Amorphous Insulating Thin Films: Volume 284 PDF Download
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Author: Jerzy Kanicki
Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 670
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Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author:
Publisher:
ISBN:
Category : Amorphous semiconductors
Languages : en
Pages : 660
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Book Description
Author: Jerzy Kanicki
Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 670
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Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author: William L. Warren
Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 464
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Book Description
This book is devoted to the continuing research and development of thin-dielectric films for optical and microelectronic applications. Although thermal SiO2 has been the dominant dielectric for thin films in microelectronic applications for many years, there is a growing need for low-dielectric constant materials for interlevel dielectrics (less capacitive cross-talk and reduced delay) and high-dielectric constant materials to minimize the space and maximize the capacitance of storage devices such as DRAMs. With the demands put forth by the microelectronics community, this field is expected to develop significantly in the near future. Also featured is the growing area involving the structure and characteriza-tion of buried a-SiO2 layers formed by O+ ion implantation or the Smart Cut Unibond® process. These techniques are evolving into viable methods for producing commercial silicon-on-insulator substrates for device applications requiring radiation hardness, high-speed and low-power performance, and high-temperature operation.
Author: Roderick A. B. Devine
Publisher: Elsevier Publishing Company
ISBN:
Category : Science
Languages : en
Pages : 546
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Book Description
These proceedings present a review of the research being carried out in the field of amorphous insulating thin films. Topics discussed include: nitrides, structure and defects; hydrogen in MOS structures and oxides; silicon dioxide, charge trapping; and ONO and nitride oxides.
Author: Rod A. B Devine
Publisher:
ISBN:
Category :
Languages : en
Pages :
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Book Description
Author: Roderick A. B. Devine
Publisher: Materials Research Society
ISBN: 9781558991798
Category : Technology & Engineering
Languages : en
Pages :
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Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author:
Publisher:
ISBN:
Category :
Languages : en
Pages :
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Author: I. H. Wilson
Publisher:
ISBN:
Category :
Languages : en
Pages :
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Author: International Conference on Amorphous and Crystalline Insulating Thin Films. 2, 1998, Hong Kong
Publisher:
ISBN:
Category :
Languages : en
Pages : 192
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Book Description
Author: Roderick A. B. Devine
Publisher:
ISBN:
Category : Dielectric films
Languages : en
Pages : 510
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Book Description
