Author: Allyson L. Hartzell
Publisher: Springer Science & Business Media
ISBN: 144196018X
Category : Technology & Engineering
Languages : en
Pages : 300
Book Description
The successful launch of viable MEMs product hinges on MEMS reliability, the reliability and qualification for MEMs based products is not widely understood. Companies that have a deep understanding of MEMs reliability view the information as a competitive advantage and are reluctant to share it. MEMs Reliability, focuses on the reliability and manufacturability of MEMS at a fundamental level by addressing process development and characterization, material property characterization, failure mechanisms and physics of failure (POF), design strategies for improving yield, design for reliability (DFR), packaging and testing.
MEMS Reliability
Author: Allyson L. Hartzell
Publisher: Springer Science & Business Media
ISBN: 144196018X
Category : Technology & Engineering
Languages : en
Pages : 300
Book Description
The successful launch of viable MEMs product hinges on MEMS reliability, the reliability and qualification for MEMs based products is not widely understood. Companies that have a deep understanding of MEMs reliability view the information as a competitive advantage and are reluctant to share it. MEMs Reliability, focuses on the reliability and manufacturability of MEMS at a fundamental level by addressing process development and characterization, material property characterization, failure mechanisms and physics of failure (POF), design strategies for improving yield, design for reliability (DFR), packaging and testing.
Publisher: Springer Science & Business Media
ISBN: 144196018X
Category : Technology & Engineering
Languages : en
Pages : 300
Book Description
The successful launch of viable MEMs product hinges on MEMS reliability, the reliability and qualification for MEMs based products is not widely understood. Companies that have a deep understanding of MEMs reliability view the information as a competitive advantage and are reluctant to share it. MEMs Reliability, focuses on the reliability and manufacturability of MEMS at a fundamental level by addressing process development and characterization, material property characterization, failure mechanisms and physics of failure (POF), design strategies for improving yield, design for reliability (DFR), packaging and testing.
Reliability Modeling of Microelectromechanical Systems Using Neural Networks
Author: J. Sebastian Perera
Publisher:
ISBN:
Category : Microelectromechanical systems
Languages : en
Pages : 82
Book Description
Publisher:
ISBN:
Category : Microelectromechanical systems
Languages : en
Pages : 82
Book Description
Surface Engineering for MEMS Reliability
Author: William Robert Ashurst
Publisher:
ISBN:
Category :
Languages : en
Pages : 462
Book Description
Publisher:
ISBN:
Category :
Languages : en
Pages : 462
Book Description
Reliability of MEMS
Author: Osamu Tabata
Publisher: John Wiley & Sons
ISBN: 9783527314942
Category : Technology & Engineering
Languages : en
Pages : 328
Book Description
This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies -- nanoindenters, bulge methods, bending tests, tensile tests, and others. Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS.
Publisher: John Wiley & Sons
ISBN: 9783527314942
Category : Technology & Engineering
Languages : en
Pages : 328
Book Description
This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies -- nanoindenters, bulge methods, bending tests, tensile tests, and others. Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS.
MEMS Reliability for Critical Applications
Author: Russell A. Lawton
Publisher: SPIE-International Society for Optical Engineering
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 162
Book Description
Publisher: SPIE-International Society for Optical Engineering
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 162
Book Description
Materials and Failures in MEMS and NEMS
Author: Atul Tiwari
Publisher: John Wiley & Sons
ISBN: 1119083869
Category : Technology & Engineering
Languages : en
Pages : 435
Book Description
The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the hurdles in fabrication or manufacturing process. Although, an enormous amount of work being accomplished in the area, most of the information is treated as confidential or privileged. It is extremely hard to find the meaningful information for the new or related developments. This book is collection of chapters written by experts in MEMS and NEMS technology. Chapters are contributed on the development of new MEMS and NEMS materials as well as on the properties of these devices. Important properties such as residual stresses and buckling behavior in the devices are discussed as separate chapters. Various models have been included in the chapters that studies the mode and mechanism of failure of the MEMS and NEMS. This book is meant for the graduate students, research scholars and engineers who are involved in the research and developments of advanced MEMS and NEMS for a wide variety of applications. Critical information has been included for the readers that will help them in gaining precise control over dimensional stability, quality, reliability, productivity and maintenance in MEMS and NEMS. No such book is available in the market that addresses the developments and failures in these advanced devices.
Publisher: John Wiley & Sons
ISBN: 1119083869
Category : Technology & Engineering
Languages : en
Pages : 435
Book Description
The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the hurdles in fabrication or manufacturing process. Although, an enormous amount of work being accomplished in the area, most of the information is treated as confidential or privileged. It is extremely hard to find the meaningful information for the new or related developments. This book is collection of chapters written by experts in MEMS and NEMS technology. Chapters are contributed on the development of new MEMS and NEMS materials as well as on the properties of these devices. Important properties such as residual stresses and buckling behavior in the devices are discussed as separate chapters. Various models have been included in the chapters that studies the mode and mechanism of failure of the MEMS and NEMS. This book is meant for the graduate students, research scholars and engineers who are involved in the research and developments of advanced MEMS and NEMS for a wide variety of applications. Critical information has been included for the readers that will help them in gaining precise control over dimensional stability, quality, reliability, productivity and maintenance in MEMS and NEMS. No such book is available in the market that addresses the developments and failures in these advanced devices.
