Atomic Layer Deposition for Semiconductors PDF Download
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Author: Cheol Seong Hwang
Publisher: Springer Science & Business Media
ISBN: 146148054X
Category : Science
Languages : en
Pages : 266
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Book Description
Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.
Author: Cheol Seong Hwang
Publisher: Springer Science & Business Media
ISBN: 146148054X
Category : Science
Languages : en
Pages : 266
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Book Description
Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.
Author: Nicola Pinna
Publisher: John Wiley & Sons
ISBN: 3527639934
Category : Technology & Engineering
Languages : en
Pages : 472
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Book Description
Atomic layer deposition, formerly called atomic layer epitaxy, was developed in the 1970s to meet the needs of producing high-quality, large-area fl at displays with perfect structure and process controllability. Nowadays, creating nanomaterials and producing nanostructures with structural perfection is an important goal for many applications in nanotechnology. As ALD is one of the important techniques which offers good control over the surface structures created, it is more and more in the focus of scientists. The book is structured in such a way to fi t both the need of the expert reader (due to the systematic presentation of the results at the forefront of the technique and their applications) and the ones of students and newcomers to the fi eld (through the first part detailing the basic aspects of the technique). This book is a must-have for all Materials Scientists, Surface Chemists, Physicists, and Scientists in the Semiconductor Industry.
Author: J. W. Elam
Publisher: The Electrochemical Society
ISBN: 1566778212
Category : Science
Languages : en
Pages : 469
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Book Description
The continuously expanding realm of Atomic Layer Deposition (ALD) Applications is the focus of this reoccurring symposium. ALD can enable the precise deposition of ultra-thin, highly conformal coatings over complex 3D topographies with controlled thickness and composition. This issue of ECS Transactions contains peer reviewed papers presented at the symposium. A broad spectrum of ALD applications is featured, including novel nano-composites and nanostructures, dielectrics for state-of-the-art transistors and capacitors, optoelectronics, and a variety of other emerging applications.
Author: Andrew Y. C. Nee
Publisher: Springer
ISBN: 9781447146698
Category : Technology & Engineering
Languages : en
Pages : 0
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Book Description
The Springer Reference Work Handbook of Manufacturing Engineering and Technology provides overviews and in-depth and authoritative analyses on the basic and cutting-edge manufacturing technologies and sciences across a broad spectrum of areas. These topics are commonly encountered in industries as well as in academia. Manufacturing engineering curricula across universities are now essential topics covered in major universities worldwide.
Author: Aiguo Wu
Publisher: John Wiley & Sons
ISBN: 3527347240
Category : Science
Languages : en
Pages : 252
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Book Description
A unique book that summarizes the properties, toxicology, and biomedical applications of TiO2-based nanoparticles Nanotechnology is becoming increasingly important for products used in our daily lives. Nanometer-sized titanium dioxide (TiO2) are widely used in industry for different purposes, such as painting, sunscreen, printing, cosmetics, biomedicine, and so on. This book summarizes the advances of TiO2 based nanobiotechnology and nanomedicine, covering materials properties, toxicological research, and biomedical application, such as antibacter, biosensing, and cancer theranostics. It uniquely integrates the TiO2 applications from physical properties, toxicology to various biomedical applications, and includes black TiO2 based cancer theranostics. Beginning with a comprehensive introduction to the properties and applications of nanoparticles, TiO2 Nanoparticles: Applications in Nanobiotechnology, Theranostics and Nanomedicine offers chapters on: Toxicity of TiO2 Nanoparticles; Antibacterial Applications of TiO2 Nanoparticles; Surface Enhanced Raman Spectrum of TiO2 Nanoparticle for Biosensing (TiO2 Nanoparticle Served as SERS Sensing Substrate); TiO2 as Inorganic Photosensitizer for Photodynamic Therapy; Cancer Theranostics of Black TiO2 Nanoparticles; and Neurodegenerative Disease Diagnostics and Therapy of TiO2-Based Nanoparticles. This title: Blends the physical properties, toxicology of TiO2 nanoparticles to the many biomedical applications Includes black TiO2 based cancer theranostics in its coverage Appeals to a broad audience of researchers in academia and industry working on nanomaterials-based biosensing, drug delivery, nanomedicine TiO2 Nanoparticles: Applications in Nanobiotechnology, Theranostics and Nanomedicine is an ideal book for medicinal chemists, analytical chemists, biochemists, materials scientists, toxicologists, and those in the pharmaceutical industry.
