Micro Electro Mechanical System Design

Micro Electro Mechanical System Design PDF Author: James J. Allen
Publisher: CRC Press
ISBN: 1420027751
Category : Technology & Engineering
Languages : en
Pages : 492

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Book Description
It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resource. It is a comprehensive, single-source guide that explains the design process by illustrating the full range of issues involved,