Materials Science of Microelectromechanical Systems (MEMS) Devices IV: PDF Download
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Author: Arturo A. Ayón
Publisher: Cambridge University Press
ISBN: 9781107412125
Category : Technology & Engineering
Languages : en
Pages : 334
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Book Description
Microelectromechanical systems (MEMS) has been able to successfully acceded to several markets, including pressure sensors, gyroscopes, accelerometers, fluidics and data storage, representing a total revenue of some $2 billion in 2000. However, MEMS has the potential to offer reliable and cost-effective solutions to many other fields. The current expectation is that we will witness the appearance of diverse MEMS structures for power generation, propulsion, biomedical applications, optical switching, infrared sensing, microphones and displays, to name just a few. This plethora of activity is possible due to the increased understanding of the properties of the micromanufacturing materials involved, the availability of processing equipment with enhanced capabilities, and the effort of a large number of researchers and scientists. This book, first published in 2002, focuses on the materials science of MEMS structures and the films involved to create those structures. Topics include: applications metrology; mechanical properties; microstructure and processing; applications; processing techniques; alternative materials; and surface engineering issues in MEMS structures and devices.
Author: Arturo A. Ayón
Publisher: Cambridge University Press
ISBN: 9781107412125
Category : Technology & Engineering
Languages : en
Pages : 334
Get Book Here
Book Description
Microelectromechanical systems (MEMS) has been able to successfully acceded to several markets, including pressure sensors, gyroscopes, accelerometers, fluidics and data storage, representing a total revenue of some $2 billion in 2000. However, MEMS has the potential to offer reliable and cost-effective solutions to many other fields. The current expectation is that we will witness the appearance of diverse MEMS structures for power generation, propulsion, biomedical applications, optical switching, infrared sensing, microphones and displays, to name just a few. This plethora of activity is possible due to the increased understanding of the properties of the micromanufacturing materials involved, the availability of processing equipment with enhanced capabilities, and the effort of a large number of researchers and scientists. This book, first published in 2002, focuses on the materials science of MEMS structures and the films involved to create those structures. Topics include: applications metrology; mechanical properties; microstructure and processing; applications; processing techniques; alternative materials; and surface engineering issues in MEMS structures and devices.
Author: Arturo A. Ayón
Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 344
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Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This book, first published in 2002, focuses on the materials science of MEMS structures and the films involved to create those structures.
Author:
Publisher:
ISBN:
Category : Microelectromechanical systems
Languages : en
Pages : 318
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Book Description
Author:
Publisher:
ISBN:
Category : Microactuators
Languages : en
Pages : 344
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Book Description
Author: Harold Kahn
Publisher: Cambridge University Press
ISBN: 9781107412293
Category : Technology & Engineering
Languages : en
Pages : 366
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Book Description
Microelectromechanical systems (MEMS) is a growing field with numerous potential commercial applications, including pressure and inertial sensing, optical and electrical switching, power conversion, fluidic flow control, and chemical analysis. MEMS combine mechanical and electrical (and sometimes optical, chemical, or biological) function at small scales using many of the batch fabrication techniques developed for the micro-electronics industry. Materials have been developed or adapted for MEMS applications for use as structures, actuators, and sensors. Processing techniques also have been established for integrating these materials with existing MEMS. In addition, MEMS technology has proven ideal for allowing the mechanical and tribological characterization of materials at small scales. This book, first published in 2001, addresses these issues and a variety of materials are discussed, including Si, porous Si, SiC, SiGe, diamond, electroplated Ni and Cu, as well as piezoelectric, ferroelectric, and shape memory materials, and self-assembled organic monolayers. Fabrication processes include plasma and chemical etching, Si bonding, high-aspect-ratio lithography and micromolding. In addition, the stress, fracture strength, fatigue, and friction of MEMS materials and structures are also discussed.
Author: Maarten De Boer
Publisher: Mrs Proceedings
ISBN:
Category : Science
Languages : en
Pages : 344
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Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author: Ronald P. Manginell
Publisher:
ISBN:
Category : Science
Languages : en
Pages : 268
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Book Description
Microelectromechanical systems (MEMS) can be a critical link between the macroworld and the realm of nanobiotechnology. Top-down MEMS methods and devices will likely serve as an important handle for interfacing with the bottom-up techniques and structures that typify nanobiotechnology. This volume focuses on recent advances in the fields of MEMS and BioMEMS, including microfluidics, bioanalysis, packaging, materials and fabrication methods. It is clear from these presentations that top-down semiconductor-based processing remains vital. Indeed, frontiers are expanding within this realm, with new research on materials like poly-SiGe. However, new materials, particularly polymers, and bottom-up methods such as soft lithography and chemical synthesis, are continually gaining in utility and importance. It is also apparent from this volume that microanalytical techniques continue to be advanced, including new ways of separating samples by optical, adhesion-based and dielectrophoretic methods. And sensors, always of interest, are demonstrated here by research into sensors for environmental and material analysis. Capacitance-based sensors for DNA analysis, and magnetic sensors for position sensing, are also highlighted. Finally, systems for direct interfacing with biological systems are addressed, with presentations on neural recording methods, retinal implants, and tissue engineering.
Author:
Publisher:
ISBN:
Category : Microactuators
Languages : en
Pages : 378
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Book Description
Author: Patrick W. DeHaven
Publisher:
ISBN:
Category : Computers
Languages : en
Pages : 336
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Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author: David A. LaVan
Publisher: Cambridge University Press
ISBN: 9781107408586
Category : Technology & Engineering
Languages : en
Pages : 342
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Book Description
This book is part of a popular series on the materials science of MEMS devices, first published in 1999. In the years since, many sophisticated devices have emerged and many aspects of MEMS materials behaviors have been characterized. However, there remain many basic questions about the relationship between process, properties and function for MEMS materials. Experimental methods have been developed, but there REMAINS a lack of standardization that would allow comparison between laboratories and commercial vendors or the creation of materials specifications that would enable greater commercialization of MEMS. The book addresses many of these issues including: RF-MEMS; optical MEMS; MEMS metrology, tribology, materials characterization and mechanical behavior; MEMS surfaces, MEMS reliability, packaging and life assessment; MEMS modeling and software tools for materials integration; biocompatibility of MEMS materials and devices; new materials and fabrication methodologies for MEMS; microfluidics and nanofluidics; in vivo drug/gene/protein delivery; novel actuators; MEMS cell-based systems; MEMS neural interfaces; MEMS sensors; and MEMS microengines and microfuel cells.
