Growth of Metal-nitride Thin Films by Pulsed Laser Deposition PDF Download
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Author: Ian Laurence Farrell
Publisher:
ISBN:
Category : Thin films
Languages : en
Pages : 274
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Book Description
Author: Ian Laurence Farrell
Publisher:
ISBN:
Category : Thin films
Languages : en
Pages : 274
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Book Description
Author: Robert Eason
Publisher: John Wiley & Sons
ISBN: 0470052112
Category : Science
Languages : en
Pages : 754
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Book Description
Edited by major contributors to the field, this text summarizes current or newly emerging pulsed laser deposition application areas. It spans the field of optical devices, electronic materials, sensors and actuators, biomaterials, and organic polymers. Every scientist, technologist and development engineer who has a need to grow and pattern, to apply and use thin film materials will regard this book as a must-have resource.
Author:
Publisher:
ISBN:
Category :
Languages : en
Pages : 55
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Book Description
Author: Loukas Koutsokeras
Publisher:
ISBN:
Category :
Languages : en
Pages : 173
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Book Description
Ternary nitride samples of transition metals were grown by three different deposition techniques; Pulsed Laser Deposition (PLD), Magnetron Sputtering (MS) and Dual Ion Beam Sputtering (DIBS). These samples were characterized structurally and optically by X-ray diffraction (XRD) and Optical Reflectance Spectroscopy (ORS) respectively. Compositional measurements have also been performed by Auger Electron Spectroscopy (AES) and Energy Dispersive X-rays (EDX). Stress measurements were performed using wafer curvature and X-ray diffraction techniques. Structure analysis has reveals that all grown samples were stabilized in the rocksalt structure and the lattice constant size follows the vegard's rule. The optical properties of the films were similar to conductors, excibiting strong Drude behavior. Stress measurements analysis revealed that the films are under compressive stress and the stress state is depending on energetic conditions.
Author: Armando Luches
Publisher: Nova Science Publishers
ISBN: 9781611224207
Category : Boron nitride
Languages : en
Pages : 0
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Book Description
Pulsed laser deposition (PLD) is at present one of the most interesting technique for thin film deposition. In the PLD process a film is formed by ablating a solid target with energetic laser pulses and collecting the material of interest on a substrate placed a few cm from the target. According to its ability to carry the stoichiometry from the target to the substrate and to its relatively high growth rate (~0.1 nm/pulse), PLD is an attractive technique for compound thin film deposition. This technique offers the possibility of depositing thin films on room-temperature or low-temperature substrates, due to the high energy of the species forming the laser plasma plume expanding from the target to the substrate. This book reviews research on the depositon of c-BN films by using PLD, ion-assisted PLD and other laser-assisted procedures.
Author: Pascal Chabert
Publisher: Cambridge University Press
ISBN: 9780521763004
Category : Science
Languages : en
Pages : 392
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Book Description
Low-temperature radio frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on physics, this book will interest graduate students and researchers in applied physics and electrical engineering. The book incorporates a cutting-edge perspective on RF plasmas. It also covers basic plasma physics including transport in bounded plasmas and electrical diagnostics. Its pedagogic style engages readers, helping them to develop physical arguments and mathematical analyses. Worked examples apply the theories covered to realistic scenarios, and over 100 in-text questions let readers put their newly acquired knowledge to use and gain confidence in applying physics to real laboratory situations.
Author: Xiangqun Xu
Publisher:
ISBN:
Category :
Languages : en
Pages : 110
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Book Description
Author: Jian Shen
Publisher:
ISBN:
Category :
Languages : en
Pages : 56
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Book Description
Author: Torbjörn Joelsson
Publisher:
ISBN: 9789173736916
Category :
Languages : en
Pages : 36
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Book Description
Author: H. A. Atwater
Publisher:
ISBN:
Category : Science
Languages : en
Pages : 472
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Book Description
With over 16 countries represented, this book represents international developments in the field of film synthesis and growth using energetic beams. It focuses on pulsed-laser deposition. Fundamental issues pertaining to the generation of laser ablation plumes, temperature distributions and collisional effects are described. Ion-assisted pulsed-laser deposition, pulsed-ion deposition, applications of hyperthermal beams and aspects of surface dynamics are discussed. The inclusion of an ion beam with the ablation process leads to some unique modifications in the thin-film growth mechanisms, and hence, film properties. Likewise, the collision of high-mass metal cluster ions with substrates shows promise for growth of novel structures. Also featured are new developments of optoelectronic materials, nitrides and carbon films using a variety of techniques. The effects of beam-induced defects on growth and surface morphology, chemical effects during growth, and characterization of film growth and film properties are addressed.
