MEMS and Nanotechnology, Volume 2

MEMS and Nanotechnology, Volume 2 PDF Author: Tom Proulx
Publisher: Springer Science & Business Media
ISBN: 1441988254
Category : Technology & Engineering
Languages : en
Pages : 272

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Book Description
This the second volume of six from the Annual Conference of the Society for Experimental Mechanics, 2010, brings together 40 chapters on Microelectromechanical Systems and Nanotechnology. It presents early findings from experimental and computational investigations on MEMS and Nanotechnology including contributions on Nanomechanical Standards, Magneto-mechanical MEMS Sensors, Piezoelectric MEMS for Energy Harvesting, and Linear and Nonlinear Mass Sensing.

MEMS and Nanotechnology, Volume 2

MEMS and Nanotechnology, Volume 2 PDF Author: Tom Proulx
Publisher: Springer Science & Business Media
ISBN: 1441988254
Category : Technology & Engineering
Languages : en
Pages : 272

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Book Description
This the second volume of six from the Annual Conference of the Society for Experimental Mechanics, 2010, brings together 40 chapters on Microelectromechanical Systems and Nanotechnology. It presents early findings from experimental and computational investigations on MEMS and Nanotechnology including contributions on Nanomechanical Standards, Magneto-mechanical MEMS Sensors, Piezoelectric MEMS for Energy Harvesting, and Linear and Nonlinear Mass Sensing.

MEMS and Nanotechnology, Volume 4

MEMS and Nanotechnology, Volume 4 PDF Author: Tom Proulx
Publisher: Springer Science & Business Media
ISBN: 1461402107
Category : Technology & Engineering
Languages : en
Pages : 188

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Book Description
MEMS and Nanotechnology, Volume 4 represents one of eight volumes of technical papers presented at the Society for Experimental Mechanics Annual Conference on Experimental and Applied Mechanics, held at Uncasville, Connecticut, June 13-16, 2011. The full set of proceedings also includes volumes on Dynamic Behavior of Materials, Mechanics of Biological Systems and Materials, Mechanics of Time-Dependent Materials and Processes in Conventional and Multifunctional Materials; Optical Measurements, Modeling and, Metrology; Experimental and Applied Mechanics, Thermomechanics and Infra-Red Imaging, and Engineering Applications of Residual Stress.

Springer Handbook of Nanotechnology

Springer Handbook of Nanotechnology PDF Author: Bharat Bhushan
Publisher: Springer
ISBN: 9783540298557
Category : Technology & Engineering
Languages : en
Pages : 1916

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Book Description
This major work has established itself as the definitive reference in the nanoscience and nanotechnology area in one volume. In presents nanostructures, micro/nanofabrication, and micro/nanodevices. Special emphasis is on scanning probe microscopy, nanotribology and nanomechanics, molecularly thick films, industrial applications and microdevice reliability, and on social aspects. Reflecting further developments, the new edition has grown from six to eight parts. The latest information is added to fields such as bionanotechnology, nanorobotics, and NEMS/MEMS reliability. This classic reference book is orchestrated by a highly experienced editor and written by a team of distinguished experts for those learning about the field of nanotechnology.

Materials and Failures in MEMS and NEMS

Materials and Failures in MEMS and NEMS PDF Author: Atul Tiwari
Publisher: John Wiley & Sons
ISBN: 1119083877
Category : Technology & Engineering
Languages : en
Pages : 424

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Book Description
The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the hurdles in fabrication or manufacturing process. Although, an enormous amount of work being accomplished in the area, most of the information is treated as confidential or privileged. It is extremely hard to find the meaningful information for the new or related developments. This book is collection of chapters written by experts in MEMS and NEMS technology. Chapters are contributed on the development of new MEMS and NEMS materials as well as on the properties of these devices. Important properties such as residual stresses and buckling behavior in the devices are discussed as separate chapters. Various models have been included in the chapters that studies the mode and mechanism of failure of the MEMS and NEMS. This book is meant for the graduate students, research scholars and engineers who are involved in the research and developments of advanced MEMS and NEMS for a wide variety of applications. Critical information has been included for the readers that will help them in gaining precise control over dimensional stability, quality, reliability, productivity and maintenance in MEMS and NEMS. No such book is available in the market that addresses the developments and failures in these advanced devices.

