Experimental Investigations on Scalability of Inductively Coupled-plasma Sources and an Improved Model for Characterization of ICP Sources PDF Download
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Author: Lakshmi Jyothi Pratti
Publisher:
ISBN:
Category : Inductively coupled plasma spectrometry
Languages : en
Pages : 302
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Book Description
Author: Lakshmi Jyothi Pratti
Publisher:
ISBN:
Category : Inductively coupled plasma spectrometry
Languages : en
Pages : 302
Get Book Here
Book Description
Author:
Publisher:
ISBN:
Category :
Languages : en
Pages : 10
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Book Description
We describe initial experiments with a large (30 in.) plasma source chamber to explore the problems associated with large-area Inductively coupled plasma (ICP) sources to produce high density plasmas useful for processing 400 mm semiconductor wafers. Our experiments typically use a 25 in. diameter planar ICP coil driven at 13.56 MHz. Plasma and system data are taken in Ar and N2 over the pressure range 3--50 mtorr. R.F. Inductive power was run up to 2000W, but typically data were taken over the range 100--1000W. Diagnostics Include optical emission spectroscopy, Langmuir probes, and B-dot probes as well as electrical circuit measurements. The B-dot and E-M measurements are compared with models based on commercial E-M codes. Initial indications are that uniform plasmas suitable for 400 mm processing are attainable. We present a comparison between computer modeling and experimental results for this source. Computer simulations using the fluid code INDUCT94 are used to explain variations In the plasma density profile measurements as a function of Inductive power, gas pressure and gas composition. Both Argon and Nitrogen discharges are modeled. INDUCT94 solves the 2D time-dependent fluid equations for electrons, ions and neutrals Including effects of both Inductive and capacitive coupling. Detailed volume and surface chemistry reactions are treated. We discuss the effects of pressure and power on plasma uniformity.
Author: Zeev B. Alfassi
Publisher: Wiley-VCH
ISBN:
Category : Science
Languages : en
Pages : 632
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Book Description
Determination of Trace Elements Edited by Zeev B. Alfassi The best way to determine trace elements! This easy-to-use handbook guides the reader through the maze of all modern analytical operations. Each method is described by an expert in the field. The book highlights the advantages and disadvantages of individual techniques and enables pharmacologists, environmentalists, material scientists, and food industry to select a judicious procedure for their trace element analysis.
Author: R. N. Savage
Publisher:
ISBN:
Category :
Languages : en
Pages : 34
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Book Description
A miniature inductively coupled plasma source for atomic emission spectrometry is described and a preliminary evaluation of its analytical capabilities is presented. The mini-ICP is very economical to sustain and works well with less than 1 kW of RF power and 8L/min of argon coolant gas. In addition, the new source possesses some unique operating characteristics which simplify sample introduction. In this paper, detection limits, multi-element capabilities, and other analytical features of the mini-ICP are compared with those demonstrated by a conventional ICP source and shown to be comparable. In addition, the two plasmas are shown to exhibit similar excitation temperatures in the respective analyte observation regions (i.e., plasma tail flames). These results suggest that the mini-ICP possesses the same desirable atomization and excitation characteristics as conventional ICP sources. (Author).
Author:
Publisher:
ISBN:
Category :
Languages : en
Pages : 6
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Book Description
We describe initial experiments with a large (76-cm diameter) plasma source chamber to explore the problems associated with large-area inductively coupled plasma (ICP) sources to produce high density plasmas useful for processing 400-mm semiconductor wafers. Our experiments typically use a 640-nun diameter planar ICP coil driven at 13.56 MHz. Plasma and system data are taken in Ar and N2 over the pressure range 3-50 mtorr. RF inductive power was run up to 2000W, but typically data were taken over the range 100-1000W. Diagnostics include optical emission spectroscopy, Langmuir probes, and B-dot probes as well as electrical circuit measurements. The B-dot and E-M measurements are compared with models based on commercial E-M codes. Initial indications are that uniform plasmas suitable for 400-mm processing are attainable.
Author:
Publisher:
ISBN:
Category :
Languages : en
Pages :
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Book Description
Author: José-Luis Todoli
Publisher: Elsevier
ISBN: 0080932274
Category : Science
Languages : en
Pages : 301
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Book Description
Inductively coupled plasma atomic or mass spectrometry is one of the most common techniques for elemental analysis. Samples to be analyzed are usually in the form of solutions and need to be introduced into the plasma by means of a sample introduction system, so as to obtain a mist of very fine droplets. Because the sample introduction system can be a limiting factor in the analytical performance, it is crucial to optimize its design and its use. It is the purpose of this book to provide fundamental knowledge along with practical instructions to obtain the best out of the technique. - Fundamental as well as practical character - Troubleshooting section - Flow charts with optimum systems to be used for a given application
Author: Akbar Montaser
Publisher: John Wiley & Sons
ISBN: 0471188115
Category : Science
Languages : en
Pages : 1044
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Book Description
The broadest source of information on analytical ICP spectrometry available in a coherent, single volume. Renowned contributors define theory, diagnostics, models, instrumentation and applications. They also discuss atomic emission, atomic fluorescence and mass spectrometries based on ICP sources for atomization, excitation and ionization. 'This book is HIGHLY RECOMMENDED.' Analytical Chemistry '... a handy reference for anyone attempting to understand the theory of ICPs and how they work. The detailed discussions of the various types of instrumentation and methods will be quite helpful to students and researchers in the field who want to broaden their understanding of analytical atomic spectroscopy.' Applied Spectroscopy '...Everyone involved in elemental analysis using ICP should have this book. It is useful for both experienced and novice ICP spectroscopists.' Spectroscopy
Author: Cheng-Che Hsu
Publisher:
ISBN:
Category :
Languages : en
Pages : 502
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Book Description
Author: Diane Beauchemin
Publisher: Newnes
ISBN: 0444594833
Category : Science
Languages : en
Pages : 588
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Book Description
Sample Introduction Systems in ICPMS and ICPOES provides an in-depth analysis of sample introduction strategies, including flow injection analysis and less common techniques, such as arc/spark ablation and direct sample insertion. The book critically evaluates what has been accomplished so far, along with what can be done to extend the capabilities of the technique for analyses of any type of sample, such as aqueous, gaseous or solid. The latest progress made in fields, such as FIA, ETV, LC-ICP-MS and CE-ICP-MS is included and critically discussed. The book addresses problems related to the optimization of the system, peak dispersion and calibration and automatization. - Provides contributions from recognized experts that give credibility to each chapter as a reference source - Presents a single source, providing the big picture for ICPMS and ICPOES - Covers theory, methods, selected applications and discrete sampling techniques - Includes access to core data for practical work, comparison of results and decision-making
