Micro- and Nanofabrication for Beginners PDF Download
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Author: Eiichi Kondoh
Publisher: CRC Press
ISBN: 100024640X
Category : Science
Languages : en
Pages : 239
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Book Description
In this book, the fundamentals of micro- and nanofabrication are described on the basis of the concept of “using gases as a fabrication tool.” Unlike other books available on the subject, this volume assumes only entry-level mathematics, physics, and chemistry of undergraduates or high-school students in science and engineering courses. Necessary theories are plainly explained to help the reader learn about this new attractive field and enable further reading of specialized books. The book is an attractive guide for students, young engineers, and anyone getting involved in micro- and nanofabrication from various fields including physics, electronics, chemistry, and materials sciences.
Author: Eiichi Kondoh
Publisher: CRC Press
ISBN: 100024640X
Category : Science
Languages : en
Pages : 239
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Book Description
In this book, the fundamentals of micro- and nanofabrication are described on the basis of the concept of “using gases as a fabrication tool.” Unlike other books available on the subject, this volume assumes only entry-level mathematics, physics, and chemistry of undergraduates or high-school students in science and engineering courses. Necessary theories are plainly explained to help the reader learn about this new attractive field and enable further reading of specialized books. The book is an attractive guide for students, young engineers, and anyone getting involved in micro- and nanofabrication from various fields including physics, electronics, chemistry, and materials sciences.
Author: Hans H. Gatzen
Publisher: Springer
ISBN: 3662443953
Category : Technology & Engineering
Languages : en
Pages : 537
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Book Description
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
Author: Jiwang Yan
Publisher: Springer
ISBN: 9789811300974
Category : Technology & Engineering
Languages : en
Pages : 0
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Book Description
This volume focuses on the state-of-the-art micro/nanofabrication technologies for creating miniature structures with high precision. These multidisciplinary technologies include mechanical, electrical, optical, physical, and chemical methods, as well as hybrid processes, covering subtractive and additive material manufacturing, as well as net-shape manufacturing. The materials the volume deals with include metals, alloys, semiconductors, polymers, crystals, glass, ceramics, composites, and nanomaterials. The volume is composed of 30 chapters, which are grouped into five parts. Engaging with the latest research in the field, these chapters provide important perspectives on key topics, from process developments at the shop level to scientific investigations at the academic level, offering both experimental work and theoretical analysis. Moreover, the content of this volume is highly interdisciplinary in nature, with insights from not only manufacturing technology but also mechanical/material science, optics, physics, chemistry, and more.
Author: Sami Franssila
Publisher: John Wiley & Sons
ISBN: 0470020563
Category : Technology & Engineering
Languages : en
Pages : 424
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Book Description
Microfabrication is the key technology behind integrated circuits,microsensors, photonic crystals, ink jet printers, solar cells andflat panel displays. Microsystems can be complex, but the basicmicrostructures and processes of microfabrication are fairlysimple. Introduction to Microfabrication shows how the commonmicrofabrication concepts can be applied over and over again tocreate devices with a wide variety of structures andfunctions. Featuring: * A comprehensive presentation of basic fabrication processes * An emphasis on materials and microstructures, rather than devicephysics * In-depth discussion on process integration showing how processes,materials and devices interact * A wealth of examples of both conceptual and real devices Introduction to Microfabrication includes 250 homework problems forstudents to familiarise themselves with micro-scale materials,dimensions, measurements, costs and scaling trends. Both researchand manufacturing topics are covered, with an emphasis on silicon,which is the workhorse of microfabrication. This book will serve as an excellent first text for electricalengineers, chemists, physicists and materials scientists who wishto learn about microstructures and microfabrication techniques,whether in MEMS, microelectronics or emerging applications.
Author: Zheng Cui
Publisher: Springer
ISBN: 9783642066979
Category : Technology & Engineering
Languages : en
Pages : 0
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Book Description
The book is a collection of the author’s years of experience and research findings, as well as the latest development, in micro-nanofabrication technologies. It gives a detailed introduction on the basics of micro-nanofabrication, including optical lithography, electron beam lithography, focused ion beam technique, X-ray lithography, various etching and replication techniques. For each of the fabrication technology it introduces, the emphasis is on clear explanation of the basic principle, the essential steps in the processes, various process conditions and typical process parameters. The advantages and disadvantages of each technique are also analysed. The applications of micro-nanofabrication technologies focus on manufacturing of very large scale integrated circuits (VLSI), nanoelectronics, optoelectronics, high density magnetic storage, micro-electro-mechanical system or MEMS, biochip or lab-on-chip and nanotechnology. Each of the applications is accompanied by practical examples to demonstrate how particular fabrication techniques are applied. There is an extensive list of references following each chapter for readers to explore further. The book is not only a good supplementary reading material for university undergraduates or postgraduates who are novices in this field, but also a good reference book for experienced engineering professionals who wish to know other fabrication techniques outside their own field.
