Mode Transition and Hysteresis in Inductively Coupled Plasma Sources

Mode Transition and Hysteresis in Inductively Coupled Plasma Sources PDF Author: Shu-Xia
Publisher:
ISBN:
Category : Electronic books
Languages : en
Pages : 0

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Book Description
In this chapter, the characteristics of low-temperature inductively coupled plasma sources, that is, non-equilibrium, weakly ionized and bounded plasma, are described. The phenomenon of mode transition and hysteresis is one of the main physics aspects that happens in this source. Via a hybrid model, the behaviors of plasma parameters, electron kinetics and neutral species during mode transition are presented. Still, the role of metastables and multistep ionization on triggering the hysteresis is investigated. Using a fluid model that couples the equivalent circuit module, the discontinuity of mode transition and hysteresis are observed by tuning the matching network impedance. The work indicates the mutual interaction between the plasma and the circuit excites hysteresis. Besides these findings, the other important aspects of this phenomenon are briefly discussed. To the author, the exploration on the precursors that trigger hysteresis is the most attractive topic. The investigations advance the improvement of analytical theory, numerical modeling and experimental diagnostics of low-temperature plasma physics.

Mode Transition and Hysteresis in Inductively Coupled Plasma Sources

Mode Transition and Hysteresis in Inductively Coupled Plasma Sources PDF Author: Shu-Xia
Publisher:
ISBN:
Category : Electronic books
Languages : en
Pages : 0

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Book Description
In this chapter, the characteristics of low-temperature inductively coupled plasma sources, that is, non-equilibrium, weakly ionized and bounded plasma, are described. The phenomenon of mode transition and hysteresis is one of the main physics aspects that happens in this source. Via a hybrid model, the behaviors of plasma parameters, electron kinetics and neutral species during mode transition are presented. Still, the role of metastables and multistep ionization on triggering the hysteresis is investigated. Using a fluid model that couples the equivalent circuit module, the discontinuity of mode transition and hysteresis are observed by tuning the matching network impedance. The work indicates the mutual interaction between the plasma and the circuit excites hysteresis. Besides these findings, the other important aspects of this phenomenon are briefly discussed. To the author, the exploration on the precursors that trigger hysteresis is the most attractive topic. The investigations advance the improvement of analytical theory, numerical modeling and experimental diagnostics of low-temperature plasma physics.

Plasma Science and Technology

Plasma Science and Technology PDF Author: Haikel Jelassi
Publisher: BoD – Books on Demand
ISBN: 1789852390
Category : Science
Languages : en
Pages : 330

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Book Description
Usually called the "fourth state of matter," plasmas make up more than 99% of known material. In usual terminology, this term generally refers to partially or totally ionized gas and covers a large number of topics with very different characteristics and behaviors. Over the last few decades, the physics and engineering of plasmas was experiencing a renewed interest, essentially born of a series of important applications such as thin-layer deposition, surface treatment, isotopic separation, integrated circuit etchings, medicine, etc. Plasma Science

Discontinuity of Mode Transition and Hysteresis in Hydrogen Inductively Coupled Plasma Via a Fluid Model*Project Supported by the National Natural Science Foundation of China (Grant Nos. 11175034, 11205025, 11305023, and 11075029).

Discontinuity of Mode Transition and Hysteresis in Hydrogen Inductively Coupled Plasma Via a Fluid Model*Project Supported by the National Natural Science Foundation of China (Grant Nos. 11175034, 11205025, 11305023, and 11075029). PDF Author:
Publisher:
ISBN:
Category :
Languages : en
Pages :

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Book Description
Abstract: A new type of two-dimensional self-consistent fluid model that couples an equivalent circuit module is used to investigate the mode transition characteristics and hysteresis in hydrogen inductively coupled plasmas at different pressures, by varying the series capacitance of the matching box. The variations of the electron density, temperature, and the circuit electrical properties are presented. As cycling the matching capacitance, at high pressure both the discontinuity and hysteresis appear for the plasma parameters and the transferred impedances of both the inductive and capacitive discharge components, while at low pressure only the discontinuity is seen. The simulations predict that the sheath plays a determinative role on the presence of discontinuity and hysteresis at high pressure, by influencing the inductive coupling efficiency of applied power. Moreover, the values of the plasma transferred impedances at different pressures are compared, and the larger plasma inductance at low pressure due to less collision frequency, as analyzed, is the reason why the hysteresis is not seen at low pressure, even with a wider sheath. Besides, the behaviors of the coil voltage and current parameters during the mode transitions are investigated. They both increase (decrease) at the E to H (H to E) mode transition, indicating an improved (worsened) inductive power coupling efficiency.

Plasma Science and Technology for Emerging Economies

Plasma Science and Technology for Emerging Economies PDF Author: Rajdeep Singh Rawat
Publisher: Springer
ISBN: 9811042179
Category : Science
Languages : en
Pages : 804

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Book Description
This book highlights plasma science and technology-related research and development work at institutes and universities networked through Asian African Association for Plasma Training (AAAPT) which was established in 1988. The AAAPT, with 52 member institutes in 24 countries, promotes the initiation and intensification of plasma research and development through cooperation and technology sharing. With 13 chapters on fusion-relevant, laboratory and industrial plasmas for wide range of applications and basic research and a chapter on AAAPT network, it demonstrates how, with collaborations, high-quality, industrially relevant academic and scientific research on fusion, industrial and laboratory plasmas and plasma diagnostics can be successfully pursued in small research labs. These plasma sciences and technologies include pioneering breakthroughs and applications in (i) fusion relevant research in the quest for long-term, clean energy source development using high-temperature, high- density plasmas and (ii) multibillion-dollar, low-temperature, non-equilibrium and thermal industrial plasmas used in processing, synthesis and electronics.

