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Author: M. Suezawa
Publisher: Trans Tech Publications
ISBN:
Category : Science
Languages : en
Pages : 608
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Book Description
The study of defects in semiconductors has never been independent of the progress in semiconductor technology. With rapid development in semiconductor device technology, novel types of defects as well as very peculiar behavior of defects in semiconductors have been found one after another. New subjects in the basic study of defects have often been arisen from experiences in the practical field. Great progress has also been achieved in device production technology on the basis of the knowledge clarified in the basic field.
Author: M. Suezawa
Publisher: Trans Tech Publications
ISBN:
Category : Science
Languages : en
Pages : 608
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Book Description
The study of defects in semiconductors has never been independent of the progress in semiconductor technology. With rapid development in semiconductor device technology, novel types of defects as well as very peculiar behavior of defects in semiconductors have been found one after another. New subjects in the basic study of defects have often been arisen from experiences in the practical field. Great progress has also been achieved in device production technology on the basis of the knowledge clarified in the basic field.
Author:
Publisher:
ISBN:
Category : Semiconductors
Languages : en
Pages : 648
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Book Description
Author: Masashi Suezawa
Publisher:
ISBN:
Category : Semiconductors
Languages : en
Pages : 666
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Book Description
Author: Gordon Davies
Publisher:
ISBN:
Category : Semiconductors
Languages : en
Pages : 596
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Book Description
Author: György Ferenczi
Publisher:
ISBN:
Category : Semiconductors
Languages : en
Pages : 1026
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Book Description
Author: Giorgio Benedek
Publisher: Springer Science & Business Media
ISBN: 1468457098
Category : Science
Languages : en
Pages : 286
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Book Description
The systematic study of defects in semiconductors began in the early fifties. FrQm that time on many questions about the defect structure and properties have been an swered, but many others are still a matter of investigation and discussion. Moreover, during these years new problems arose in connection with the identification and char acterization of defects, their role in determining transport and optical properties of semiconductor materials and devices, as well as from the technology of the ever in creasing scale of integration. This book presents to the reader a view into both basic concepts of defect physics and recent developments of high resolution experimental techniques. The book does not aim at an exhaustive presentation of modern defect physics; rather it gathers a number of topics which represent the present-time research in this field. The volume collects the contributions to the Advanced Research Workshop "Point, Extended and Surface Defects in Semiconductors" held at the Ettore Majo rana Centre at Erice (Italy) from 2 to 7 November 1988, in the framework of the International School of Materials Science and Technology. The workshop has brought together scientists from thirteen countries. Most participants are currently working on defect problems in either silicon submicron technology or in quantum wells and superlattices, where point defects, dislocations, interfaces and surfaces are closely packed together.
Author:
Publisher:
ISBN:
Category : Crystals
Languages : en
Pages : 990
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Book Description
Author: Cor L. Claeys
Publisher: The Electrochemical Society
ISBN: 9781566771566
Category : Science
Languages : en
Pages : 606
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Book Description
Author: S. Coffa
Publisher: Springer Science & Business Media
ISBN: 940112714X
Category : Technology & Engineering
Languages : en
Pages : 523
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Book Description
Semiconductors lie at the heart of some of the most important industries and technologies of the twentieth century. The complexity of silicon integrated circuits is increasing considerably because of the continuous dimensional shrinkage to improve efficiency and functionality. This evolution in design rules poses real challenges for the materials scientists and processing engineers. Materials, defects and processing now have to be understood in their totality. World experts discuss, in this volume, the crucial issues facing lithography, ion implication and plasma processing, metallization and insulating layer quality, and crystal growth. Particular emphasis is placed upon silicon, but compound semiconductors and photonic materials are also highlighted. The fundamental concepts of phase stability, interfaces and defects play a key role in understanding these crucial issues. These concepts are reviewed in a crucial fashion.
Author: Helmut Heinrich
Publisher:
ISBN:
Category : Semiconductors
Languages : en
Pages : 724
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Book Description
