by application and outlines the techniques that are best suited to each. The next section delves into the techniques and theory behind the applications, such as specular x-ray reflectivity, diffraction imaging, and defect mapping. Finally, the third section provides technological details of each technique, answering questions commonly encountered in practice. The authors supply real examples from the semiconductor and magnetic recording industries as well as more than 150 clearly drawn figures to illustrate the discussion. They also summarize the principles and key information about each method with inset boxes found throughout the text. Written by world leaders in the field, X-Ray Metrology in Semiconductor Manufacturing provides real solutions with a focus on accuracy, repeatability, and throughput.
Author:
Publisher:
ISBN:
Category : Aeronautics
Languages : en
Pages : 974
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Book Description
Author: Matthew Pelliccione
Publisher: Springer Science & Business Media
ISBN: 0387751092
Category : Technology & Engineering
Languages : en
Pages : 206
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Book Description
The focus of this book is on modeling and simulations used in research on the morphological evolution during film growth. The authors emphasize the detailed mathematical formulation of the problem. The book will enable readers themselves to set up a computational program to investigate specific topics of interest in thin film deposition. It will benefit those working in any discipline that requires an understanding of thin film growth processes.
Author: R.S. Williams
Publisher: Springer Science & Business Media
ISBN: 9401595763
Category : Technology & Engineering
Languages : en
Pages : 367
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Book Description
energy production, environmental management, transportation, communication, computation, and education. As the twenty-first century unfolds, nanotechnology's impact on the health, wealth, and security of the world's people is expected to be at least as significant as the combined influences in this century of antibiotics, the integrated circuit, and human-made polymers. Dr. Neal Lane, Advisor to the President for Science and Technology and former National Science Foundation (NSF) director, stated at a Congressional hearing in April 1998, "If I were asked for an area of science and engineering that will most likely produce the breakthroughs of tomorrow, I would point to nanoscale science and engineering. " Recognizing this potential, the White House Office of Science and Technology Policy (OSTP) and the Office of Management and Budget (OMB) have issued a joint memorandum to Federal agency heads that identifies nanotechnology as a research priority area for Federal investment in fiscal year 2001. This report charts "Nanotechnology Research Directions," as developed by the Interagency W orking Group on Nano Science, Engineering, and Technology (IWGN) of the National Science and Technology Council (NSTC). The report incorporates the views of leading experts from government, academia, and the private sector. It reflects the consensus reached at an IWGN-sponsored workshop held on January 27-29, 1999, and detailed in contributions submitted thereafter by members of the V. S. science and engineering community. (See Appendix A for a list of contributors.
Author:
Publisher:
ISBN:
Category : Aeronautics
Languages : en
Pages : 1280
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Book Description
Author: Tim Salditt
Publisher: Springer Nature
ISBN: 3030344134
Category : Science
Languages : en
Pages : 634
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Book Description
This open access book, edited and authored by a team of world-leading researchers, provides a broad overview of advanced photonic methods for nanoscale visualization, as well as describing a range of fascinating in-depth studies. Introductory chapters cover the most relevant physics and basic methods that young researchers need to master in order to work effectively in the field of nanoscale photonic imaging, from physical first principles, to instrumentation, to mathematical foundations of imaging and data analysis. Subsequent chapters demonstrate how these cutting edge methods are applied to a variety of systems, including complex fluids and biomolecular systems, for visualizing their structure and dynamics, in space and on timescales extending over many orders of magnitude down to the femtosecond range. Progress in nanoscale photonic imaging in Göttingen has been the sum total of more than a decade of work by a wide range of scientists and mathematicians across disciplines, working together in a vibrant collaboration of a kind rarely matched. This volume presents the highlights of their research achievements and serves as a record of the unique and remarkable constellation of contributors, as well as looking ahead at the future prospects in this field. It will serve not only as a useful reference for experienced researchers but also as a valuable point of entry for newcomers.
