Electron Optical Systems for Microscopy, Microanalysis & Microlithography PDF Download
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Author: John J. Hren
Publisher:
ISBN:
Category : Science
Languages : en
Pages : 288
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Book Description
Author: John J. Hren
Publisher:
ISBN:
Category : Science
Languages : en
Pages : 288
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Book Description
Author: Peter W. Hawkes
Publisher: Elsevier
ISBN: 0081022573
Category : Science
Languages : en
Pages : 729
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Book Description
Volume one of Principles of Electron Optics: Basic Geometrical Optics, Second Edition, explores the geometrical optics needed to analyze an extremely wide range of instruments: cathode-ray tubes; the family of electron microscopes, including the fixed-beam and scanning transmission instruments, the scanning electron microscope and the emission microscope; electron spectrometers and mass spectrograph; image converters; electron interferometers and diffraction devices; electron welding machines; and electron-beam lithography devices. The book provides a self-contained, detailed, modern account of electron optics for anyone involved with particle beams of modest current density in the energy range up to a few mega-electronvolts. You will find all the basic equations with their derivations, recent ideas concerning aberration studies, extensive discussion of the numerical methods needed to calculate the properties of specific systems and guidance to the literature of all the topics covered. A continuation of these topics can be found in volume two, Principles of Electron Optics: Applied Geometrical Optics. The book is intended for postgraduate students and teachers in physics and electron optics, as well as researchers and scientists in academia and industry working in the field of electron optics, electron and ion microscopy and nanolithography. - Offers a fully revised and expanded new edition based on the latest research developments in electron optics - Written by the top experts in the field - Covers every significant advance in electron optics since the subject originated - Contains exceptionally complete and carefully selected references and notes - Serves both as a reference and text
Author: Karl Zierold
Publisher: Springer Science & Business Media
ISBN: 364274477X
Category : Science
Languages : en
Pages : 331
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Book Description
The aim of electron probe microanalysis of biological systems is to identify, localize, and quantify elements, mass, and water in cells and tissues. The method is based on the idea that all electrons and photons emerging from an electron beam irradiated specimen contain information on its structure and composition. In particular, energy spectroscopy of X-rays and electrons after interaction of the electron beam with the specimen is used for this purpose. However, the application of this method in biology and medicine has to overcome three specific problems: 1. The principle constituent of most cell samples is water. Since liquid water is not compatible with vacuum conditions in the electron microscope, specimens have to be prepared without disturbing the other components, in parti cular diffusible ions (elements). 2. Electron probe microanaly sis provides physical data on either dry specimens or fully hydrated, frozen specimens. This data usually has to be con verted into quantitative data meaningful to the cell biologist or physiologist. 3. Cells and tissues are not static but dynamic systems. Thus, for example, microanalysis of physiolo gical processes requires sampling techniques which are adapted to address specific biological or medical questions. During recent years, remarkable progress has been made to overcome these problems. Cryopreparation, image analysis, and electron energy loss spectroscopy are key areas which have solved some problems and offer promise for future improvements.
Author: Peter W. Hawkes
Publisher: Academic Press
ISBN: 0080962432
Category : Science
Languages : en
Pages : 599
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Book Description
This is a complete handbook and reference volume which covers everything that one needs to know about electron optics. It is a comprehensive coverage of theoretical background and modern computing methods. It contains a detailed and unique account of numerical methods and an extensive bibliography.