Issues in Nuclear and Plasma Science and Technology: 2011 Edition

Issues in Nuclear and Plasma Science and Technology: 2011 Edition PDF Author:
Publisher: ScholarlyEditions
ISBN: 1464966303
Category : Science
Languages : en
Pages : 736

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Book Description
Issues in Nuclear and Plasma Science and Technology: 2011 Edition is a ScholarlyEditions™ eBook that delivers timely, authoritative, and comprehensive information about Nuclear and Plasma Science and Technology. The editors have built Issues in Nuclear and Plasma Science and Technology: 2011 Edition on the vast information databases of ScholarlyNews.™ You can expect the information about Nuclear and Plasma Science and Technology in this eBook to be deeper than what you can access anywhere else, as well as consistently reliable, authoritative, informed, and relevant. The content of Issues in Nuclear and Plasma Science and Technology: 2011 Edition has been produced by the world’s leading scientists, engineers, analysts, research institutions, and companies. All of the content is from peer-reviewed sources, and all of it is written, assembled, and edited by the editors at ScholarlyEditions™ and available exclusively from us. You now have a source you can cite with authority, confidence, and credibility. More information is available at http://www.ScholarlyEditions.com/.

Plasma-Aided Nanofabrication

Plasma-Aided Nanofabrication PDF Author: Ken Ostrikov
Publisher: John Wiley & Sons
ISBN: 3527611568
Category : Technology & Engineering
Languages : en
Pages : 315

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Book Description
In this single work to cover the use of plasma as nanofabrication tool in sufficient depth internationally renowned authors with much experience in this important method of nanofabrication look at reactive plasma as a nanofabrication tool, plasma production and development of plasma sources, as well as such applications as carbon-based nanostructures, low-dimensional quantum confinement structures and hydroxyapatite bioceramics. Written principally for solid state physicists and chemists, materials scientists, and plasma physicists, the book concludes with the outlook for such applications.

A Study on Inductive Plasma Source and M

A Study on Inductive Plasma Source and M PDF Author: Taihyeop Lho
Publisher:
ISBN:
Category :
Languages : en
Pages : 172

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Book Description


Frontiers Of Physics 1998, Proceedings Of The Intl Mtg

Frontiers Of Physics 1998, Proceedings Of The Intl Mtg PDF Author: D A Bradley
Publisher: World Scientific
ISBN: 9814542725
Category : Science
Languages : en
Pages : 698

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Book Description
Contents:Progress of RFQ and Superconducting Accelerators in China (C E Chen et al.)QCD Phase Transition in the Laboratory and in the Early Universe (B Sinha)Frontiers in Ultrafast Laser Science (W Sibbett)Asymmetries of Sea Quark Distributions in Baryons (M Alberg et al.)A Variational Approach to Many-Particle Systems (C K Kim et al.)Synchrotron Radiation Activities at KEK (M Kihara)Results of the UNU/ICTP PFF Network (S Lee)New Generation Positron-Atom Scattering Theories (K Ratnavelu)Superconducting Pairing of Quarks in QCD (N V Hieu & L T Tuong)Photon-Gated Persistent Spectral Hole Burning (Y X Nie & L Z Zhao)Wind Driven Circulation of the South China Sea (A Camerlengo)Effect of Soil Type on Environmental Terrestrial Gamma Radiation Dose in Johor State, Malaysia (A T Ramli et al.)Research in Optical Fibres Devices at Telekom Malaysia Photonics Laboratory (H B Ahmad et al.)Simplifying Complexity (W A T Wan Abdullah)Gravitational Wave Detection in the Laboratory (Y T Chen et al.)and other papers Readership: Theoretical physicists.

Plasma and Fusion Science

Plasma and Fusion Science PDF Author: B. Raneesh
Publisher: CRC Press
ISBN: 1771884541
Category : Science
Languages : en
Pages : 469

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Book Description
In this new book, an interdisciplinary and international team of experts provides an exploration of the emerging plasma science that is poised to make the plasma technology a reality in the manufacturing sector. The research presented here will stimulate new ideas, methods, and applications in the field of plasma science and nanotechnology. Plasma technology applications are being developed that could impact the global market for power, electronics, mineral, and other fuel commodities. Currently, plasma science is described as a revolutionary discipline in terms of its possible impact on industrial applications. It offers potential solutions to many problems using emerging techniques. In this book the authors provide a broad overview of recent trends in field plasma science and nanotechnology. Divided into several parts, Plasma and Fusion Science: From Fundamental Research to Technological Applications explores some basic plasma applications and research, space and atmospheric plasma, nuclear fusion, and laser plasma and industrial applications of plasma. A wide variety of cutting-edge topics are covered, including: • basic plasma physics • computer modeling for plasma • exotic plasma (including dusty plasma) • industrial plasma applications • laser plasma • nuclear fusion technology • plasma diagnostics • plasma processing • pulsed power • space astrophysical plasma • plasma and nanotechnology Pointing to current and possible future developments in plasma science and technology, the diverse research presented here will be valuable for researchers, scientists, industry professionals, and others involved in the revolutionary field of plasma and fusion science.

Journal of Research of the National Institute of Standards and Technology

Journal of Research of the National Institute of Standards and Technology PDF Author:
Publisher:
ISBN:
Category : Measurement
Languages : en
Pages : 476

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Book Description