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Author: Min-hang Bao
Publisher: Elsevier
ISBN: 0080524036
Category : Science
Languages : en
Pages : 393
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Book Description
Some years ago, silicon-based mechanical sensors, like pressure sensors, accelerometers and gyroscopes, started their successful advance. Every year, hundreds of millions of these devices are sold, mainly for medical and automotive applications. The airbag sensor on which research already started several decades ago at Stanford University can be found in every new car and has saved already numerous lives. Pressure sensors are also used in modern electronic blood pressure equipment. Many other mechanical sensors, mostly invisible to the public, perform useful functions in countless industrial and consumer products. The underlying physics and technology of silicon-based mechanical sensors is rather complex and is treated in numerous publications scattered throughout the literature. Therefore, a clear need existed for a handbook that thoroughly and systematically reviews the present basic knowledge on these devices. After a short introduction, Professor Bao discusses the main issues relevant to silicon-based mechanical sensors. First a thorough treatment of stress and strain in diaphragms and beams is presented. Next, vibration of mechanical structures is illuminated, followed by a chapter on air damping. These basic chapters are then succeeded by chapters in which capacitive and piezoresistive sensing techniques are amply discussed. The book concludes with chapters on commercially available pressure sensors, accelerometers and resonant sensors in which the above principles are applied. Everybody, involved in designing silicon-based mechanical sensors, will find a wealth of useful information in the book, assisting the designer in obtaining highly optimized devices.
Author: Min-hang Bao
Publisher: Elsevier
ISBN: 0080524036
Category : Science
Languages : en
Pages : 393
Get Book Here
Book Description
Some years ago, silicon-based mechanical sensors, like pressure sensors, accelerometers and gyroscopes, started their successful advance. Every year, hundreds of millions of these devices are sold, mainly for medical and automotive applications. The airbag sensor on which research already started several decades ago at Stanford University can be found in every new car and has saved already numerous lives. Pressure sensors are also used in modern electronic blood pressure equipment. Many other mechanical sensors, mostly invisible to the public, perform useful functions in countless industrial and consumer products. The underlying physics and technology of silicon-based mechanical sensors is rather complex and is treated in numerous publications scattered throughout the literature. Therefore, a clear need existed for a handbook that thoroughly and systematically reviews the present basic knowledge on these devices. After a short introduction, Professor Bao discusses the main issues relevant to silicon-based mechanical sensors. First a thorough treatment of stress and strain in diaphragms and beams is presented. Next, vibration of mechanical structures is illuminated, followed by a chapter on air damping. These basic chapters are then succeeded by chapters in which capacitive and piezoresistive sensing techniques are amply discussed. The book concludes with chapters on commercially available pressure sensors, accelerometers and resonant sensors in which the above principles are applied. Everybody, involved in designing silicon-based mechanical sensors, will find a wealth of useful information in the book, assisting the designer in obtaining highly optimized devices.
Author: Minhang Bao
Publisher: Elsevier
ISBN: 008045562X
Category : Technology & Engineering
Languages : en
Pages : 327
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Book Description
Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field.* Presents the analysis and design principles of MEMS devices more systematically than ever before.* Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures* A problem section is included at the end of each chapter with answers provided at the end of the book.
Author: T. Fukuda
Publisher: Elsevier
ISBN: 0080536549
Category : Technology & Engineering
Languages : en
Pages : 278
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Book Description
In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems.
Author: Dan Mihai Stefanescu
Publisher: Springer Science & Business Media
ISBN: 3642182968
Category : Science
Languages : en
Pages : 634
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Book Description
Part I introduces the basic "Principles and Methods of Force Measurement" according to a classification into a dozen of force transducers types: resistive, inductive, capacitive, piezoelectric, electromagnetic, electrodynamic, magnetoelastic, galvanomagnetic (Hall-effect), vibrating wires, (micro)resonators, acoustic and gyroscopic. Two special chapters refer to force balance techniques and to combined methods in force measurement. Part II discusses the "(Strain Gauge) Force Transducers Components", evolving from the classical force transducer to the digital / intelligent one, with the incorporation of three subsystems (sensors, electromechanics and informatics). The elastic element (EE) is the "heart" of the force transducer and basically determines its performance. A 12-type elastic element classification is proposed (stretched / compressed column or tube, bending beam, bending and/or torsion shaft, middle bent bar with fixed ends, shear beam, bending ring, yoke or frame, diaphragm, axial-stressed torus, axisymmetrical and voluminous EE), with emphasis on the optimum location of the strain gauges. The main properties of the associated Wheatstone bridge, best suited for the parametrical transducers, are examined, together with the appropriate electronic circuits for SGFTs. The handbook fills a gap in the field of Force Measurement, both experts and newcomers, no matter of their particular interest, finding a lot of useful and valuable subjects in the area of Force Transducers; in fact, it is the first specialized monograph in this inter- and multidisciplinary field.
