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Author: K. G. Ibbs
Publisher:
ISBN: 9780521322546
Category : Technology & Engineering
Languages : en
Pages : 172
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Book Description
Nine expert contributors describe the application of laser processing techniques in the fabrication of semiconductor materials & devices for the microelectronics industry. This book comprises a carefully edited collection of specially written reviews by leading figures in all aspects of this important area of high technology. This subject matter should interest anyone involved with a semiconductor fabrication facility or a development laboratory with an interest in modern advances in processing technology, especially those people working in the larger electrical & electronics companies. In addition, it will be of value to university groups in engineering & physics departments involved in laser processing of materials, & of subsidiary interest to microfilm technologists working in optics fabrication.
Author: K. G. Ibbs
Publisher:
ISBN: 9780521322546
Category : Technology & Engineering
Languages : en
Pages : 172
Get Book
Book Description
Nine expert contributors describe the application of laser processing techniques in the fabrication of semiconductor materials & devices for the microelectronics industry. This book comprises a carefully edited collection of specially written reviews by leading figures in all aspects of this important area of high technology. This subject matter should interest anyone involved with a semiconductor fabrication facility or a development laboratory with an interest in modern advances in processing technology, especially those people working in the larger electrical & electronics companies. In addition, it will be of value to university groups in engineering & physics departments involved in laser processing of materials, & of subsidiary interest to microfilm technologists working in optics fabrication.
Author: J. J. Ritsko
Publisher:
ISBN:
Category : Lasers
Languages : en
Pages : 268
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Book Description
Author: Y. Pauleau
Publisher: Springer Science & Business Media
ISBN: 940100353X
Category : Technology & Engineering
Languages : en
Pages : 372
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Book Description
An up-to-date collection of tutorial papers on the latest advances in the deposition and growth of thin films for micro and nano technologies. The emphasis is on fundamental aspects, principles and applications of deposition techniques used for the fabrication of micro and nano devices. The deposition of thin films is described, emphasising the gas phase and surface chemistry and its effects on the growth rates and properties of films. Gas-phase phenomena, surface chemistry, growth mechanisms and the modelling of deposition processes are thoroughly described and discussed to provide a clear understanding of the growth of thin films and microstructures via thermally activated, laser induced, photon assisted, ion beam assisted, and plasma enhanced vapour deposition processes. A handbook for engineers and scientists and an introduction for students of microelectronics.
Author: Daniel J. Ehrlich
Publisher: Cambridge University Press
ISBN: 9781107411043
Category : Technology & Engineering
Languages : en
Pages : 534
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Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author: J. Mazumder
Publisher: Springer Science & Business Media
ISBN: 1489914307
Category : Technology & Engineering
Languages : en
Pages : 406
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Book Description
In this monograph, the authors offer a comprehensive examination of the latest research on Laser Chemical Vapor Deposition (LCVD). Chapters explore the physics of LCVD as well as the principles of a wide range of related phenomena-including laser-matter interactions, heat transfer, fluid flow, chemical kinetics, and adsorption. With this reference, researchers will discover how to apply these principles to developing theories about various types of LCVD processes; gain greater insight into the basic mechanisms of LCVD; and obtain the ability to design and control an LCVD system.
Author: Vadim P. Veiko
Publisher: Springer
ISBN: 3319059874
Category : Science
Languages : en
Pages : 327
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Book Description
This book covers the state of the art of laser micro- and nanotechnology. The physical fundamentals of different processes and the application are presented. The book deals with different materials like phase change and memory alloys, thin films, polymers etc. New phenomena and mechanisms of laser-matter interaction in nano-domains are explained. This book is helpful for students, postgraduates, engineers and researches working not only in the field of laser microtechnology but also in high-tech industry, like photonics, microelectronics, information technology.
Author: I.W. Boyd
Publisher: Elsevier
ISBN: 0444596658
Category : Science
Languages : en
Pages : 482
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Book Description
This volume discusses both the practical and theoretical aspects of energy beam materials processing. It highlights the recent advances in the use of beams and incoherent light sources to enhance or modify chemical processes at solid surfaces. Special attention is given to the latest developments in the use of ion, electron and photon beams, and on laser-assisted process chemistry. Thin film and surface and interface reactions as well as bulk phase transformations are discussed. Practical technological details and the criteria for present and future applications are also reviewed. The papers collected in this volume reflect the continuing strong interest and variety of development in this field.
Author: E. Fogarassy
Publisher: Elsevier
ISBN: 0444596682
Category : Science
Languages : en
Pages : 495
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Book Description
The papers in this volume cover all aspects of laser assisted surface processing ranging from the preparation of high-Tc superconducting layer structures to industrial laser applications for device fabrication. The topics presented give recent results in organometallic chemistry and laser photochemistry, and novel surface characterization techniques. The ability to control the surface morphology by digital deposition and etching shows one of the future directions for exciting applications of laser surface processing, some of which may apply UV and VUV excitation. The understanding of elementary proceses is essential for the design of novel deposition methods, with diamond CVD being an outstanding example. The high quality of these contributions once again demonstrates that the E-MRS is an efficient forum for interaction between research workers and industry.
Author: I.W. Boyd
Publisher: Elsevier
ISBN: 0444596801
Category : Technology & Engineering
Languages : en
Pages : 552
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Book Description
The contributions in this volume reflect not only the growing understanding of the underlying mechanisms controlling the various reactions in laser surface processing, but also the potential of several developing applications of direct processing. The most notable trend in the field currently is the technique of laser ablation, which is reported in almost a quarter of the papers in this volume. Whilst by no means a new phenomenon, attention has until recent years remained in the area of lithography and UV-sensitive materials. The growth in interest lies in the use of the technique to grow multi-component thin films and multi-layers. A number of papers on the topic of process diagnostics and in-situ measurements are also included. The theme of these annual meetings is centred around the physical and chemical modification of thin films and surfaces induced by the action of photon, ion, neutral, or electron beams in a variety of environments. Consequently these proceedings provide a comprehensive and unified presentation of the latest developments in this field.
Author: Charles Blain
Publisher: Nova Publishers
ISBN: 9781590332252
Category : Technology & Engineering
Languages : en
Pages : 214
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Book Description
Developments in lasers continue to enable progress in many areas such as eye surgery, the recording industry and dozens of others. This book presents citations from the book literature for the last 25 years and groups them for ease of access which is also provided by subject, author and titles indexes.
