Diagnostic Techniques for Semiconductor Materials Processing: Volume 324 PDF Download
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Author: O. J. Glembocki
Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 536
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Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author: O. J. Glembocki
Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 536
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Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author: O. J. Glembocki
Publisher:
ISBN:
Category :
Languages : en
Pages : 499
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Book Description
The symposium focused on various aspects of process diagnostics and device processing. Diagnostic techniques which were considered fell into two classes: invasive and non invasive. Optical characterization techniques were the most widely applied characterization tools used in both materials and process monitoring. Techniques such as reflectance difference, ellipsometry, reflectance, absorption, light scattering, photoreflectance, Raman scattering and thermal wave modulated reflectance were shown to be powerful probes of various materials properties. The materials properties that were probed included surface stoichiometry and morphology, etch damage, Fermi level pinning position and thin film properties such as thickness, alloy content, and interfacial roughness. Real time diagnostics such as ellipsometry and reflectance difference were shown to be sensitive tools of materials properties during processing.
Author:
Publisher:
ISBN:
Category : Semiconductors
Languages : en
Pages : 536
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Book Description
Author: Dieter K. Schroder
Publisher: The Electrochemical Society
ISBN: 1566775698
Category : Semiconductors
Languages : en
Pages : 406
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Book Description
Diagnostic characterization techniques for semiconductor materials, devices and device processing are addressed at this symposium. It will cover new techniques as well as advances in routine analytical technology applied to semiconductor process development and manufacture. The hardcover edition includes a CD-ROM of ECS Transactions, Volume 10, Issue 1, Analytical Techniques for Semiconductor Materials and Process Characterization 5 (ALTECH 2007). The PDF edition also includes the ALTECH 2007 papers.
Author: Stella W. Pang
Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 616
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Book Description
The fabrication of Si- and compound semiconductor-based devices involves a number of steps ranging from material growth to pattern definition by lithography, and ultimately, pattern transfer by etching/deposition. The key to device manufacturing, however, is reproducibility, low cost and high yield. Diagnostic techniques allow correlation between processing and actual device performance to be established. Researchers from universities, industry and government come together in this book to examine the advances in diagnostic techniques that provide critical information on structural, optical and electrical properties of semiconductor devices, as well as monitoring techniques for equipment/processes for control and feedback. The overriding goal is for rapid, accurate materials characterization, both in situ and ex situ. Topics include: in situ diagnostics; proximal probe microscopies; optical probes of devices and device properties; spectroscopic ellipsometry/structural diagnostics; and material analysis - X-ray techniques, strain measurements and passivation.
Author: Jimmie J. Wortman
Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 472
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Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author: Dieter K. Schroder
Publisher: The Electrochemical Society
ISBN: 9781566770927
Category : Technology & Engineering
Languages : en
Pages : 408
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Book Description
Author: Marvin J. Weber
Publisher:
ISBN:
Category : Science
Languages : en
Pages : 548
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Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author: Bernd O. Kolbesen
Publisher: The Electrochemical Society
ISBN: 9781566773485
Category : Technology & Engineering
Languages : en
Pages : 572
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Book Description
.".. ALTECH 2003 was Symposium J1 held at the 203rd Meeting of the Electrochemical Society in Paris, France from April 27 to May 2, 2003 ... Symposium M1, Diagnostic Techniques for Semiconductor Materials and Devices, was part of the 202nd Meeting of the Electrochemical Society held in Salt Lake City, Utah, from October 21 to 25, 2002 ..."--p. iii.
Author: Peter Børgesen
Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 480
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Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