Author: Vikas Choudhary
Publisher: CRC Press
ISBN: 1466515821
Category : Medical
Languages : en
Pages : 465
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Book Description
The microelectromechanical systems (MEMS) industry has experienced explosive growth over the last decade. Applications range from accelerometers and gyroscopes used in automotive safety to high-precision on-chip integrated oscillators for reference generation and mobile phones. MEMS: Fundamental Technology and Applications brings together groundbreaking research in MEMS technology and explores an eclectic set of novel applications enabled by the technology. The book features contributions by top experts from industry and academia from around the world. The contributors explain the theoretical background and supply practical insights on applying the technology. From the historical evolution of nano micro systems to recent trends, they delve into topics including: Thin-film integrated passives as an alternative to discrete passives The possibility of piezoelectric MEMS Solutions for MEMS gyroscopes Advanced interconnect technologies Ambient energy harvesting Bulk acoustic wave resonators Ultrasonic receiver arrays using MEMS sensors Optical MEMS-based spectrometers The integration of MEMS resonators with conventional circuitry A wearable inertial and magnetic MEMS sensor assembly to estimate rigid body movement patterns Wireless microactuators to enable implantable MEMS devices for drug delivery MEMS technologies for tactile sensing and actuation in robotics MEMS-based micro hot-plate devices Inertial measurement units with integrated wireless circuitry to enable convenient, continuous monitoring Sensors using passive acousto-electric devices in wired and wireless systems Throughout, the contributors identify challenges and pose questions that need to be resolved, paving the way for new applications. Offering a wide view of the MEMS landscape, this is an invaluable resource for anyone working to develop and commercialize MEMS applications.
Author: Regina Luttge
Publisher: William Andrew
ISBN: 0323389287
Category : Technology & Engineering
Languages : en
Pages : 280
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Book Description
Nano- and Microfabrication for Industrial and Biomedical Applications, Second Edition, focuses on the industrial perspective on micro- and nanofabrication methods, including large-scale manufacturing, the transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. The book gives a history of miniaturization and micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices. In this second edition, a new focus area is nanoengineering as an important driver for the rise of novel applications by integrating bio-nanofabrication into microsystems. In addition, new material covers lithographic mould fabrication for soft-lithography, nanolithography techniques, corner lithography, advances in nanosensing, and the developing field of advanced functional materials. Luttge also explores the view that micro- and nanofabrication will be the key driver for a "tech-revolution" in biology and medical research that includes a new case study that covers the developing organ-on-chip concept. - Presents an interdisciplinary approach that makes micro/nanofabrication accessible equally to engineers and those with a life science background, both in academic settings and commercial R&D - Provides readers with guidelines for assessing the commercial potential of any new technology based on micro/nanofabrication, thus reducing the investment risk - Updated edition presents nanoengineering as an important driver for the rise of novel applications by integrating bio-nanofabrication into microsystems
Author: Mohamed Gad-el-Hak
Publisher: CRC Press
ISBN: 9781420050905
Category : Technology & Engineering
Languages : en
Pages : 1386
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Book Description
The revolution is well underway. Our understanding and utilization of microelectromechanical systems (MEMS) are growing at an explosive rate with a worldwide market approaching billions of dollars. In time, microdevices will fill the niches of our lives as pervasively as electronics do right now. But if these miniature devices are to fulfill their mammoth potential, today's engineers need a thorough grounding in the underlying physics, modeling techniques, fabrication methods, and materials of MEMS. The MEMS Handbook delivers all of this and more. Its team of authors-unsurpassed in their experience and standing in the scientific community- explore various aspects of MEMS: their design, fabrication, and applications as well as the physical modeling of their operations. Designed for maximum readability without compromising rigor, it provides a current and essential overview of this fledgling discipline.
Author: Sergey Y. Yurish
Publisher: Springer Science & Business Media
ISBN: 1402029292
Category : Technology & Engineering
Languages : en
Pages : 489
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Book Description
The book Smart Sensors and MEMS provides an unique collection of contributions on latest achievements in sensors area and technologies that have made by eleven internationally recognized leading experts from Czech Republic, Germany, Italy, Israel, Portugal, Switzerland, Ukraine and USA during the NATO Advanced Study Institute (ASI) in Povoa de Varzim, Portugal, from 8 to 19 September 2003. The aims of this volume are to disseminate wider and in-depth theoretical and practical knowledge about smart sensors and its applications, to create a clear consciousness about the effectiveness of MEMS technologies, advanced signal processing and conversion methods, to stimulate the theoretical and applied research in these areas, and promote the practical using of these techniques in the industry. With that in mind, a broad range of physical, chemical and biosensors design principles, technologies and applications were included in the book. It is a first attempt to describe in the same book different physical, chemical, biological sensors and MEMS technologies suitable for smart sensors creation. The book presents the state-of-the-art and gives an excellent opportunity to provide a systematic, in-depth treatment of the new and rapidly developing field of smart sensors and MEMS. The volume is an excellent guide for practicing engineers, researchers and students interested in this crucial aspect of actual smart sensor design.
Author: Shivendu Ranjan
Publisher: Springer
ISBN: 3319531123
Category : Technology & Engineering
Languages : en
Pages : 314
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Book Description
In this book we present ten chapters describing the synthesis and application of nanomaterials for health, food, agriculture and bioremediation. Nanomaterials, with unique properties are now being used to improve food and agricultural production. Research on nanomaterials is indeed revealing new applications that were once thought to be imaginary. Specifically, applications lead to higher crop productivity with nanofertilisers, better packaging, longer food shelf life and better sensing of aromas and contaminants. these applications are needed in particular in poor countries where food is scarce and the water quality bad. Nanotechnology also addresses the age old issue of water polluted by industrial, urban and agricultural pollutants. For instance, research produces nanomaterials that clean water more efficiently than classical methods, thus yielding water for drinking and irrigation. However, some nanomaterials have been found to be toxic. Therefore, nanomaterials should be engineered to be safe for the environment.
Author: K. J. Vinoy
Publisher: Springer
ISBN: 8132219139
Category : Technology & Engineering
Languages : en
Pages : 509
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Book Description
The book presents cutting-edge research in the emerging fields of micro, nano and smart devices and systems from experts working in these fields over the last decade. Most of the contributors have built devices or systems or developed processes or algorithms in these areas. The book is a unique collection of chapters from different areas with a common theme and is immensely useful to academic researchers and practitioners in the industry who work in this field.
