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Author: D. Bäuerle
Publisher: Springer Science & Business Media
ISBN: 3642823815
Category : Science
Languages : en
Pages : 561
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Book Description
Laser processing is now a rapidly increasing field with many real and potential applications in different areas of technology such as micromecha nics, metallurgy, integrated optics, and semiconductor device fabrication. The neces s ity for such soph i st i cated 1 i ght sources as 1 asers is based on the spatial coherence and the monochromaticity of laser light. The spatial coherence permits extreme focussing of the laser light resulting in the availability of high energy densities which can be used for strongly loca lized heat- and chemical-treatment of materials, with a resolution down to 1 ess than 1 lJIll. When us i ng pul sed or scanned cw-l asers, 1 oca 1 i zat i on in time is also possible. Additionally, the monochromaticity of laser light allows for control of the depth of heat treatment and/or selective, nonthermal bond breaking - within the surface of the material or within the molecules of the surrounding reactive atmosphere - simply by tuning the laser wavelength. These inherent advantages of laser light permit micromachining of materials (drilling, cutting, welding etc.) and also allow single-step controlled area processing of thin films and surfaces. Processes include structural transformation (removal of residual damage, grain growth in polycrystalline material, amorphization, surface hardening etc.), etching, doping, alloying, or deposition. In addition, laser processing is not 1 imited to planar substrates.
Author: D. Bäuerle
Publisher: Springer Science & Business Media
ISBN: 3642823815
Category : Science
Languages : en
Pages : 561
Get Book
Book Description
Laser processing is now a rapidly increasing field with many real and potential applications in different areas of technology such as micromecha nics, metallurgy, integrated optics, and semiconductor device fabrication. The neces s ity for such soph i st i cated 1 i ght sources as 1 asers is based on the spatial coherence and the monochromaticity of laser light. The spatial coherence permits extreme focussing of the laser light resulting in the availability of high energy densities which can be used for strongly loca lized heat- and chemical-treatment of materials, with a resolution down to 1 ess than 1 lJIll. When us i ng pul sed or scanned cw-l asers, 1 oca 1 i zat i on in time is also possible. Additionally, the monochromaticity of laser light allows for control of the depth of heat treatment and/or selective, nonthermal bond breaking - within the surface of the material or within the molecules of the surrounding reactive atmosphere - simply by tuning the laser wavelength. These inherent advantages of laser light permit micromachining of materials (drilling, cutting, welding etc.) and also allow single-step controlled area processing of thin films and surfaces. Processes include structural transformation (removal of residual damage, grain growth in polycrystalline material, amorphization, surface hardening etc.), etching, doping, alloying, or deposition. In addition, laser processing is not 1 imited to planar substrates.
Author: K Muraoka
Publisher: CRC Press
ISBN: 1420034065
Category : Science
Languages : en
Pages : 307
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Book Description
Updated and expanded from the original Japanese edition, Laser-Aided Diagnostics of Gases and Plasmas takes a unique approach in treating laser-aided diagnostics. The book unifies the subject by joining applications instead of describing each application as a totally separate system. In taking this approach, it highlights the relative strengths of
Author: Dieter Bäuerle
Publisher: Springer Science & Business Media
ISBN: 3662032538
Category : Science
Languages : en
Pages : 649
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Book Description
Laser Processing and Chemistry gives an overview of the fundamentals and applications of laser--matter interactions, in particular with regard to laser material processing. Special attention is given to laser-induced physical and chemical processes at gas--solid, liquid--solid, and solid--solid interfaces. Starting with the background physics, the book proceeds to examine applications of laser techniques in micro-machining, and the patterning, coating, and modification of material surfaces. Students, engineers, and manufacturers alike will find this book an invaluable reference work for the state of the art in laser processing.
