Electron-Beam Technology in Microelectronic Fabrication PDF Download
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Author: George Brewer
Publisher: Elsevier
ISBN: 0323153410
Category : Technology & Engineering
Languages : en
Pages : 377
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Book Description
Electron-Beam Technology in Microelectronic Fabrication presents a unified description of the technology of high resolution lithography. This book is organized into six chapters, each treating a major segment of the technology of high resolution lithography. The book examines topics such as the physics of interaction of the electrons with the polymer resist in which the patterns are drawn, the machines that generate and control the beam, and ways of applying electron-beam lithography in device fabrication and in the making of masks for photolithographic replication. Chapter 2 discusses fundamental processes by which patterns are created in resist masks. Chapter 3 describes electron-beam lithography machines, including some details of each of the major elements in the electron-optical column and their effect on the focused electron beam. Chapter 4 presents the use of electron-beam lithography to make discrete devices and integrated circuits. Chapter 5 looks at the techniques and economics of mask fabrication by the use of electron beams. Finally, Chapter 6 presents a comprehensive description and evaluation of the several high resolution replication processes currently under development. This book will be of great value to students and to engineers who want to learn the unique features of high resolution lithography so that they can apply it in research, development, or production of the next generation of microelectronic devices and circuits.
Author: George Brewer
Publisher: Elsevier
ISBN: 0323153410
Category : Technology & Engineering
Languages : en
Pages : 377
Get Book Here
Book Description
Electron-Beam Technology in Microelectronic Fabrication presents a unified description of the technology of high resolution lithography. This book is organized into six chapters, each treating a major segment of the technology of high resolution lithography. The book examines topics such as the physics of interaction of the electrons with the polymer resist in which the patterns are drawn, the machines that generate and control the beam, and ways of applying electron-beam lithography in device fabrication and in the making of masks for photolithographic replication. Chapter 2 discusses fundamental processes by which patterns are created in resist masks. Chapter 3 describes electron-beam lithography machines, including some details of each of the major elements in the electron-optical column and their effect on the focused electron beam. Chapter 4 presents the use of electron-beam lithography to make discrete devices and integrated circuits. Chapter 5 looks at the techniques and economics of mask fabrication by the use of electron beams. Finally, Chapter 6 presents a comprehensive description and evaluation of the several high resolution replication processes currently under development. This book will be of great value to students and to engineers who want to learn the unique features of high resolution lithography so that they can apply it in research, development, or production of the next generation of microelectronic devices and circuits.
Author: Suresh Pillai
Publisher: Elsevier
ISBN: 1782421084
Category : Technology & Engineering
Languages : en
Pages : 355
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Book Description
Food safety is a constant challenge for the food industry, and food irradiation technology has developed significantly since its introduction, moving from isotope irradiation to the use of electron beam technology. Electron Beam Pasteurization and Complementary Food Processing Technologies explores the application of electron beam pasteurization in conjunction with other food processing technologies to improve the safety and quality of food. Part one provides an overview of the issues surrounding electron beam pasteurization in food processing. Part two looks at different thermal and non-thermal food processing technologies that complement irradiation. Finally, a case study section on the commercial applications of e-beam processing provides examples from industry.
Author: Yoshiaki Arata
Publisher: ASM International(OH)
ISBN: 9780871702548
Category : Science
Languages : en
Pages : 658
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Book Description
Author: Margherita Venturi
Publisher: Springer
ISBN: 3319541455
Category : Science
Languages : en
Pages : 309
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Book Description
The series Topics in Current Chemistry Collections presents critical reviews from the journal Topics in Current Chemistry organized in topical volumes. The scope of coverage is all areas of chemical science including the interfaces with related disciplines such as biology, medicine and materials science. The goal of each thematic volume is to give the non-specialist reader, whether in academia or industry, a comprehensive insight into an area where new research is emerging which is of interest to a larger scientific audience. Each review within the volume critically surveys one aspect of that topic and places it within the context of the volume as a whole. The most significant developments of the last 5 to 10 years are presented using selected examples to illustrate the principles discussed. The coverage is not intended to be an exhaustive summary of the field or include large quantities of data, but should rather be conceptual, concentrating on the methodological thinking that will allow the non-specialist reader to understand the information presented. Contributions also offer an outlook on potential future developments in the field.