Author: Miklos Szilagyi
Publisher: Springer Science & Business Media
ISBN: 1461309239
Category : Technology & Engineering
Languages : en
Pages : 550
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Book Description
The field of electron and ion optics is based on the analogy between geometrical light optics and the motion of charged particles in electromagnetic fields. The spectacular development of the electron microscope clearly shows the possibilities of image formation by charged particles of wavelength much shorter than that of visible light. As new applications such as particle accelerators, cathode ray tubes, mass and energy spectrometers, microwave tubes, scanning-type analytical instruments, heavy beam technologies, etc. emerged, the scope of particle beam optics has been exten ded to the formation of fine probes. The goal is to concentrate as many particles as possible in as small a volume as possible. Fabrication of microcircuits is a good example of the growing importance of this field. The current trend is towards increased circuit complexity and pattern density. Because of the diffraction limitation of processes using optical photons and the technological difficulties connected with x-ray processes, charged particle beams are becoming popular. With them it is possible to write directly on a wafer under computer control, without using a mask. Focused ion beams offer especially great possibilities in the submicron region. Therefore, electron and ion beam technologies will most probably playa very important role in the next twenty years or so.
Author: Peter W. Hawkes
Publisher: Academic Press
ISBN: 0128134054
Category : Science
Languages : en
Pages : 767
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Book Description
Principles of Electron Optics: Applied Geometrical Optics, Second Edition gives detailed information about the many optical elements that use the theory presented in Volume 1: electrostatic and magnetic lenses, quadrupoles, cathode-lens-based instruments including the new ultrafast microscopes, low-energy-electron microscopes and photoemission electron microscopes and the mirrors found in their systems, Wien filters and deflectors. The chapter on aberration correction is largely new. The long section on electron guns describes recent theories and covers multi-column systems and carbon nanotube emitters. Monochromators are included in the section on curved-axis systems. The lists of references include many articles that will enable the reader to go deeper into the subjects discussed in the text. The book is intended for postgraduate students and teachers in physics and electron optics, as well as researchers and scientists in academia and industry working in the field of electron optics, electron and ion microscopy and nanolithography. - Offers a fully revised and expanded new edition based on the latest research developments in electron optics - Written by the top experts in the field - Covers every significant advance in electron optics since the subject originated - Contains exceptionally complete and carefully selected references and notes - Serves both as a reference and text
Author: T Mulvey
Publisher: Academic Press
ISBN: 1483282244
Category : Science
Languages : en
Pages : 198
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Book Description
Advances in Optical and Electron Microscopy, Volume 11 compiles papers on the important developments in optical and electron microscopy. This book discusses the instrumentation and operation for high-resolution electron microscopy; diffraction pattern and camera length; and electron microscopy of surface structure. The history of surface imaging by conventional transmission electron microscopy; ion probe microscopy; and secondary ion mass spectrometry with high lateral resolution are also elaborated. This text likewise covers the acoustic microscopy; quantitative methods; biological applications and near-surface imaging of solids; and interior imaging. This publication is a beneficial to students and individuals researching on optical and electron microscopy.
Author: John T.L. Thong
Publisher: Springer Science & Business Media
ISBN: 1489915222
Category : Science
Languages : en
Pages : 467
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Book Description
Although exploratory and developmental activity in electron beam testing (EBT) 25 years, it was not had already been in existence in research laboratories for over until the beginning of the 1980s that it was taken up seriously as a technique for integrated circuit (IC) testing. While ICs were being fabricated on design rules of several microns, the mechanical ne edle probe served quite adequately for internal chip probing. This scenario changed with growing device complexity and shrinking geometries, prompting IC manufacturers to take note ofthis new testing technology. It required several more years and considerable investment by electron beam tester manufacturers, however, to co me up with user-friendly automated systems that were acceptable to IC test engineers. These intervening years witnessed intense activity in the development of instrumentation, testing techniques, and system automation, as evidenced by the proliferation of technical papers presented at conferences. With the shift of interest toward applications, the technology may now be considered as having come of age.
Author: National Library of Medicine (U.S.)
Publisher:
ISBN:
Category : Medicine
Languages : en
Pages : 1676
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Book Description
First multi-year cumulation covers six years: 1965-70.
Author: National Library of Medicine (U.S.)
Publisher:
ISBN:
Category : Medicine
Languages : en
Pages : 1000
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Book Description