Author: Ian W. Boyd
Publisher: Springer Science & Business Media
ISBN: 3642831362
Category : Science
Languages : en
Pages : 328
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Book Description
This text aims at providing a comprehensive and up to date treatment of the new and rapidly expanding field of laser pro cessing of thin films, particularly, though by no means exclu sively, of recent progress in the dielectrics area. The volume covers all the major aspects of laser processing technology in general, from the background and history to its many potential applications, and from the theory to the necessary experimental considerations. It highlights and compares the vast array of processing conditions now available with intense photon beams, as well as the properties of the films and microstructures pro duced. Separate chapters deal with the fundamentals of laser interactions with matter, and with experimental considerations. Detailed consideration is also given to film deposition, nuclea tion and growth, oxidation and annealing, as well as selective and localized. etching and ablation, not only in terms of the various photon-induced processes, but also with respect to traditional as well as other competing new technologies.
Author: R.A. Levy
Publisher: Springer Science & Business Media
ISBN: 1461305411
Category : Science
Languages : en
Pages : 444
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Book Description
As feature dimensions of integrated circuits shrink, the associated geometrical constraints on junction depth impose severe restrictions on the thermal budget for processing such devices. Furthermore, due to the relatively low melting point of the first aluminum metallization level, such restrictions extend to the fabrication of multilevel structures that are now essential in increasing packing density of interconnect lines. The fabrication of ultra large scale integrated (ULSI) devices under thermal budget restrictions requires the reassessment of existing and the development of new microelectronic materials and processes. This book addresses three broad but interrelated areas. The first area focuses on the subject of rapid thermal processing (RTP), a technology that allows minimization of processing time while relaxing the constraints on high temperature. Initially developed to limit dopant redistribution, current applications of RTP are shown here to encompass annealing, oxidation, nitridation, silicidation, glass reflow, and contact sintering. In a second but complementary area, advances in equipment design and performance of rapid thermal processing equipment are presented in conjunction with associated issues of temperature measurement and control. Defect mechanisms are assessed together with the resulting properties of rapidly deposited and processed films. The concept of RTP integration for a full CMOS device process is also examined together with its impact on device characteristics.
Author: Yoshihiro Deguchi
Publisher: Taylor & Francis
ISBN: 1439853398
Category : Science
Languages : en
Pages : 301
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Book Description
Tighter regulations of harmful substances such as NOx, CO, heavy metals, particles, emissions from commercial plants and automobiles reflect a growing demand for lowering the anthropogenic burdens on the environment. It is equally important to monitor controlling factors to improve the operation of industrial machinery and plants. Among the many me
Author: Hans Medin
Publisher: Springer Science & Business Media
ISBN: 3642524761
Category : Science
Languages : en
Pages : 231
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Book Description
Author: J. Mazumder
Publisher: Springer Science & Business Media
ISBN: 9400901976
Category : Science
Languages : en
Pages : 937
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Book Description
Synthesis of nonequilibrium metallic phases has been an area of great interest to the materials processing community since early 1960. Inherent rapid cooling rates in laser processing are being used to engineer non-equilibrium microstructures which cannot be rivaled by other processes. This lecture will discuss the phenomena involved and its application in designing materials with tailored properties. What is non-equilibrium Synthesis? This is a synthesis method to produce binary or higher order materials where kinetics of the pro cess affects the transport of the constituent elements during phase transformation resulting in a composition or crystallographic configuration which is different from what is observed when the elements arranges themselves with the lowest possible Gibbs Free energy, which is the equilibrium condition. Figure 1 illustrates the phenomena. Phase diagram under equilibrium condition is illustrated by the solid line whereas the no-equilibrium phase diagram is represented by the dotted line. One can observe the shrinkage of the phase field under non-equilibrium condition. Any alloy composition between the solidus lines of the equilibrium and non-equilibrium phase diagram will be a non equilibrium alloys with extended solid solution.
Author:
Publisher:
ISBN: 9781510615359
Category :
Languages : en
Pages :
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Book Description
Author: Simeon M. Metev
Publisher: Springer Science & Business Media
ISBN: 3642973272
Category : Technology & Engineering
Languages : en
Pages : 283
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Book Description
Laser-Assisted Microtechnology deals with laser applications to a wide variety of problems in microelectronic design and fabrication. It covers micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The monograph describes fundamental aspects and practical details of the technological processes as well as the optimum conditions for their realization.
