Fabrication, Metrology and Modeling of Protective Coatings on Metallic MEMS Components PDF Download
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Author:
Publisher:
ISBN:
Category :
Languages : en
Pages : 21
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Book Description
The original motivation for this work was to develop coating for metallic MEMS components to improve their performance and reliability. During a review of refractory oxides a report came to our attention that indium tin oxide (ITO), well known as the most widely used transparent conductor, is also piezoresistive. Thus, in principle, coating of ITO either alone or in combination with other thin films might be both protective and electrically functional.
Author:
Publisher:
ISBN:
Category :
Languages : en
Pages : 21
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Book Description
The original motivation for this work was to develop coating for metallic MEMS components to improve their performance and reliability. During a review of refractory oxides a report came to our attention that indium tin oxide (ITO), well known as the most widely used transparent conductor, is also piezoresistive. Thus, in principle, coating of ITO either alone or in combination with other thin films might be both protective and electrically functional.
Author: Alicia Esther Ares
Publisher: MDPI
ISBN: 3038429791
Category : Science
Languages : en
Pages : 141
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Book Description
This book is a printed edition of the Special Issue "Manufacturing and Surface Engineering" that was published in Coatings
Author: Shekhar Bhansali
Publisher: Elsevier
ISBN: 0857096273
Category : Technology & Engineering
Languages : en
Pages : 511
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Book Description
The application of Micro Electro Mechanical Systems (MEMS) in the biomedical field is leading to a new generation of medical devices. MEMS for biomedical applications reviews the wealth of recent research on fabrication technologies and applications of this exciting technology.The book is divided into four parts: Part one introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms. Part two describes applications of MEMS for biomedical sensing and diagnostic applications. MEMS for in vivo sensing and electrical impedance spectroscopy are investigated, along with ultrasonic transducers, and lab-on-chip devices. MEMS for tissue engineering and clinical applications are the focus of part three, which considers cell culture and tissue scaffolding devices, BioMEMS for drug delivery and minimally invasive medical procedures. Finally, part four reviews emerging biomedical applications of MEMS, from implantable neuroprobes and ocular implants to cellular microinjection and hybrid MEMS.With its distinguished editors and international team of expert contributors, MEMS for biomedical applications provides an authoritative review for scientists and manufacturers involved in the design and development of medical devices as well as clinicians using this important technology. - Reviews the wealth of recent research on fabrication technologies and applications of Micro Electro Mechanical Systems (MEMS) in the biomedical field - Introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms - Considers MEMS for biomedical sensing and diagnostic applications, along with MEMS for in vivo sensing and electrical impedance spectroscopy
Author: Nicolae Lobontiu
Publisher: Springer Science & Business Media
ISBN: 0387230378
Category : Technology & Engineering
Languages : en
Pages : 415
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Book Description
This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer’s viewpoint as devices that transform an input form of energy, such as thermal, electrostatic, electromagnetic or optical, into output mechanical motion (in the case of actuation) or that can operate with the reversed functionality (as in sensors) and convert an external stimulus, such as mechanical motion, into (generally) electric energy. The impetus of this proposal stems from the perception that such an approach might contribute to a more solid understanding of the principles governing the mechanics of MEMS, and would hopefully enhance the efficiency of modeling and designing reliable and desirably-optimized microsystems. The work represents an attempt at both extending and deepening the mechanical-based approach to MEMS in the static domain by providing simple, yet reliable tools that are applicable to micromechanism design through current fabrication technologies. Lumped-parameter stiffness and compliance properties of flexible components are derived both analytically (as closed-form solutions) and as simplified (engineering) formulas. Also studied are the principal means of actuation/sensing and their integration into the overall microsystem. Various examples of MEMS are studied in order to better illustrate the presentation of the different modeling principles and algorithms. Through its objective, approach and scope, this book offers a novel and systematic insight into the MEMS domain and complements existing work in the literature addressing part of the material developed herein.
Author: Marc J. Madou
Publisher: CRC Press
ISBN: 1420055194
Category : Technology & Engineering
Languages : en
Pages : 672
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Book Description
Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.
Author: Dan Cuffaro
Publisher:
ISBN: 1592538479
Category : Design
Languages : en
Pages : 275
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Book Description
To make designs that work and endure (and are also legal), designers need to know—or be able to find—an endless number of details. Whether it's what kind of glue needs to be used on a certain surface, metric equivalents, thread sizes, or how to apply for a patent, these details are essential and must be readily available so designers can create successful products efficiently. The Industrial Design Reference & Specification Book provides designers with a comprehensive handbook they can turn to over and over again. These pages are filled with information that is essential to successful product design, including information on measurement conversions, trademark and copyright standards, patents and product-related intellectual property rights/standards, setting up files for prototyping and production runs, and manufacturing and packaging options to optimize the design. It is an essential resource for any industrial or product designer.
Author: Xiujun James Li
Publisher: Woodhead Publishing
ISBN: 9780857096975
Category : Technology & Engineering
Languages : en
Pages : 0
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Book Description
Microfluidics or lab-on-a-chip (LOC) is an important technology suitable for numerous applications from drug delivery to tissue engineering. Microfluidic devices for biomedical applications discusses the fundamentals of microfluidics and explores in detail a wide range of medical applications. The first part of the book reviews the fundamentals of microfluidic technologies for biomedical applications with chapters focussing on the materials and methods for microfabrication, microfluidic actuation mechanisms and digital microfluidic technologies. Chapters in part two examine applications in drug discovery and controlled-delivery including micro needles. Part three considers applications of microfluidic devices in cellular analysis and manipulation, tissue engineering and their role in developing tissue scaffolds and stem cell engineering. The final part of the book covers the applications of microfluidic devices in diagnostic sensing, including genetic analysis, low-cost bioassays, viral detection, and radio chemical synthesis. Microfluidic devices for biomedical applications is an essential reference for medical device manufacturers, scientists and researchers concerned with microfluidics in the field of biomedical applications and life-science industries.
Author: Stephen Beeby
Publisher: Artech House
ISBN: 1580535364
Category : Technology & Engineering
Languages : en
Pages : 282
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Book Description
Here's the book to keep handy when you have to overcome obstacles in design, simulation, fabrication and application of MEMS sensors. This practical guide to design tools and packaging helps you create the sensors you need for the full range of mechanical microsensor applications. Critical physical sensing techniques covered include piezoresistive, piezoelectric, capacative, optical, resonant, actuation, thermal, and magnetic, as well as smart sensing.
Author: Reza Ghodssi
Publisher: Springer Science & Business Media
ISBN: 0387473181
Category : Technology & Engineering
Languages : en
Pages : 1211
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Book Description
MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.
Author:
Publisher:
ISBN:
Category : Dissertations, Academic
Languages : en
Pages : 398
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Book Description