Author: Zheng Cui
Publisher: Springer Science & Business Media
ISBN: 0387755772
Category : Technology & Engineering
Languages : en
Pages : 350
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Book Description
This book provides the reader with the most up-to-date information and development in the Nanofabrication area. It presents a one-stop description at the introduction level on most of the technologies that have been developed which are capable of making structures below 100nm. Principles of each technology are introduced and illustrated with minimum mathematics involved. The book serves as a practical guide and first hand reference for those working in nanostructure fabrication.
Author: Shrikrishna Nandkishor Joshi
Publisher: Springer Nature
ISBN: 9811636451
Category : Technology & Engineering
Languages : en
Pages : 404
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Book Description
This volume focuses on the fundamentals and advancements in micro and nanomanufacturing technologies applied in the biomedical and biochemical domain. The contents of this volume provide comprehensive coverage of the physical principles of advanced manufacturing technologies and the know-how of their applications in the fabrication of biomedical devices and systems. The book begins by documenting the journey of miniaturization and micro-and nano-fabrication. It then delves into the fundamentals of various advanced technologies such as micro-wire moulding, 3D printing, lithography, imprinting, direct laser machining, and laser-induced plasma-assisted machining. It also covers laser-based technologies which are a promising option due to their flexibility, ease in control and application, high precision, and availability. These technologies can be employed to process several materials such as glass, polymers: polycarbonate, polydimethylsiloxane, polymethylmethacrylate, and metals such as stainless steel, which are commonly used in the fabrication of biomedical devices, such as microfluidic technology, optical and fiber-optic sensors, and electro-chemical bio-sensors. It also discusses advancements in various MEMS/NEMS based technologies and their applications in energy conversion and storage devices. The chapters are written by experts from the fields of micro- and nano-manufacturing, materials engineering, nano-biotechnology, and end-users such as clinicians, engineers, academicians of interdisciplinary background. This book will be a useful guide for academia and industry alike.
Author: Maria Stepanova
Publisher: Springer Science & Business Media
ISBN: 3709104246
Category : Technology & Engineering
Languages : en
Pages : 344
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Book Description
Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.
Author: Mark J. Jackson
Publisher: Springer Science & Business Media
ISBN: 038726132X
Category : Technology & Engineering
Languages : en
Pages : 708
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Book Description
This, the corrected second printing of Jackson’s authoritative volume on the subject, provides a comprehensive treatment of established micro and nanofabrication techniques. It addresses the needs of practicing manufacturing engineers by applying established and research laboratory manufacturing techniques to a wide variety of materials. Nanofabrication and nanotechnology present a great challenge to engineers and researchers as they manipulate atoms and molecules to produce single artifacts and submicron components and systems. The book provides up-to-date information on a number of subjects of interest to engineers who are seeking more knowledge of how nano and micro devices are designed and fabricated. They will learn about manufacturing and fabrication techniques at the micro and nanoscales; using bulk and surface micromachining techniques, and LiGA, and deep x-ray lithography to manufacture semiconductors. Also covered are subjects including producing master molds with micromachining, the deposition of thin films, pulsed water drop machining, and nanomachining.
Author: Jaime Castillo-León
Publisher: CRC Press
ISBN: 1439827435
Category : Medical
Languages : en
Pages : 258
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Book Description
Several micro- and nanomanipulation techniques have emerged in recent decades thanks to advances in micro- and nanofabrication. For instance, the atomic force microscope (AFM) uses a nano-sized tip to image, push, pull, cut, and indent biological material in air, liquid, or vacuum. Using micro- and nanofabrication techniques, scientists can make manipulation tools, such as microgrippers and nanotweezers, on the same length scale as the biological samples. Micro and Nano Techniques for the Handling of Biological Samples reviews the different techniques available to manipulate and integrate biological materials in a controlled manner, either by sliding them along a surface (2-D manipulation), or by gripping and moving them to a new position (3-D manipulation). The advantages and drawbacks are mentioned together with examples that reflect the state-of-the-art in manipulation techniques for biological samples. Thanks to the advances in micro- and nanomanipulation techniques, the integration of biomaterials with physical transducers has been possible, giving rise to new and highly sensitive biosensing devices. Although great progress has been made, challenges are still present. To understand the complex interactions between and inside biological samples, scientists will always be working on improving technologies to manipulate, transport, sort, and integrate samples in different environments. Balanced between simplicity for the beginner and hardcore theory for the more advanced readers, this book is the ideal launching point for sharpening the scientific tools required to address these challenges.
