Growth and Characterization of Nanocrystalline Diamond Films for Microelectronics and Microelectromechanical Systems PDF Download
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Author: Sathyaharish Jeedigunta
Publisher:
ISBN:
Category :
Languages : en
Pages :
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ABSTRACT: Diamond is widely known for its extraordinary properties, such as high thermal conductivity, energy bandgap and high material hardness and durability making it a very attractive material for microelectronic and mechanical applications. Synthetic diamonds produced by chemical vapor deposition (CVD) methods retain most of the properties of natural diamond. Within this class of material, nanocrystalline diamond (NCD) is being developed for microelectronic and microelectromechanical systems (MEMS) applications. During this research, intrinsic and doped NCD films were grown by the microwave plasma enhanced chemical vapor deposition (MPECVD) method using CH4/Ar/H2 gas mixture and CH4/Ar/N2 gas chemistries respectively. The first part of research focused on the growth and characterization of NCD films while the second part on the application of NCD as a structural material in MEMS device fabrication.
Author: Sathyaharish Jeedigunta
Publisher:
ISBN:
Category :
Languages : en
Pages :
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Book Description
ABSTRACT: Diamond is widely known for its extraordinary properties, such as high thermal conductivity, energy bandgap and high material hardness and durability making it a very attractive material for microelectronic and mechanical applications. Synthetic diamonds produced by chemical vapor deposition (CVD) methods retain most of the properties of natural diamond. Within this class of material, nanocrystalline diamond (NCD) is being developed for microelectronic and microelectromechanical systems (MEMS) applications. During this research, intrinsic and doped NCD films were grown by the microwave plasma enhanced chemical vapor deposition (MPECVD) method using CH4/Ar/H2 gas mixture and CH4/Ar/N2 gas chemistries respectively. The first part of research focused on the growth and characterization of NCD films while the second part on the application of NCD as a structural material in MEMS device fabrication.
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Category : Diamond thin films
Languages : en
Pages :
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Author: Sam Zhang
Publisher: CRC Press
ISBN: 1420042955
Category : Science
Languages : en
Pages : 344
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Book Description
Experts must be able to analyze and distinguish all materials, or combinations of materials, in use today-whether they be metals, ceramics, polymers, semiconductors, or composites. To understand a material's structure, how that structure determines its properties, and how that material will subsequently work in technological applications, researche
Author: Nicolas Wöhrl
Publisher:
ISBN:
Category :
Languages : en
Pages : 175
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Author: Olga A. Shenderova
Publisher: William Andrew
ISBN: 1437734650
Category : Science
Languages : en
Pages : 582
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Book Description
Ultrananocrystalline Diamond: Synthesis, Properties, and Applications is a unique practical reference handbook. Written by the leading experts worldwide it introduces the science of UNCD for both the R&D community and applications developers using UNCD in a diverse range of applications from macro to nanodevices, such as energy-saving ultra-low friction and wear coatings for mechanical pump seals and tools, high-performance MEMS/NEMS-based systems (e.g. in telecommunications), the next generation of high-definition flat panel displays, in-vivo biomedical implants, and biosensors. This work brings together the basic science of nanoscale diamond structures, with detailed information on ultra-nanodiamond synthesis, properties, and applications. The book offers discussion on UNCD in its two forms, as a powder and as a chemical vapor deposited film. Also discussed are the superior mechanical, tribological, transport, electrochemical, and electron emission properties of UNCD for a wide range of applications including MEMS/ NEMS, surface acoustic wave (SAW) devices, electrochemical sensors, coatings for field emission arrays, photonic and RF switching, biosensors, and neural prostheses, etc. Ultrananocrystalline Diamond summarises the most recent developments in the nanodiamond field, and presents them in a way that will be useful to the R&D community in both academic and corporate sectors. Coverage of both nanodiamond particles and films make this a valuable resource for both the nanotechnology community and the field of thin films / vacuum deposition. Written by the world's leading experts in nanodiamond, this second edition builds on its predecessor's reputation as the most up-to-date resource in the field.
