Microelectromechanical Systems-Materials and Devices III: Volume 1222 PDF Download
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Author: Jörg Bagdahn
Publisher: Cambridge University Press
ISBN: 9781605111957
Category : Technology & Engineering
Languages : en
Pages : 0
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Book Description
Developing advanced materials and processes can enable the creation of microsystems (MEMS) with enhanced functionality, and improved performance and reliability. These considerations are of growing importance as MEMS make the difficult transition from research laboratories to full-fledged commercialization. Equally, MEMS designers continue to introduce new device concepts and system architectures which motivate fundamental studies of materials behavior at micrometer- and nanometer length scales. Together, this collection of papers serves as a useful resource for the growing community of scientists and engineers working at the intersection of materials science and microdevices. Firstly it focuses on developing advanced materials specific to sensing and actuation. Section Two presents fundamental studies of the mechanical behavior of microscale and nanoscale structures. Section Three presents new materials and processes that can potentially influence the development of many new and different types of MEMS.
Author: Jörg Bagdahn
Publisher: Cambridge University Press
ISBN: 9781605111957
Category : Technology & Engineering
Languages : en
Pages : 0
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Book Description
Developing advanced materials and processes can enable the creation of microsystems (MEMS) with enhanced functionality, and improved performance and reliability. These considerations are of growing importance as MEMS make the difficult transition from research laboratories to full-fledged commercialization. Equally, MEMS designers continue to introduce new device concepts and system architectures which motivate fundamental studies of materials behavior at micrometer- and nanometer length scales. Together, this collection of papers serves as a useful resource for the growing community of scientists and engineers working at the intersection of materials science and microdevices. Firstly it focuses on developing advanced materials specific to sensing and actuation. Section Two presents fundamental studies of the mechanical behavior of microscale and nanoscale structures. Section Three presents new materials and processes that can potentially influence the development of many new and different types of MEMS.
Author: Harold Kahn
Publisher: Cambridge University Press
ISBN: 9781107412293
Category : Technology & Engineering
Languages : en
Pages : 366
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Book Description
Microelectromechanical systems (MEMS) is a growing field with numerous potential commercial applications, including pressure and inertial sensing, optical and electrical switching, power conversion, fluidic flow control, and chemical analysis. MEMS combine mechanical and electrical (and sometimes optical, chemical, or biological) function at small scales using many of the batch fabrication techniques developed for the micro-electronics industry. Materials have been developed or adapted for MEMS applications for use as structures, actuators, and sensors. Processing techniques also have been established for integrating these materials with existing MEMS. In addition, MEMS technology has proven ideal for allowing the mechanical and tribological characterization of materials at small scales. This book, first published in 2001, addresses these issues and a variety of materials are discussed, including Si, porous Si, SiC, SiGe, diamond, electroplated Ni and Cu, as well as piezoelectric, ferroelectric, and shape memory materials, and self-assembled organic monolayers. Fabrication processes include plasma and chemical etching, Si bonding, high-aspect-ratio lithography and micromolding. In addition, the stress, fracture strength, fatigue, and friction of MEMS materials and structures are also discussed.
Author: David A. LaVan
Publisher: Cambridge University Press
ISBN: 9781107408586
Category : Technology & Engineering
Languages : en
Pages : 342
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Book Description
This book is part of a popular series on the materials science of MEMS devices, first published in 1999. In the years since, many sophisticated devices have emerged and many aspects of MEMS materials behaviors have been characterized. However, there remain many basic questions about the relationship between process, properties and function for MEMS materials. Experimental methods have been developed, but there REMAINS a lack of standardization that would allow comparison between laboratories and commercial vendors or the creation of materials specifications that would enable greater commercialization of MEMS. The book addresses many of these issues including: RF-MEMS; optical MEMS; MEMS metrology, tribology, materials characterization and mechanical behavior; MEMS surfaces, MEMS reliability, packaging and life assessment; MEMS modeling and software tools for materials integration; biocompatibility of MEMS materials and devices; new materials and fabrication methodologies for MEMS; microfluidics and nanofluidics; in vivo drug/gene/protein delivery; novel actuators; MEMS cell-based systems; MEMS neural interfaces; MEMS sensors; and MEMS microengines and microfuel cells.