Reliability, Testing, and Characterization of MEMS/MOEMS.
Author:
Publisher:
ISBN:
Category : Microelectromechanical systems
Languages : en
Pages : 332
Book Description
Publisher:
ISBN:
Category : Microelectromechanical systems
Languages : en
Pages : 332
Book Description
Microelectronics Failure Analysis
Author: EDFAS Desk Reference Committee
Publisher: ASM International
ISBN: 1615037268
Category : Technology & Engineering
Languages : en
Pages : 673
Book Description
Includes bibliographical references and index.
Publisher: ASM International
ISBN: 1615037268
Category : Technology & Engineering
Languages : en
Pages : 673
Book Description
Includes bibliographical references and index.
Handbook of Mems for Wireless and Mobile Applications
Author: Deepak Uttamchandani
Publisher: Elsevier
ISBN: 0857098616
Category : Technology & Engineering
Languages : en
Pages : 640
Book Description
The increasing demand for mobile and wireless sensing necessitates the use of highly integrated technology featuring small size, low weight, high performance and low cost: micro-electro-mechanical systems (MEMS) can meet this need. The Handbook of MEMS for wireless and mobile applications provides a comprehensive overview of radio frequency (RF) MEMS technologies and explores the use of these technologies over a wide range of application areas.Part one provides an introduction to the use of RF MEMS as an enabling technology for wireless applications. Chapters review RF MEMS technology and applications as a whole before moving on to describe specific technologies for wireless applications including passive components, phase shifters and antennas. Packaging and reliability of RF MEMS is also discussed. Chapters in part two focus on wireless techniques and applications of wireless MEMS including biomedical applications, such as implantable MEMS, intraocular pressure sensors and wireless drug delivery. Further chapters highlight the use of RF MEMS for automotive radar, the monitoring of telecommunications reliability using wireless MEMS and the use of optical MEMS displays in portable electronics.With its distinguished editor and international team of expert authors, the Handbook of MEMS for wireless and mobile applications is a technical resource for MEMS manufacturers, the electronics industry, and scientists, engineers and academics working on MEMS and wireless systems. - Reviews the use of radio frequency (RF) MEMS as an enabling technology for wireless applications - Discusses wireless techniques and applications of wireless MEMS, including biomedical applications - Describes monitoring structures and the environment with wireless MEMS
Publisher: Elsevier
ISBN: 0857098616
Category : Technology & Engineering
Languages : en
Pages : 640
Book Description
The increasing demand for mobile and wireless sensing necessitates the use of highly integrated technology featuring small size, low weight, high performance and low cost: micro-electro-mechanical systems (MEMS) can meet this need. The Handbook of MEMS for wireless and mobile applications provides a comprehensive overview of radio frequency (RF) MEMS technologies and explores the use of these technologies over a wide range of application areas.Part one provides an introduction to the use of RF MEMS as an enabling technology for wireless applications. Chapters review RF MEMS technology and applications as a whole before moving on to describe specific technologies for wireless applications including passive components, phase shifters and antennas. Packaging and reliability of RF MEMS is also discussed. Chapters in part two focus on wireless techniques and applications of wireless MEMS including biomedical applications, such as implantable MEMS, intraocular pressure sensors and wireless drug delivery. Further chapters highlight the use of RF MEMS for automotive radar, the monitoring of telecommunications reliability using wireless MEMS and the use of optical MEMS displays in portable electronics.With its distinguished editor and international team of expert authors, the Handbook of MEMS for wireless and mobile applications is a technical resource for MEMS manufacturers, the electronics industry, and scientists, engineers and academics working on MEMS and wireless systems. - Reviews the use of radio frequency (RF) MEMS as an enabling technology for wireless applications - Discusses wireless techniques and applications of wireless MEMS, including biomedical applications - Describes monitoring structures and the environment with wireless MEMS
Micro Electro Mechanical System Design
Author: James J. Allen
Publisher: CRC Press
ISBN: 1420027751
Category : Technology & Engineering
Languages : en
Pages : 492
Book Description
It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resource. It is a comprehensive, single-source guide that explains the design process by illustrating the full range of issues involved,
Publisher: CRC Press
ISBN: 1420027751
Category : Technology & Engineering
Languages : en
Pages : 492
Book Description
It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resource. It is a comprehensive, single-source guide that explains the design process by illustrating the full range of issues involved,