Author: Michael Köhler
Publisher: John Wiley & Sons
ISBN: 352761379X
Category : Science
Languages : en
Pages : 384
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Book Description
Microcomponents and microdevices are increasingly finding application in everyday life. The specific functions of all modern microdevices depend strongly on the selection and combination of the materials used in their construction, i.e., the chemical and physical solid-state properties of these materials, and their treatment. The precise patterning of various materials, which is normally performed by lithographic etching processes, is a prerequisite for the fabrication of microdevices. The microtechnical etching of functional patterns is a multidisciplinary area, the basis for the etching processes coming from chemistry, physics, and engineering. The book is divided into two sections: the wet and dry etching processes are presented in the first, general, section, which provides the scientific fundamentals, while a catalog of etching bath composition, etching instructions, and parameters can be found in the second section. This section will enhance the comprehension of the general section and also give an overview of data that are essential in practice.
Author: Jan A. Dziuban
Publisher: Springer Science & Business Media
ISBN: 1402045891
Category : Science
Languages : en
Pages : 345
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Book Description
This is the first compendium on silicon/glass microsystems made by deep wet etching and the first book with a detailed description of bonding techniques used in microsystem technology. Technological results presented in the book have been tested experimentally by the author and his team, and can be utilized in day-to-day laboratory practice. Special attention has been paid to the highest level of accessibility of the book by students.
Author: Wolfgang Menz
Publisher: John Wiley & Sons
ISBN: 3527613013
Category : Technology & Engineering
Languages : en
Pages : 512
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Book Description
This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.
Author: Hans-Peter Saluz
Publisher: Birkhäuser
ISBN: 3034888171
Category : Science
Languages : en
Pages : 592
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Book Description
Biomolecular studies are the trial of Man to understand how Nature manages information at the molecular level. The understanding of molecular informa tion handling in nature is essential for the molecular optimization in chem istry, molecular biology, molecular pharmacology and therefore - as an ex ample - for the development of specifically acting drugs. The famous recent method of technical information management is digital electronics. Over the past few years, evidence has arisen that computerized and molecular information managements have many similar and overlapping aspects. For example, both technology and nature use digitized information and both use small structures for the efficient handling of information. Furthermore, they optimize their processes in order to gain a maximum of information with a minimum of invested energy. During the last two decades, novel experimental techniques in biomolec ular sciences have paved the way for artificial biomolecular optimization. In the same time interval, the progress of micro system technology has been extended from the field of digital electronics and sensing to micro liquid hand ling, and the field of chip-supported substance handling began. It appears that the "marriage" of physical micro technology and molecular processing will be consummated soon. The contact of both fields has been realized in for ex ample DNA chips. Such connections will also become relevant in additional fields in the near future. Biomolecular investigations are the first to profit from these fast growing scientific and technical connections between micro systems and molecular sciences.
Author: Stephen D. Senturia
Publisher: Springer Science & Business Media
ISBN: 0306476010
Category : Technology & Engineering
Languages : en
Pages : 699
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Book Description
It is a real pleasure to write the Foreword for this book, both because I have known and respected its author for many years and because I expect this book’s publication will mark an important milestone in the continuing worldwide development of microsystems. By bringing together all aspects of microsystem design, it can be expected to facilitate the training of not only a new generation of engineers, but perhaps a whole new type of engineer – one capable of addressing the complex range of problems involved in reducing entire systems to the micro- and nano-domains. This book breaks down disciplinary barriers to set the stage for systems we do not even dream of today. Microsystems have a long history, dating back to the earliest days of mic- electronics. While integrated circuits developed in the early 1960s, a number of laboratories worked to use the same technology base to form integrated sensors. The idea was to reduce cost and perhaps put the sensors and circuits together on the same chip. By the late-60s, integrated MOS-photodiode arrays had been developed for visible imaging, and silicon etching was being used to create thin diaphragms that could convert pressure into an electrical signal. By 1970, selective anisotropic etching was being used for diaphragm formation, retaining a thick silicon rim to absorb package-induced stresses. Impurity- and electrochemically-based etch-stops soon emerged, and "bulk micromachining" came into its own.
