Investigation of the Electrical Properties of Ion-implanted Gallium Arsenide as a Function of Temperature

Investigation of the Electrical Properties of Ion-implanted Gallium Arsenide as a Function of Temperature PDF Author: Md. Shah Alam
Publisher:
ISBN:
Category : Gallium arsenide
Languages : en
Pages : 130

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Investigation of the Electrical Properties of Ion-implanted Gallium Arsenide as a Function of Temperature

Investigation of the Electrical Properties of Ion-implanted Gallium Arsenide as a Function of Temperature PDF Author: Md. Shah Alam
Publisher:
ISBN:
Category : Gallium arsenide
Languages : en
Pages : 130

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An Investigation of Temperature Dependence of Electrical Properties in Ion-implanted Gallium Arsenide

An Investigation of Temperature Dependence of Electrical Properties in Ion-implanted Gallium Arsenide PDF Author: A. K. M. Matior Rahman
Publisher:
ISBN:
Category : Gallium arsenide semiconductors
Languages : en
Pages : 152

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A Study of Temperature Dependent Electrical Properties of Ion-implanted Gallium Arsenide

A Study of Temperature Dependent Electrical Properties of Ion-implanted Gallium Arsenide PDF Author: Shanmugam Sundaram
Publisher:
ISBN:
Category : Gallium arsenide
Languages : en
Pages : 182

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Electrical Properties of Ion Implanted Layers in Silicon and Gallium Arsenide

Electrical Properties of Ion Implanted Layers in Silicon and Gallium Arsenide PDF Author: Richard Dana Pashley
Publisher:
ISBN:
Category : Doped semiconductors
Languages : en
Pages : 123

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Part I: With the advent of ion implantation, it has become possible to introduce many new dopant species into silicon. The electrical behavior of implanted species displaying deep energy levels was investigated. Part II: Ion implantation was investigated as a doping process for the fabrication of submicron n-type layers in GaAs.

Masters Theses in the Pure and Applied Sciences

Masters Theses in the Pure and Applied Sciences PDF Author: Wade H. Shafer
Publisher: Springer Science & Business Media
ISBN: 1461573912
Category : Science
Languages : en
Pages : 386

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Book Description
Masters Theses in the Pure and Applied Sciences was first conceived, published, and disseminated by the Center for Information and Numerical Data Analysis and Synthesis (CINDAS) * at Purdue University in 1957, starting its coverage of theses with the academic year 1955. Beginning with Volume 13, the printing and dissemination phases of the activity were transferred to University Microfilms/Xerox of Ann Arbor, Michigan, with the thougtit that such an arrangement would be more beneficial to the academic and general scientific and technical community. After five years of this joint undertaking we had concluded that it was in the interest of all con cerned if the printing and distribution of the volumes were handled by an interna tional publishing house to assure improved service and broader dissemination. Hence, starting with Volume 18, Masters Theses in the Pure and Applied Sciences has been disseminated on a worldwide basis by Plenum Publishing Cor poration of New York, and in the same year the coverage was broadened to include Canadian universities. All back issues can also be ordered from Plenum. We have reported in Volume 31 (thesis year 1986) a total of 11 ,480 theses titles trom 24 Canadian and 182 United States universities. We are sure that this broader base tor these titles reported will greatly enhance the value ot this important annual reterence work. While Volume 31 reports theses submitted in 1986, on occasion, certain univer sities do re port theses submitted in previousyears but not reported at the time.

Nuclear Science Abstracts

Nuclear Science Abstracts PDF Author:
Publisher:
ISBN:
Category : Nuclear energy
Languages : en
Pages : 612

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Scientific and Technical Aerospace Reports

Scientific and Technical Aerospace Reports PDF Author:
Publisher:
ISBN:
Category : Aeronautics
Languages : en
Pages : 1460

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Book Description
Lists citations with abstracts for aerospace related reports obtained from world wide sources and announces documents that have recently been entered into the NASA Scientific and Technical Information Database.

Electrical Properties of Ion Implanted Layers in Silicon and Gallium Arsenide

Electrical Properties of Ion Implanted Layers in Silicon and Gallium Arsenide PDF Author: Richard D. Pashley
Publisher:
ISBN:
Category : Doped semiconductors
Languages : en
Pages : 114

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Controlled Atmosphere Annealing of Ion Implanted Gallium Arsenide

Controlled Atmosphere Annealing of Ion Implanted Gallium Arsenide PDF Author: C. L. Anderson
Publisher:
ISBN:
Category :
Languages : en
Pages : 140

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Controlled atmosphere techniques were developed as an alternative to dielectric encapsulation for the high temperature anneal of ion implanted layers in GaAs. Two approaches: (1) the controlled atmosphere technique (CAT), and (2) the melt controlled ambient technique (MCAT) have been investigated. Using the CAT procedure, which involves annealing in flowing hydrogen with an arsenic overpressure, annealing without detectable surface erosion, has been performed at temperatures as high as 950 C, with or without encapsulants. Impurity diffusion, damage recovery, and electrical activity were investigated as a function of anneal parameters. Range studies of technologically important impurities such as S, Si, Se, Be and Mg were carried out. For the first time the role of the encapsulant on implanted profile degradation and the importance of Cr redistribution during the anneal cycle were determined. An improved CAT anneal system capable of production quantity throughput was developed and is in current use for device processing. (Author).

Gallium Arsenide Mesfet Technology

Gallium Arsenide Mesfet Technology PDF Author: Jerry MacPherson Woodall
Publisher:
ISBN:
Category : Field-effect transistors
Languages : en
Pages : 280

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