Author: Robert Kelsall
Publisher: John Wiley & Sons
ISBN: 0470020865
Category : Technology & Engineering
Languages : en
Pages : 472
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Book Description
Nanotechnology is a vital new area of research and development addressing the control, modification and fabrication of materials, structures and devices with nanometre precision and the synthesis of such structures into systems of micro- and macroscopic dimensions. Future applications of nanoscale science and technology include motors smaller than the diameter of a human hair and single-celled organisms programmed to fabricate materials with nanometer precision. Miniaturisation has revolutionised the semiconductor industry by making possible inexpensive integrated electronic circuits comprised of devices and wires with sub-micrometer dimensions. These integrated circuits are now ubiquitous, controlling everything from cars to toasters. The next level of miniaturisation, beyond sub-micrometer dimensions into nanoscale dimensions (invisible to the unaided human eye) is a booming area of research and development. This is a very hot area of research with large amounts of venture capital and government funding being invested worldwide, as such Nanoscale Science and Technology has a broad appeal based upon an interdisciplinary approach, covering aspects of physics, chemistry, biology, materials science and electronic engineering. Kelsall et al present a coherent approach to nanoscale sciences, which will be invaluable to graduate level students and researchers and practising engineers and product designers.
Author: Kourosh Kalantar-zadeh
Publisher: Springer Science & Business Media
ISBN: 0387680233
Category : Technology & Engineering
Languages : en
Pages : 502
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Book Description
Nanotechnology provides tools for creating functional materials, devices, and systems by controlling materials at the atomic and molecular scales and making use of novel properties and phenomena. Nanotechnology-enabled sensors find applications in several fields such as health and safety, medicine, process control and diagnostics. This book provides the reader with information on how nanotechnology enabled sensors are currently being used and how they will be used in the future in such diverse fields as communications, building and facilities, medicine, safety, and security, including both homeland defense and military operations.
Author: Z.G. Pinsker
Publisher: Springer
ISBN: 9783642812095
Category : Science
Languages : en
Pages : 0
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Book Description
(Historical Survey) The discovery of X-ray diffraction in crystals by LAUE, FRIDRICH and KNIPPING in 1912 [1.1] served as the starting pOint for the development of scientific research along a number of important lines. We shall discuss just a few of them. The above discovery convincingly demonstrated the wave properties of X-rays. This, together with the previously established electromagnetic nature of radiation, confirmed the hypothesis that X-rays form the short-wave part of the electromagnetic spectrum. Further, this discovery was the first and decisive experimental proof of the periodic structure of crystals. In fact, theoretical crystallography had already arrived at this conclusion, mainly as an outcome of the theory of the space groups of symmetry elaborated by FEDOROV [1.2] and SCHOENFLIES [1.3]. From the optics of visible light we know that the radiation of a wave length of the same order as, and preferably less than, the period of a grat ing suffers diffraction on periodic objects of the type of optical grating. Thus, the discovery proved that the wavelength of an X-ray must be of the order of interatomic distances. It became clear why the visible light of wavelengths exceeding the crystal lattice periods by about 500 to 1000 times failed to reveal the periodic structure of crystals in diffraction experi ments.
Author: Oliver Diwald
Publisher: John Wiley & Sons
ISBN: 1119436745
Category : Technology & Engineering
Languages : de
Pages : 903
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Book Description
Metal Oxide Nanoparticles A complete nanoparticle resource for chemists and industry professionals Metal oxide nanoparticles are integral to a wide range of natural and technological processes—from mineral transformation to electronics. Additionally, the fields of engineering, electronics, energy technology, and electronics all utilize metal oxide nanoparticle powders. Metal Oxide Nanoparticles: Formation, Functional Properties, and Interfaces presents readers with the most relevant synthesis and formulation approaches for using metal oxide nanoparticles as functional materials. It covers common processing routes and the assessment of physical and chemical particle properties through comprehensive and complementary characterization methods. This book will serve as an introduction to nanoparticle formulation, their interface chemistry and functional properties at the nanoscale. It will also act as an in-depth resource, sharing detailed information on advanced approaches to the physical, chemical, surface, and interface characterization of metal oxide nanoparticle powders and dispersions. Addresses the application of metal oxide nanoparticles and its economic impact Examines particle synthesis, including the principles of selected bottom-up strategies Explores nanoparticle formulation—a selection of processing and application routes Discusses the significance of particle surfaces and interfaces on structure formation, stability and functional materials properties Covers metal oxide nanoparticle characterization at different length scales With this valuable resource, academic researchers, industrial chemists, and PhD students can all gain insight into the synthesis, properties, and applications of metal oxide nanoparticles.
