International Conference on Frontiers of Characterization and Metrology for Nanoelectronics 2017 PDF Download
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Author: E. M. Secula
Publisher:
ISBN: 9781510839113
Category :
Languages : en
Pages :
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Author: E. M. Secula
Publisher:
ISBN: 9781510839113
Category :
Languages : en
Pages :
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Book Description
Author: David G. Seiler
Publisher: American Institute of Physics
ISBN: 9780735407121
Category : Technology & Engineering
Languages : en
Pages : 0
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Book Description
As the semiconductor industry continues to move toward silicon nanoelectronics and beyond, the introduction of new materials, innovative processing and assembly, and novel devices brings formidable metrology challenges. We have entered an era where nanotechnology is required to meet the demand for smaller, faster, cheaper, and more complex functional chips. Innovative metrology and characterization methods have become critical. This book emphasizes the frontiers of innovation in the characterization and metrology needed to advance nanoelectronics. It comprises applications in nanoelectronic materials and devices, research and development, and manufacturing and diagnostics. Novel characterization methods for beyond CMOS and extreme CMOS devices are addressed, as well as electrical measurements, interconnects, patterning, microscopy, and modeling. The Editors believe that this book of collected papers from world-class leaders provides a basis and effective portrayal of the industry’s characterization and metrology needs and how they are being addressed by industry, academia, and government to continue the dramatic progress in semiconductors into the nanoelectronic regime. It also provides a foundation for stimulating further advances in metrology and new ideas for research and development.
Author: E. M. Secula
Publisher:
ISBN:
Category :
Languages : en
Pages :
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Book Description
Author: International Conference on Characterization and Metrology for ULSI Technology (5, 2005, Richardson, Tex.)
Publisher:
ISBN:
Category :
Languages : en
Pages : 141
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Author: David G. Seiler
Publisher: American Inst. of Physics
ISBN: 9780735404410
Category : Science
Languages : en
Pages : 0
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Book Description
This book contains peer-reviewed papers presented at the 2007 International Conference on Frontiers of Characterization and Metrology. It emphasizes the frontiers of innovation in the characterization and metrology needed to advance nanoelectronics. It provides an effective portrayal of the industry’s characterization and metrology needs and how they are being addressed. It also offers a foundation for further advances in metrology and new ideas for research and development.
Author: Zhiyong Ma
Publisher: CRC Press
ISBN: 135173394X
Category : Science
Languages : en
Pages : 843
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Book Description
Nanoelectronics is changing the way the world communicates, and is transforming our daily lives. Continuing Moore’s law and miniaturization of low-power semiconductor chips with ever-increasing functionality have been relentlessly driving R&D of new devices, materials, and process capabilities to meet performance, power, and cost requirements. This book covers up-to-date advances in research and industry practices in nanometrology, critical for continuing technology scaling and product innovation. It holistically approaches the subject matter and addresses emerging and important topics in semiconductor R&D and manufacturing. It is a complete guide for metrology and diagnostic techniques essential for process technology, electronics packaging, and product development and debugging—a unique approach compared to other books. The authors are from academia, government labs, and industry and have vast experience and expertise in the topics presented. The book is intended for all those involved in IC manufacturing and nanoelectronics and for those studying nanoelectronics process and assembly technologies or working in device testing, characterization, and diagnostic techniques.
Author: National Institute of Standards and Technology (U.S.)
Publisher:
ISBN:
Category : Semiconductors
Languages : en
Pages : 152
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Author:
Publisher:
ISBN:
Category :
Languages : en
Pages :
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Author: D. G. Seiler
Publisher: Springer
ISBN: 9780735409651
Category : Nanoelectronics
Languages : en
Pages : 377
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Book Description
Author: National Semiconductor Metrology Program (U.S.)
Publisher:
ISBN:
Category : Semiconductors
Languages : en
Pages : 148
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Book Description