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Languages : en
Pages :
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Nanocrystalline diamond thin films exhibit unusual hardness, wear resistance, and corrosion resistance properties, and are currently being considered for use in orthopaedic, ophthalmic, and other medical implants. The purpose of this study was to evaluate the hardness, Young's modulus, microscratch adhesion, and antimicrobial properties of nanocrystalline diamond thin films. Microwave plasma enhanced chemical vapor deposition (MPCVD) was used to deposit nanocrystalline diamond thin films on p-type silicon wafers. Raman spectroscopy, scanning electron microscopy (SEM), and high resolution transmission electron microscopy (HRTEM) were used to determine quality and phase purity of the nanocrystalline diamond thin films. The thin films consisted of diamond nodules that varied in morphology (size=60-600 nm). HRTEM showed that the films contained rectangular crystallites with dimensions between 2 -- 4 nm. Raman spectroscopy confirmed that the thin film sample contained both tetrahedrally-bonded and amorphous carbon phases. The hardness and Young's modulus values for the nanocrystalline diamond thin films were 29.4 " 11.9 GPa to 72.0 " 10.7 GPa and 346.4 " 98 GPa to 551.8 " 71.5 GPa, respectively. Microscratch adhesion testing was performed on the nanocrystalline diamond films to examine the functional adhesion strength between the diamond films and the silicon substrates. The nanocrystalline diamond/silicon wafer systems demonstrated very good film adhesion (LCN H"3.1 -- 3.4 N). A CDC biofilm reactor was utilized to incubate and grow Pseudomonas fluorescens on the surfaces of the nanocrystalline diamond thin films and stainless steel coupons. Quantitative data showed that bacterial attachment on the nanocrystalline diamond thin films was quite significant and comparable to that on stainless steel surfaces. This work suggests that nanocrystalline diamond thin films are good candidate materials for biomedical implants but are susceptible.
Author: Hari Singh Nalwa
Publisher: Elsevier
ISBN: 0080533248
Category : Technology & Engineering
Languages : en
Pages : 3451
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Book Description
This five-volume handbook focuses on processing techniques, characterization methods, and physical properties of thin films (thin layers of insulating, conducting, or semiconductor material). The editor has composed five separate, thematic volumes on thin films of metals, semimetals, glasses, ceramics, alloys, organics, diamonds, graphites, porous materials, noncrystalline solids, supramolecules, polymers, copolymers, biopolymers, composites, blends, activated carbons, intermetallics, chalcogenides, dyes, pigments, nanostructured materials, biomaterials, inorganic/polymer composites, organoceramics, metallocenes, disordered systems, liquid crystals, quasicrystals, and layered structures. Thin films is a field of the utmost importance in today's materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices. Advanced, high-performance computers, high-definition TV, digital camcorders, sensitive broadband imaging systems, flat-panel displays, robotic systems, and medical electronics and diagnostics are but a few examples of miniaturized device technologies that depend the utilization of thin film materials. The Handbook of Thin Films Materials is a comprehensive reference focusing on processing techniques, characterization methods, and physical properties of these thin film materials.
Author: Sattar Mirzakuchaki
Publisher:
ISBN:
Category : Diamond thin films
Languages : en
Pages : 272
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Book Description
Chemical vapor deposited (CVD) diamond thin films grown homoepitaxially as well as on non-diamond substrates have been the subject of intense investigation since the beginning of the last decade. Diamond's remarkable properties such as physical hardness, chemical inertness, high thermal conductivity, high breakdown voltage, and high carrier mobility are the main factors for the attention it has received from many researchers around the world. Although these properties are somewhat degraded in polycrystalline diamond films, they are still superior to many other materials. One of the most potentially useful applications of diamond thin films is in the semiconductor industry. Although a few prototype devices such as field effect transistors and Schottky diodes have been fabricated on diamond, some major obstacles remain to be overcome before full scale commercial applications of diamond as a semiconductor is possible. The high cost of large area monocrystalline diamond substrates has forced researchers to look for alternative substrates for the heteroepitaxial growth of diamond. So far only marginal results have been reported on the growth of highly oriented diamond films and on the heteroepitaxial growth involving substrates that are as costly as diamond. Silicon, as the dominant material in semiconductor industry, has been the subject of much research as a substrate for the growth of polycrystalline diamond. Another problem in development of diamond as a semiconductor is the effective doping of diamond, particularly for n-type conductivity. Although many researchers have studied boron-doped (p-type) diamond thin films in the past several years, there have been few reports on the effects of doping diamond films with phosphorous (n-type). Once these two issues have been solved, other fabrication steps such as oxidation, etching, masking, etc. may be attempted. The present work is a study directed toward solving some of these problems by looking at in-situ doping of n-type hot filament CVD (HFCVD) grown diamond films on silicon substrates. The study includes electrical characterization, stable metallic contacts, effect of silicon substrate surface pretreatment, and selective area deposition. A number of different techniques for inducing diamond nucleation on Si substrates are studied and the resulting diamond films characterized by common techniques such as Raman spectroscopy, X-ray diffraction, optical and scanning electron microscopy, and profilometery. The effect of doping the diamond films with different concentrations of phosphorous as well as calculation of the activation energy by temperature measurement was also carried out in this work. A new technique is presented for the selective deposition of diamond films onto silicon substrates.
Author: Jamal Sana Lewis
Publisher:
ISBN:
Category :
Languages : en
Pages : 69
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Book Description
Keywords: biomedical coatings, antibacterial, nanocrystalline diamond, mechanical properties.
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Author: Venkata Satya Siva Srikanth Vadali
Publisher:
ISBN: 9783832275112
Category :
Languages : en
Pages : 157
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