Author: Gerald Gerlach
Publisher: John Wiley & Sons
ISBN: 0470770929
Category : Technology & Engineering
Languages : en
Pages : 376
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Book Description
Over half a century after the discovery of the piezoresistive effect, microsystem technology has experienced considerable developments. Expanding the opportunities of microelectronics to non-electronic systems, its number of application fields continues to increase. Microsensors are one of the most important fields, used in medical applications and micromechanics. Microfluidic systems are also a significant area, most commonly used in ink-jet printer heads. This textbook focuses on the essentials of microsystems technology, providing a knowledgeable grounding and a clear path through this well-established scientific dicipline. With a methodical, student-orientated approach, Introduction to Microsystem Technology covers the following: microsystem materials (including silicon, polymers and thin films), and the scaling effects of going micro; fabrication techniques based on different material properties, descriptions of their limitations and functional and shape elements produced by these techniques; sensors and actuators based on elements such as mechanical, fluidic, and thermal (yaw rate sensor components are described); the influence of technology parameters on microsystem properties, asking, for example, when is the function of a microsystem device robust and safe? The book presents problems at the end of each chapter so that you may test your understanding of the key concepts (full solutions for these are given on an accompanying website). Practical examples are included also, as well as case studies that enable a better understanding of the technology as a whole. With its extensive treatment on the fundamentals of microsystem technology, this book also serves as a compendium for engineers and technicians working with microsystem technology.
Author: Masayoshi Esashi
Publisher: John Wiley & Sons
ISBN: 3527823255
Category : Technology & Engineering
Languages : en
Pages : 528
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Book Description
Explore heterogeneous circuit integration and the packaging needed for practical applications of microsystems MEMS and system integration are important building blocks for the “More-Than-Moore” paradigm described in the International Technology Roadmap for Semiconductors. And, in 3D and Circuit Integration of MEMS, distinguished editor Dr. Masayoshi Esashi delivers a comprehensive and systematic exploration of the technologies for microsystem packaging and heterogeneous integration. The book focuses on the silicon MEMS that have been used extensively and the technologies surrounding system integration. You’ll learn about topics as varied as bulk micromachining, surface micromachining, CMOS-MEMS, wafer interconnection, wafer bonding, and sealing. Highly relevant for researchers involved in microsystem technologies, the book is also ideal for anyone working in the microsystems industry. It demonstrates the key technologies that will assist researchers and professionals deal with current and future application bottlenecks. Readers will also benefit from the inclusion of: A thorough introduction to enhanced bulk micromachining on MIS process, including pressure sensor fabrication and the extension of MIS process for various advanced MEMS devices An exploration of epitaxial poly Si surface micromachining, including process condition of epi-poly Si, and MEMS devices using epi-poly Si Practical discussions of Poly SiGe surface micromachining, including SiGe deposition and LP CVD polycrystalline SiGe A concise treatment of heterogeneously integrated aluminum nitride MEMS resonators and filters Perfect for materials scientists, electronics engineers, and electrical and mechanical engineers, 3D and Circuit Integration of MEMS will also earn a place in the libraries of semiconductor physicists seeking a one-stop reference for circuit integration and the practical application of microsystems.
Author: Kazuo Nojiri
Publisher: Springer
ISBN: 3319102958
Category : Technology & Engineering
Languages : en
Pages : 126
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Book Description
This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniaturization and integration of semiconductor integrated circuits. The author describes the device manufacturing flow, and explains in which part of the flow dry etching is actually used. The content is designed as a practical guide for engineers working at chip makers, equipment suppliers and materials suppliers, and university students studying plasma, focusing on the topics they need most, such as detailed etching processes for each material (Si, SiO2, Metal etc) used in semiconductor devices, etching equipment used in manufacturing fabs, explanation of why a particular plasma source and gas chemistry are used for the etching of each material, and how to develop etching processes. The latest, key technologies are also described, such as 3D IC Etching, Dual Damascene Etching, Low-k Etching, Hi-k/Metal Gate Etching, FinFET Etching, Double Patterning etc.
Author: Sergej Fatikow
Publisher: Springer Science & Business Media
ISBN: 3662034506
Category : Computers
Languages : en
Pages : 420
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Book Description
Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.
Author: Bogdan M. Wilamowski
Publisher: CRC Press
ISBN: 1351834339
Category : Technology & Engineering
Languages : en
Pages : 792
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Book Description
The Industrial Electronics Handbook, Second Edition combines traditional and newer, more specialized knowledge that will help industrial electronics engineers develop practical solutions for the design and implementation of high-power applications. Embracing the broad technological scope of the field, this collection explores fundamental areas, including analog and digital circuits, electronics, electromagnetic machines, signal processing, and industrial control and communications systems. It also facilitates the use of intelligent systems—such as neural networks, fuzzy systems, and evolutionary methods—in terms of a hierarchical structure that makes factory control and supervision more efficient by addressing the needs of all production components. Enhancing its value, this fully updated collection presents research and global trends as published in the IEEE Transactions on Industrial Electronics Journal, one of the largest and most respected publications in the field. Fundamentals of Industrial Electronics covers the essential areas that form the basis for the field. This volume presents the basic knowledge that can be applied to the other sections of the handbook. Topics covered include: Circuits and signals Devices Digital circuits Digital and analog signal processing Electromagnetics Other volumes in the set: Power Electronics and Motor Drives Control and Mechatronics Industrial Communication Systems Intelligent Systems