Author: Robert Wray Hamm
Publisher: World Scientific
ISBN: 9814307041
Category : Science
Languages : en
Pages : 436
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Book Description
This unique new book is a comprehensive review of the many current industrial applications of particle accelerators, written by experts in each of these fields. Readers will gain a broad understanding of the principles of these applications, the extent to which they are employed, and the accelerator technology utilized. The book also serves as a thorough introduction to these fields for non-experts and laymen. Due to the increased interest in industrial applications, there is a growing interest among accelerator physicists and many other scientists worldwide in understanding how accelerators are used in various applications. The government agencies that fund scientific research with accelerators are also seeking more information on the many commercial applications that have been or can be developed with the technology developments they are funding. Many industries are also doing more research on how they can improve their products or processes using particle beams
Author: H Schultz
Publisher: Elsevier
ISBN: 1845698789
Category : Technology & Engineering
Languages : en
Pages : 245
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Book Description
Translated from the German, this is a practical book for engineers which explains the trials, development and manufacturing processes involved in electron beam welding.
Author: Vicente M. Gómez-López
Publisher: John Wiley & Sons
ISBN: 111975951X
Category : Technology & Engineering
Languages : en
Pages : 469
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Book Description
A comprehensive source of in-depth information provided on existing and emerging food technologies based on the electromagnetic spectrum Electromagnetic Technologies in Food Science examines various methods employed in food applications that are based on the entire electromagnetic (EM) spectrum. Focusing on recent advances and challenges in food science and technology, this is an up-to-date volume that features vital contributions coming from an international panel of experts who have shared both fundamental and advanced knowledge of information on the dosimetry methods, and on potential applications of gamma irradiation, electron beams, X-rays, radio and microwaves, ultraviolet, visible, pulsed light, and more. Organized into four parts, the text begins with an accessible overview of the physics of the electromagnetic spectrum, followed by discussion on the application of the EM spectrum to non-thermal food processing. The physics of infrared radiation, microwaves, and other advanced heating methods are then deliberated in detail—supported by case studies and examples that illustrate a range of both current and potential applications of EM-based methods. The concluding section of the book describes analytical techniques adopted for quality control, such as hyperspectral imaging, infrared and Raman spectroscopy. This authoritative book resource: Covers advanced theoretical knowledge and practical applications on the use of EM spectrum as novel methods in food processing technology Discusses the latest progress in developing quality control methods, thus enabling the control of continuous fast-speed processes Explores future challenges and benefits of employing electromagnetic spectrum in food technology applications Addresses emerging processing technologies related to improving safety, preservation, and overall quality of various food commodities Electromagnetic Technologies in Food Science is an essential reading material for undergraduate and graduate students, researchers, academics, and agri-food professionals working in the area of food preservation, novel food processing techniques and sustainable food production.
Author: Yuan Lin
Publisher: John Wiley & Sons
ISBN: 3527696458
Category : Technology & Engineering
Languages : en
Pages : 328
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Book Description
This concise reference summarizes the latest results in nano-structured thin films, the first to discuss both deposition methods and electronic applications in detail. Following an introduction to this rapidly developing field, the authors present a variety of organic and inorganic materials along with new deposition techniques, and conclude with an overview of applications and considerations for their technology deployment.
Author: Barry P. Fairand
Publisher: CRC Press
ISBN: 9781587160745
Category : Technology & Engineering
Languages : en
Pages : 162
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Book Description
Focusing on how the radiation process works and how it is applied in sterilizing medical devices and healthcare products, this book provides the latest developments in radiation technology in the form of e-beams, gamma rays, and x-rays. It covers the design and operation of irradiators as well as factors that affect cost and efficiency. It offers readers practical insights on this critical step in healthcare product manufacturing, its current uses, and its related cost concerns. Bringing all the information into one source, Radiation Sterilization for Health Care Products is a uniquely comprehensive resource.
Author: Maria Stepanova
Publisher: Springer Science & Business Media
ISBN: 3709104246
Category : Technology & Engineering
Languages : en
Pages : 344
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Book Description
Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.
