Materials Research Society Symposia Proceedings. Volume 38. Plasma Synthesis and Etching of Electronic Materials Held on November 27-30, 1984 at Boston, Massachusetts PDF Download
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Author: R. P. H. Chang
Publisher:
ISBN:
Category :
Languages : en
Pages : 539
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Book Description
The symposium covered topics ranging from plasma diagnostics to mechanisms of plasma etching and growth of materials. The spirit of the symposium was to provide understanding of the chemistry and physics of plasma-materials interaction. Contents: Plasma Processes and Diagnostics; Plasma Etching; Plasma Deposition of Thin Films; and Plasma Oxidation, Nitridation and Passivation of Surfaces.
Author: R. P. H. Chang
Publisher:
ISBN:
Category :
Languages : en
Pages : 539
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Book Description
The symposium covered topics ranging from plasma diagnostics to mechanisms of plasma etching and growth of materials. The spirit of the symposium was to provide understanding of the chemistry and physics of plasma-materials interaction. Contents: Plasma Processes and Diagnostics; Plasma Etching; Plasma Deposition of Thin Films; and Plasma Oxidation, Nitridation and Passivation of Surfaces.
Author: R. P. H. Chang
Publisher: Mrs Proceedings
ISBN:
Category : Science
Languages : en
Pages : 552
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Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author:
Publisher:
ISBN:
Category : Electronics
Languages : en
Pages : 522
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Author: Symposium on Plasma Synthesis and Etching of Electronic Materials. 1984, Boston, Mass..
Publisher:
ISBN:
Category :
Languages : en
Pages : 522
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Author:
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ISBN:
Category : Science
Languages : en
Pages : 588
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Author: Edward A. Giess
Publisher:
ISBN: 9780931837050
Category : Technology & Engineering
Languages : en
Pages : 440
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Author:
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Category : Government reports announcements & index
Languages : en
Pages : 968
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Author: Mark Alper
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ISBN:
Category : Technology & Engineering
Languages : en
Pages : 330
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Author: Carol M. Jantzen
Publisher:
ISBN: 9780931837098
Category :
Languages : en
Pages : 1032
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Author: British Library. Lending Division
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ISBN:
Category : Congresses and conventions
Languages : en
Pages : 780
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