Handbook of Ellipsometry PDF Download
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Author: Harland Tompkins
Publisher: William Andrew
ISBN: 0815517475
Category : Science
Languages : en
Pages : 887
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Book Description
The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale. With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry.
Author: Harland Tompkins
Publisher: William Andrew
ISBN: 0815517475
Category : Science
Languages : en
Pages : 887
Get Book Here
Book Description
The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale. With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry.
Author: R. J. Archer
Publisher:
ISBN:
Category : Optical rotation
Languages : en
Pages :
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Book Description
Author: Harland G. Tompkins
Publisher: Courier Corporation
ISBN: 0486151921
Category : Technology & Engineering
Languages : en
Pages : 496
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Book Description
This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Its 14 case studies illustrate concepts and reinforce applications of ellipsometry — particularly in relation to the semiconductor industry and to studies involving corrosion and oxide growth. A User's Guide to Ellipsometry will enable readers to move beyond limited turn-key applications of ellipsometers. In addition to its comprehensive discussions of the measurement of film thickness and optical constants in film, it also considers the trajectories of the ellipsometric parameters Del and Psi and how changes in materials affect parameters. This volume also addresses the use of polysilicon, a material commonly employed in the microelectronics industry, and the effects of substrate roughness. Three appendices provide helpful references.
Author: Roger P. Netterfield
Publisher:
ISBN:
Category : Ellipsometry
Languages : en
Pages :
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Book Description
Author: Harland G. Tompkins
Publisher: Wiley-Interscience
ISBN: 9780471181729
Category : Science
Languages : en
Pages : 0
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Book Description
While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry. A guide for practitioners and researchers in a variety of disciplines, it addresses a broad range of applications in physics, chemistry, electrical engineering, and materials science.
Author: Roger P. Netterfield
Publisher:
ISBN:
Category : Ellipsometry
Languages : en
Pages : 42
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Book Description
Author: Harland G. Tompkins
Publisher: Springer
ISBN: 9783540860372
Category : Technology & Engineering
Languages : en
Pages : 870
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Book Description
Ever progressive miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research are propelling ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, to greater popularity in a widening array of applications. Ellipsometry, without contact and non-damaging to samples, is an ideal measurement technique to determine optical and physical properties of materials at the nano scale. With the acceleration of new instruments and applications occurring today, this book provides a much needed foundation of the science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, fiber optics, biotechnology, and pharmaceuticals. Divided into four sections, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas.
Author: Michael J. Mailloux
Publisher:
ISBN:
Category :
Languages : en
Pages :
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Book Description
Author: Edward D. Palik
Publisher: Academic Press
ISBN: 0080556302
Category : Science
Languages : en
Pages : 1121
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Book Description
This handbook--a sequel to the widely used Handbook of Optical Constants of Solids--contains critical reviews and tabulated values of indexes of refraction (n) and extinction coefficients (k) for almost 50 materials that were not covered in the original handbook. For each material, the best known n and k values have been carefully tabulated, from the x-ray to millimeter-wave region of the spectrum by expert optical scientists. In addition, the handbook features thirteen introductory chapters that discuss the determination of n and k by various techniques. * Contributors have decided the best values for n and k * References in each critique allow the reader to go back to the original data to examine and understand where the values have come from * Allows the reader to determine if any data in a spectral region needs to be filled in * Gives a wide and detailed view of experimental techniques for measuring the optical constants n and k * Incorporates and describes crystal structure, space-group symmetry, unit-cell dimensions, number of optic and acoustic modes, frequencies of optic modes, the irreducible representation, band gap, plasma frequency, and static dielectric constant
Author: Harland G. Tompkins
Publisher: Momentum Press
ISBN: 1606507281
Category : Technology & Engineering
Languages : en
Pages : 138
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Book Description
Ellipsometry is an experimental technique for determining the thickness and optical properties of thin films. It is ideally suited for films ranging in thickness from sub-nanometer to several microns. Spectroscopic measurements have greatly expanded the capabilities of this technique and introduced its use into all areas where thin films are found: semiconductor devices, flat panel and mobile displays, optical coating stacks, biological and medical coatings, protective layers, and more. While several scholarly books exist on the topic, this book provides a good introduction to the basic theory of the technique and its common applications. The target audience is not the ellipsometry scholar, but process engineers and students of materials science who are experts in their own fields and wish to use ellipsometry to measure thin film properties without becoming an expert in ellipsometry itself.