Author: Nathan J Patmore
Publisher: Royal Society of Chemistry
ISBN: 1788010671
Category : Science
Languages : en
Pages : 210
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Book Description
With the increase in volume, velocity and variety of information, researchers can find it difficult to keep up to date with the literature in their field. Providing an invaluable resource, this volume contains analysed, evaluated and distilled information on the latest in organometallic chemistry research and emerging fields. The reviews range in scope and include π-coordinated arene metal complexes and catalysis by arene exchange, rylenes as chromophores in catalysts for CO2 photoreduction, metal nodes and metal sites in metal–organic frameworks, developments in molecular precursors for CVD and ALD, and multiphoton luminescence processes in f-element containing compounds.
Author: Nicola Pinna
Publisher: John Wiley & Sons
ISBN: 3527639926
Category : Technology & Engineering
Languages : en
Pages : 463
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Book Description
Atomic layer deposition, formerly called atomic layer epitaxy, was developed in the 1970s to meet the needs of producing high-quality, large-area fl at displays with perfect structure and process controllability. Nowadays, creating nanomaterials and producing nanostructures with structural perfection is an important goal for many applications in nanotechnology. As ALD is one of the important techniques which offers good control over the surface structures created, it is more and more in the focus of scientists. The book is structured in such a way to fi t both the need of the expert reader (due to the systematic presentation of the results at the forefront of the technique and their applications) and the ones of students and newcomers to the fi eld (through the first part detailing the basic aspects of the technique). This book is a must-have for all Materials Scientists, Surface Chemists, Physicists, and Scientists in the Semiconductor Industry.
Author: Yitzhak Mastai
Publisher: BoD – Books on Demand
ISBN: 953511140X
Category : Science
Languages : en
Pages : 563
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Book Description
Today modern materials science is a vibrant, emerging scientific discipline at the forefront of physics, chemistry, engineering, biology and medicine, and is becoming increasingly international in scope as demonstrated by emerging international and intercontinental collaborations and exchanges. The overall purpose of this book is to provide timely and in-depth coverage of selected advanced topics in materials science. Divided into five sections, this book provides the latest research developments in many aspects of materials science. This book is of interest to both fundamental research and also to practicing scientists and will prove invaluable to all chemical engineers, industrial chemists and students in industry and academia.
Author: The Minerals, Metals & Materials Society
Publisher: Springer Nature
ISBN: 3030362965
Category : Technology & Engineering
Languages : en
Pages : 2046
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Book Description
This collection presents papers from the 149th Annual Meeting & Exhibition of The Minerals, Metals & Materials Society.
Author: Errol G. Lewars
Publisher: Springer Science & Business Media
ISBN: 0306483912
Category : Science
Languages : en
Pages : 474
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Book Description
Computational chemistry has become extremely important in the last decade, being widely used in academic and industrial research. Yet there have been few books designed to teach the subject to nonspecialists. Computational Chemistry: Introduction to the Theory and Applications of Molecular and Quantum Mechanics is an invaluable tool for teaching and researchers alike. The book provides an overview of the field, explains the basic underlying theory at a meaningful level that is not beyond beginners, and it gives numerous comparisons of different methods with one another and with experiment. The following concepts are illustrated and their possibilities and limitations are given: - potential energy surfaces; - simple and extended Hückel methods; - ab initio, AM1 and related semiempirical methods; - density functional theory (DFT). Topics are placed in a historical context, adding interest to them and removing much of their apparently arbitrary aspect. The large number of references, to all significant topics mentioned, should make this book useful not only to undergraduates but also to graduate students and academic and industrial researchers.
