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Levitation Micro-Systems

Levitation Micro-Systems PDF Author: Kirill Poletkin
Publisher: Springer Nature
ISBN: 3030589080
Category : Technology & Engineering
Languages : en
Pages : 178

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Book Description
This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and –actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particular, micro-bearings, -actuators, -accelerators and –accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements.