Investigation of Metal Oxide Thin Films Fabricated by RF Sputtering System and Their Gas Sensing Applications PDF Download
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Author: 李家緯
Publisher:
ISBN:
Category :
Languages : en
Pages : 77
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Book Description
Author: 李家緯
Publisher:
ISBN:
Category :
Languages : en
Pages : 77
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Book Description
Author: Yonghui Deng
Publisher: Springer Nature
ISBN: 9819926211
Category : Science
Languages : en
Pages : 402
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Book Description
The second edition of this book focuses on the synthesis, design, and application of semiconducting metal oxides as gas sensing materials, including the gas sensing mechanism, and modification methods for sensing materials, while also providing a comprehensive introduction to semiconductor gas sensing devices. As an essential part of IoT (Internet of things), gas sensors have shown great significance and promising prospects. Therefore, studies on functional mesoporous metal oxides, one of the most important gas sensing materials based on their unique Knudsen diffusion behavior and tailored pore structure, have increasingly attracted attention from various disciplines. The book offers a valuable reference guide to metal oxide gas sensing materials for undergraduate and graduate students alike. It will also benefit all researchers who are involved in synthesis and gas sensing of metal oxides nanomaterials with relevant frontier theories and concepts. Engineers working on research and development of semiconductor gas sensors will also find some new ideas for sensor design.
Author: 陳冠吟
Publisher:
ISBN:
Category :
Languages : en
Pages : 98
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Book Description
Author: Raivo Jaaniso
Publisher: Woodhead Publishing
ISBN: 0081025602
Category : Technology & Engineering
Languages : en
Pages : 512
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Book Description
Semiconductor Gas Sensors, Second Edition, summarizes recent research on basic principles, new materials and emerging technologies in this essential field. Chapters cover the foundation of the underlying principles and sensing mechanisms of gas sensors, include expanded content on gas sensing characteristics, such as response, sensitivity and cross-sensitivity, present an overview of the nanomaterials utilized for gas sensing, and review the latest applications for semiconductor gas sensors, including environmental monitoring, indoor monitoring, medical applications, CMOS integration and chemical warfare agents. This second edition has been completely updated, thus ensuring it reflects current literature and the latest materials systems and applications. - Includes an overview of key applications, with new chapters on indoor monitoring and medical applications - Reviews developments in gas sensors and sensing methods, including an expanded section on gas sensor theory - Discusses the use of nanomaterials in gas sensing, with new chapters on single-layer graphene sensors, graphene oxide sensors, printed sensors, and much more
Author: 陳維德
Publisher:
ISBN:
Category :
Languages : en
Pages : 120
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Book Description
Author: Corrado Di Natale
Publisher: World Scientific
ISBN: 9789810248956
Category : Technology & Engineering
Languages : en
Pages : 372
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Book Description
Presents current research and development in the fields of sensors and microsystems.
Author: Yue Hou
Publisher:
ISBN:
Category :
Languages : en
Pages : 173
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Book Description
The increasing concerns of industrial safety, chemical control and environmental pollution are spurring demand for high performance gas sensors. Growing use of gas sensors is making gas sensors on demand. After decades of research and development activities, semiconductor based gas sensors are now used in a variety of applications. However, challenges still remain in the area of sensitivity, selectivity, response and recovery speeds and power consumption. Therefore, improvement of metal oxide gas sensors by the incorporation of different technology is important. In this research, modification of metal oxide semiconductor based gas sensor by impurity doping, laser irradiation, and plasma treatment was investigated. Zinc oxide (ZnO) is an n-type semiconductor with a wide direct band gap (~3.3 eV) and large binding energy (~60 meV). Due to its superior electrical properties and chemical stability, ZnO has been considered one of the most promising materials for gas sensor applications. ZnO thin films have been fabricated by different techniques, such as rf magnetron sputtering, pulsed laser deposition, molecular beam epitaxy, and sol-gel. Sol-gel is a powerful alternative for vacuum deposition. The purpose of this research was to enhance properties and gas sensor performance of nanocrystalline so-gel derived ZnO thin films via surface modification techniques. The effects of process conditions, impurity doping, laser irradiation, laser doping and plasma treatment on properties and gas sensor performance were investigated. The gas sensor performance of ZnO thin films was investigated at different operating temperatures for various reducing and oxidizing gases such as H2, NH3, CH4 and NOx. Al-doped ZnO thin films were prepared using the sol-gel process by changing the Al concentration from 0 to 5.0 at% using two different Zn precursors. It was found that 3.0 at% Al-doped ZnO films had optimum properties such as high electrical conductivity, crystallinity, high sensing response and short response time for ZnO films derived with both Zn precursors. Ga-doped ZnO thin films were also presented by changing the concentration of Ga from 0.1 to 1.0 at%. The gas sensing behavior was investigated at an operating temperature of 130oC. It was found that the 0.3 at% Ga-doped ZnO thin film sensor had more than a 40% higher sensing response and a shorter response time than the sensors made with as-deposited films. Laser irradiation was utilized as a novel heat treatment method in this dissertation. A pulsed laser system with a wavelength of 532 nm was used as the irradiation source. Laser irradiation produced two kinds of Al-doped ZnO films depending on the laser energy level. The impact of laser irradiation was also varied according to the film thickness. The Al-doped ZnO sensors exhibited enhanced sensor performance with optimum laser fluence compared with that of as-deposited sensors. The results suggested that the crystallinity of the Al-doped ZnO thin films was essential to achieve an optimum gas detection capability. A laser doping process using a pre-deposited Al precursor layer for ZnO thin films was also investigated. Plasma treatment was utilized in the research with the intention to adjust the number of intrinsic defects in ZnO films. Both O2 and H2 plasmas were carried out with the treatment time varying from 3 to 15 min. The gas sensor performance was investigated for NH3 and NOx at various concentrations. An improvement of more than 50% in sensing response was observed with the optimum treatment time for NH3 detection. The impact of H2 plasma treatment of ZnO sensors on its gas sensor performance was also studied. The selectivity was studied for a likelihood mixture of reducing gases. The results indicated that ZnO sensors had a low detection limit towards NH3. It was found that the selectivity of these reducing gases was in the order of NH3> H2> CH4. However, unless high concentration of NH3 exposure is a factor, ZnO sensors are selective respond to H2. Furthermore, the ZnO sensors are also capable of discriminating different gases such as NH3, H2, CH4 and NOx. This research involves different techniques, which have been employed on the ZnO thin film based gas sensors in order to enhance the gas sensing characteristics such as sensing response and response time. As expected, the ZnO sensors exhibited high response, short response time and decent selectivity toward target gases with optimum treatment conditions. The results also suggested that the ZnO sensors were capable of detecting ppm level gases at relatively low operating temperature range (100 ~ 200oC), which is beneficial in many applications. Therefore, these techniques can be utilized to manufacture gas sensors using metal oxide semiconductors.
Author: Satishchandra B. Ogale
Publisher: Springer Science & Business Media
ISBN: 9780387258027
Category : Technology & Engineering
Languages : en
Pages : 440
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Book Description
Oxides form a broad subject area of research and technology development which encompasses different disciplines such as materials science, solid state chemistry, physics etc. The aim of this book is to demonstrate the interplay of these fields and to provide an introduction to the techniques and methodologies involving film growth, characterization and device processing. The literature in this field is thus fairly scattered in different research journals covering one or the other aspect of the specific activity. This situation calls for a book that will consolidate this information and thus enable a beginner as well as an expert to get an overall perspective of the field, its foundations, and its projected progress.
Author: Arnaldo D'amico
Publisher: World Scientific
ISBN: 9814488976
Category : Science
Languages : en
Pages : 365
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Book Description
This volume presents current research and development in the fields of sensors and microsystems. Many aspects of disciplines related to sensors and microsystems are covered, ranging from materials science to complete applications and multifunctional systems. The variety of the topics and the quality of the papers offer readers an insight into the research status in Italy. The book contains selected contributions from 37 institutions in Italy — both academic institutions and public/private research institutions.
Author: Gianfranco Pacchioni
Publisher: John Wiley & Sons
ISBN: 3527640185
Category : Technology & Engineering
Languages : en
Pages : 526
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Book Description
A wealth of information in one accessible book. Written by international experts from multidisciplinary fields, this in-depth exploration of oxide ultrathin films covers all aspects of these systems, starting with preparation and characterization, and going on to geometrical and electronic structure, as well as applications in current and future systems and devices. From the Contents: Synthesis and Preparation of Oxide Ultrathin Films Characterization Tools of Oxide Ultrathin Films Ordered Oxide Nanostructures on Metal Surfaces Unusual Properties of Oxides and Other Insulators in the Ultrathin Limit Silica and High-K Dielectrics Thin Films in Microelectronics Oxide Passive Films and Corrosion Protection Oxide Films as Catalytic Materials and as Models of Real Catalysts Oxide Films in Spintronics Oxide Ultrathin Films in Solid Oxide Fuel Cells Transparent Conducting and Chromogenic Oxide Films as Solar Energy Materials Oxide Ultrathin Films in Sensor Applications Ferroelectricity in Ultrathin Film Capacitors Titania Thin Films in Biocompatible Materials and Medical Implants Oxide Nanowires for New Chemical Sensor Devices