Enabling Technology for MEMS and Nanodevices

Enabling Technology for MEMS and Nanodevices PDF Author: Henry Baltes
Publisher: John Wiley & Sons
ISBN: 3527675043
Category : Technology & Engineering
Languages : de
Pages : 441

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Book Description
Mikro- und Nanotechnik haben Wissenschaft und Forschung revolutioniert. In Zukunft werden sie auch den Alltag verändern. Nun liegt der erste Band einer neuen Buchreihe vor: Advanced Micro and Nano Systems 1. Henry Baltes und seine Co-Autoren knüpfen mit AMN an die Sensors Update-Reihe an. Das Autorenteam wurde um weitere Experten erweitert. AMN wird zwei Mal pro Jahr mit einem neuen Band die aktuellen Entwicklungen in der Mikro- und Nano-Welt begleiten. Die Erforschung und der Einsatz von Mikro- und Nanosystemen sind eines der brandaktuellen Themen im Wissenschaftsbereich. Die Forschungsergebnisse werden mehr und mehr auch konkret umgesetzt. Damit werden Mikro- und Nanotechnologie zu Wirtschaftsfaktoren. Aktuelle Entwicklungen, neue Technologien, Nano-Bauelemente und Systeme im Mikromaßstab - Advanced Micro and Nano Systems, die neue Buchreihe, wird Spiegel der spannenden und faszinierenden Mikro- und Nano-Welt sein. Zweimal pro Jahr wird es einen neuen AMN-Band geben. Die Autoren sind ausgewiesene Spezialisten. Zu den Herausgebern zählt Henry Baltes, Professor an der ETH Zürich. Er zeichnete bereits für die Bände der Sensors Update-Reihe verantwortlich. Die Artikel ermöglichen Neueinsteigern einen ersten Zugriff auf die Materie. Fachleute erhalten einen umfassenden Überblick. Anspruch der Herausgeber ist es, nicht nur die theoretischen Grundlagen von Mikro- und Nanosystemen zu reflektieren, sondern immer auch praktische Möglichkeiten und die Grenzen der Anwendung im Blick zu haben. Die AMN-Bände sind Handbücher und Nachschlagewerke in einem. Die Reihe richtet sich an Vertreter unterschiedlicher Fachrichtungen: Biologie, Chemie, Mathematik, Sensorindustrie und Materialwissenschaften.

Material Science and MEMS Production

Material Science and MEMS Production PDF Author: Chang Hui Liu
Publisher: Trans Tech Publications Ltd
ISBN: 3038264288
Category : Technology & Engineering
Languages : en
Pages : 117

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Book Description
Selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China

Nanotechnology

Nanotechnology PDF Author: Jeremy Ramsden
Publisher: William Andrew
ISBN: 0323393144
Category : Technology & Engineering
Languages : en
Pages : 361

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Book Description
Nanotechnology: An Introduction, Second Edition, is ideal for the newcomer to nanotechnology, someone who also brings a strong background in one of the traditional disciplines, such as physics, mechanical or electrical engineering, or chemistry or biology, or someone who has experience working in microelectromechanical systems (MEMS) technology. This book brings together the principles, theory, and practice of nanotechnology, giving a broad, yet authoritative, introduction to the possibilities and limitations of this exciting and rapidly developing field. The book's author, Prof Ramsden, also discusses design, manufacture, and applications and their impact on a wide range of nanotechnology areas. - Provides an overview of the rapidly growing and developing field of nanotechnology - Focuses on key essentials, and structured around a robust anatomy of the subject - Brings together the principles, theory, and practice of nanotechnology, giving a broad, yet authoritative, introduction to the possibilities and limitations of this exciting and rapidly developing field

Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set

Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set PDF Author: Marc J. Madou
Publisher: CRC Press
ISBN: 1351990616
Category : Technology & Engineering
Languages : en
Pages : 3817

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Book Description
Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.

Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology

Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology PDF Author: Bijoy Bhattacharyya
Publisher: William Andrew
ISBN: 032335288X
Category : Technology & Engineering
Languages : en
Pages : 297

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Book Description
Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of material removal, including an empirical model on the material removal rate for EMM (supported by experimental validation). The book moves next to construction-related features of EMM setup suitable for industrial micromachining applications, varying types of EMM, and the latest developments in the improvement of EMM setup. Further, it covers power supply, roll of electrolyte, and other major factors influencing EMM processes, and reports research findings concerning the improvement of machining accuracy and efficiency. Finally, the book devotes a chapter to the design and development of micro-tools, one of the most vital components in EMM. - Covers the generation of micro features used for advanced engineering of materials for fabrication of MEMS, microsystems and other micro-engineering applications - Explores the trend of decreasing size of fabricated devices, reflected in coverage of generation of high-precision nano-features on metal and semiconductors utilizing SPM, STM, and AFM, and nanotechnology aspects of EMM - Describes nanofabrication utilizing anodic dissolutions for mass manufacturing by overcoming obstacles utilizing electrochemical microsystem technology (EMST) and electrochemical nanotechnology (ENT)

Mechanical Properties of Structural Films

Mechanical Properties of Structural Films PDF Author: Christopher L. Muhlstein
Publisher: ASTM International
ISBN: 0803128894
Category : Gold films
Languages : en
Pages : 333

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Book Description
Recent advances in the mechanical properties of structural films are described in these papers from a November 2000 symposium held in Orlando, Florida. Papers are organized in sections on fracture and fatigue of structural films, elastic behavior and residual stress in thin films, tensile testing of