Author: Arturo A. Ayón
Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 344
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Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This book, first published in 2002, focuses on the materials science of MEMS structures and the films involved to create those structures.
Author: Maarten De Boer
Publisher: Mrs Proceedings
ISBN:
Category : Science
Languages : en
Pages : 344
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Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author:
Publisher:
ISBN:
Category : Microelectromechanical systems
Languages : en
Pages : 318
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Book Description
Author: National Research Council
Publisher: National Academies Press
ISBN: 0309059801
Category : Technology & Engineering
Languages : en
Pages : 76
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Book Description
Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. The silicon-based integrated circuits process is so highly refined it can produce millions of electrical elements on a single chip and define their critical dimensions to tolerances of 100-billionths of a meter. The MEMS revolution harnesses the integrated circuitry know-how to build working microsystems from micromechanical and microelectronic elements. MEMS is a multidisciplinary field involving challenges and opportunites for electrical, mechanical, chemical, and biomedical engineering as well as physics, biology, and chemistry. As MEMS begin to permeate more and more industrial procedures, society as a whole will be strongly affected because MEMS provide a new design technology that could rivalâ€"perhaps surpassâ€"the societal impact of integrated circuits.
Author: Nadim Maluf
Publisher: Artech House
ISBN: 9781580535915
Category : Technology & Engineering
Languages : en
Pages : 312
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Book Description
Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of MEMS materials, design, and manufacturing, and learn how it is being applied in industrial, optical, medical and electronic markets. The second edition features brand new sections on RF MEMS, photo MEMS, micromachining on materials other than silicon, reliability analysis, plus an expanded reference list. With an emphasis on commercialized products, this unique resource helps you determine whether your application can benefit from a MEMS solution, understand how other applications and companies have benefited from MEMS, and select and define a manufacturable MEMS process for your application. You discover how to use MEMS technology to enable new functionality, improve performance, and reduce size and cost. The book teaches you the capabilities and limitations of MEMS devices and processes, and helps you communicate the relative merits of MEMS to your company's management. From critical discussions on design operation and process fabrication of devices and systems, to a thorough explanation of MEMS packaging, this easy-to-understand book clearly explains the basics of MEMS engineering, making it an invaluable reference for your work in the field.
Author: Arthur H. Heuer
Publisher:
ISBN:
Category : Microelectromechanical systems
Languages : en
Pages : 274
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Book Description
Author: J A Kilner
Publisher: Elsevier
ISBN: 0857096370
Category : Technology & Engineering
Languages : en
Pages : 715
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Book Description
Global demand for low cost, efficient and sustainable energy production is ever increasing. Driven by recent discoveries and innovation in the science and technology of materials, applications based on functional materials are becoming increasingly important. Functional materials for sustainable energy applications provides an essential guide to the development and application of these materials in sustainable energy production. Part one reviews functional materials for solar power, including silicon-based, thin-film, and dye sensitized photovoltaic solar cells, thermophotovoltaic device modelling and photoelectrochemical cells. Part two focuses on functional materials for hydrogen production and storage. Functional materials for fuel cells are then explored in part three where developments in membranes, catalysts and membrane electrode assemblies for polymer electrolyte and direct methanol fuel cells are discussed, alongside electrolytes and ion conductors, novel cathodes, anodes, thin films and proton conductors for solid oxide fuel cells. Part four considers functional materials for demand reduction and energy storage, before the book concludes in part five with an investigation into computer simulation studies of functional materials. With its distinguished editors and international team of expert contributors, Functional materials for sustainable energy applications is an indispensable tool for anyone involved in the research, development, manufacture and application of materials for sustainable energy production, including materials engineers, scientists and academics in the rapidly developing, interdisciplinary field of sustainable energy. An essential guide to the development and application of functional materials in sustainable energy production Reviews functional materials for solar power Focuses on functional materials for hydrogen production and storage, fuel cells, demand reduction and energy storage
