Microcircuit Engineering 91 PDF Download

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Microcircuit Engineering 91

Microcircuit Engineering 91 PDF Author: A. Paoletti
Publisher: Elsevier Science & Technology
ISBN: 9780444895097
Category : Computers
Languages : en
Pages : 614

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Book Description
The 17th International Conference on Microlithography focused on the present dynamic international development of microfabrication using lithography and the related technologies. Bringing together leading international experts in the microcosm of modern semiconductor technology, the 7 invited and 109 contributed papers give an ongoing overview of the latest trends in the fabrication and application of microstructures.